Connector system for the automated connection of a coolant port in a high-vacuum environment
Patent Information
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- CARL ZEISS SMT GMBH
- Filing Date
- 2025-08-14
- Publication Date
- 2026-07-23
AI Technical Summary
Existing coolant connections for microlithography are either not suitable for high-vacuum (HV) or ultra-high-vacuum (UHV) environments or are not automatable, failing to meet the requirements of EUV lithography and other microlithography applications.
A connector system with evacuable cavities and sealing elements that create a pressure cascade, allowing conventional coolant connections to be automated while maintaining a high-vacuum or ultra-high-vacuum environment by extracting coolant and minimizing leakage.
The system ensures negligible coolant leakage into the high-vacuum or ultra-high-vacuum environment, enabling automated connections suitable for EUV lithography and other microlithography processes.
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Abstract
Description
[0001] The invention relates to a connector system for connecting a coolant. The invention also relates to the use of a connector system and a device or system for the heat treatment of at least one optical element for microlithography.
[0002] EUV lithography is a specialized field of microlithography that uses light with a wavelength of approximately 13.5 nm to transfer extremely fine structures onto semiconductor wafers. The abbreviation EUV stands for "extreme ultraviolet." EUV lithography requires highly precise and powerful mirrors that efficiently reflect EUV light. These mirrors can be composed of one or more individually pivotable micromirrors, as described in the international publication WO 2012 / 130768 A2. Groups of micromirrors can be configured as a so-called MEMS micromirror array, i.e., a mirror array made of microelectromechanical systems (MEMS). In a MEMS micromirror array, a multitude of small mirror elements are mounted on a common base, each individually movable.Each mirror element is provided with at least one actuator with which the mirror element can be adjusted along predefined degrees of freedom, as described in the German publication DE 10 2015 204 874 A1.
[0003] Mirrors used in EUV lithography in general, and MEMS micromirror arrays in particular, can be annealed as part of the fabrication of a corresponding projection exposure objective. In this context, annealing is a heat treatment process aimed at improving the optical and mechanical properties of the mirror surface. Among other things, annealing modifies the atomic layers of the mirror surface to create a smoother and more homogeneous surface, thus preventing nanometer-scale irregularities from affecting the mirror's reflectivity. Furthermore, annealing can also help increase the mirror's structural stability and reduce defects such as pores or microcracks.
[0004] During annealing in a suitable annealing oven, the MEMS micromirror arrays are typically cooled from the back with water to prevent damage to the electronics mounted on the rear side. Annealing takes place in a high vacuum (HV), particularly an ultra-high vacuum (UHV). Furthermore, loading the annealing oven is automated using robots to minimize the introduction of foreign particles through manual intervention. Therefore, a water connection in the form of a plug-in fitting is required for cooling. This connection must be sufficiently watertight to meet the vacuum requirements and suitable for automated connection. While plug-in water connections are already known in the prior art, they currently only fulfill one of the two requirements.They are either HV or UHV capable, but can only be operated manually, or they are automation capable, but not suitable for an HV or UHV environment.
[0005] Furthermore, not only in EUV lithography in connection with MEMS micromirror arrays, but also in other areas of microlithography, there is a need for a pluggable connection for a coolant that is at least HV-compatible and also capable of automation.
[0006] Against this background, the present invention aims to provide a connector system for connecting a coolant that is suitable for both high-voltage (HV) and ultra-high-voltage (UHV) environments as well as for automated connection. Furthermore, the present invention aims to provide an advantageous use of such a connector system and a corresponding device or system for the heat treatment of at least one optical element for microlithography.
[0007] According to a first teaching of the present invention, the above-mentioned problem is solved by a connector system for connecting a coolant, wherein the connector system comprises a first component and a second component, wherein the first component comprises a plug for connecting the coolant and the second component comprises a socket for connecting the coolant, wherein the connector system comprises a connection area in which the plug and the socket can be detachably connected to each other, wherein the connector system, in a state in which the plug and the socket are connected to each other, further comprises: - a first evacuable cavity arranged around the connection area, - a second evacuable cavity arranged around the first evacuable cavity, - a first sealing element that seals the first evacuable cavity and the second evacuable cavity against each other. - a second sealing element that seals the second evacuable cavity against a high vacuum environment.
[0008] In the context of the present invention, a coolant is understood to be a medium that can be used in a cooling circuit. For example, the coolant can be a fluid, i.e., a liquid or a gas. A liquid coolant such as water is preferred.
[0009] According to the invention, the connector for the coolant connection can be a conventional coolant connection connector. The coolant connection can, in particular, be a water connection. For example, the connector is suitable for automation but not for HV or UHV environments. Similarly, the socket for the coolant connection can be a conventional coolant connection socket. For example, the socket is also suitable for automation but not for HV or UHV environments.
