Method for operating a microelectromechanical mirror and mirror system

DE102025119054B3Undetermined Publication Date: 2026-07-09TDK ELECTRONICS AG
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Patent Information

Authority / Receiving Office
DE · DE
Patent Type
Patents
Current Assignee / Owner
TDK ELECTRONICS AG
Filing Date
2025-05-16
Publication Date
2026-07-09

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Abstract

A method for operating a microelectromechanical mirror (1) is described, wherein: - the deflection of a mirror element (11) of the microelectromechanical mirror (1) is controlled by adjusting at least one drive signal (Ax, Ay) based on at least one detected sensor signal (Sx, Sy), and - at least one sensor signal (Sx, Sy) is generated by at least one piezoelectric sensor element (12) of the microelectromechanical mirror (1). Furthermore, a mirror system (100) is described.
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