UV RADIATION UNIT, UV RECTOR AND METHOD FOR MANUFACTURING A UV RADIATION UNIT

Abstract

A UV irradiation unit (10) comprises a device (15) for generating electromagnetic radiation (30) with a wavelength less than 500 nm, a lens (17), and a detector element (18). The detector element has a photodiode (107) formed in a semiconductor substrate (100) with a first main surface (101) and a converter layer (110) arranged above the first main surface (101). The converter layer (110) is configured to convert electromagnetic radiation (30) with a first wavelength less than 500 nm into electromagnetic radiation with a second wavelength greater than the first wavelength. The detector element further comprises an optical bandpass filter (115) configured to block electromagnetic radiation with a wavelength greater than 380 nm, the optical bandpass filter (115) being arranged on a side of the converter layer (110) facing away from the semiconductor substrate (100).The device (15) for generating electromagnetic radiation (30) and the detector element (18) are arranged on a planar surface (109) of the lens (17). The lens is configured (17) to direct a portion of the radiation (30) emitted by the device (15) for generating electromagnetic radiation to the detector element (18).

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