Anode module and electrotreatment unit for electrotreatment of a substrate using a process fluid and method for electrotreatment of a substrate using a process fluid

DE102025112744A1Undetermined Publication Date: 2026-10-01LAM RESEARCH SALZBURG GMBH
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Patent Information

Application Number
DE102025112744
Authority / Receiving Office
DE · DE
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-04-01
Publication Date
2026-10-01

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Abstract

The disclosure relates to an anode module (32) for electrotreating a substrate (12) using a process fluid (18). The anode module (32) comprises an anode (22) and a bubble removal unit (30). The anode (22) is configured to be inserted into an electrotreatment chamber (14) filled with the process fluid (18). The anode (22) further comprises an anode surface (28) located in the process fluid (18) and susceptible to the accumulation of gas bubbles that form as a result of the electrotreatment. The bubble removal unit (30) is configured to generate relative motion between the anode surface (28) and the process fluid (18) to promote the detachment of the gas bubbles from the anode surface (28). Furthermore, the present disclosure relates to an electrotreatment unit (10) for electrotreating a substrate (12) using a process fluid (18).Furthermore, the present disclosure relates to a method for the electrotreatment of a substrate (12) using a process fluid (18).
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Citation Information

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