[0010] In the context of the present invention, the term "high vacuum" (HV) refers to a vacuum with a pressure of 10 -3 mbar or less is understood. In particular, a high vacuum environment in this context can be an ultra-high vacuum environment. The term "ultra-high vacuum" (UHV) refers to a vacuum with a pressure of 10 -6 mbar or less, in particular 10-8 mbar or less understood.
[0011] In the context of the present invention, an optical element for microlithography is understood to be, in particular, a lens, a mirror, or a group of mirrors for a microlithographic projection exposure objective. For example, the optical element can be a group of mirrors for EUV lithography. For example, the optical element can be a MEMS micromirror array.
[0012] The connector system according to the first teaching solves the problem underlying the invention, since such a system uses a conventional plug and a conventional socket for a coolant connection, which can be automated. While such a plug and socket are not inherently suitable for a high-voltage (HV) or ultra-high-voltage (UHV) environment, the HV or UHV suitability of the connector system is achieved according to the invention by the first and second evacuable cavities and the first and second sealing elements. More precisely, a coolant medium that enters the first evacuable cavity from the coolant connection can be largely extracted there. The pressure in the first evacuable cavity can be maintained in the rough vacuum range for this purpose. The portion of the coolant medium that cannot be extracted can pass through the first sealing element and enter the second evacuable cavity.The first sealing element ensures that the leakage rate is reduced. Furthermore, the portion of the coolant that enters the second evacuable cavity can be extracted from there. Only a very small amount of the coolant can pass through the second sealing element from the second evacuable cavity and enter the high-vacuum environment, as the second sealing element also reduces the leakage rate. Overall, this ensures that only a negligible portion of any coolant that might escape from the coolant connection enters the high-vacuum environment. In this way, the connector system according to the invention is suitable for high-vacuum or ultra-high-vacuum environments.In particular, the conventional, automatable coolant connection, which is not designed for high vacuum, is made suitable for HV, preferably UHV, by means of a pressure cascade via the two evacuable cavities.
[0013] In embodiments of the invention, it is also conceivable to provide three or more evacuatable upper spaces arranged in a cascade-like manner. In this context, it is also conceivable that atmospheric pressure prevails in the innermost evacuated cavity, which is arranged around the connection area.
[0014] In a preferred embodiment of the first teaching, the first component is formed by a container configured to hold and cool at least one optical element for microlithography, wherein the second component is formed by a vacuum-side portion of a vacuum chamber, and wherein the vacuum-side portion of the vacuum chamber and the container are configured to be detachably connected to one another. This allows the connector system to be integrated directly into the vacuum chamber. For example, the vacuum chamber can be a vacuum chamber of a tempering furnace. For example, the tempering furnace can be configured for the heat treatment of at least one optical element for microlithography. For example, the vacuum-side portion of the vacuum chamber can be a machine bed of the tempering furnace.
[0015] According to the preferred embodiment described above, the first component, which comprises the plug for connecting the coolant, is formed by the container, and the second component, which comprises the socket for connecting the coolant, is formed by the vacuum-side part of the vacuum chamber. In alternative embodiments of a connector system according to the first teaching, the plug and socket can also be reversed. In other words, the first component, which comprises the plug for connecting the coolant, can be formed by the vacuum-side part of the vacuum chamber, and the second component, which comprises the socket for connecting the coolant, can be formed by the container.
[0016] In a further preferred embodiment of the first teaching, the vacuum-side part of the vacuum chamber and the container are designed such that when the vacuum-side part and the container are connected, the plug and socket are also connected simultaneously. This allows for easy handling.
[0017] In a further preferred embodiment of the first teaching, the container simultaneously forms a first component of a further connector system according to the first teaching, and the vacuum-side part of the vacuum chamber simultaneously forms a second component of the further connector system. This makes it possible to implement an additional HV-compatible or UHV-compatible, automatable coolant connection. For example, corresponding connections for a coolant inlet and outlet can be implemented in this way. The vacuum-side part of the vacuum chamber and the container can be designed such that when the vacuum-side part and the container are connected to each other, the plug of the first component of the further connector system and the socket of the second component of the further connector system for the coolant connection are also connected to each other.This allows for even simpler handling. Furthermore, the second evacuable cavity can simultaneously serve as a second evacuable cavity for both the connector system and the subsequent connector system. Similarly, the second sealing element can simultaneously serve as a second sealing element for both the connector system and the subsequent connector system. This results in a simpler design with fewer components overall.
[0018] In a further preferred embodiment of the first teaching, the first component is formed by a plug element and the second component is formed by a socket element, wherein the plug element and the socket element are configured to be detachably connected to one another, and wherein the plug element and the socket element are designed such that when the plug element and the socket element are connected to one another, the plug and socket for connecting the coolant are also connected to one another at the same time. This allows a self-contained connector system with a plug element and a socket element to be provided, which also includes the plug and socket for connecting the coolant.
[0019] According to the preferred embodiment described above, the first component, which comprises the plug for connecting the coolant, is formed by the plug element of the connector system, and the second component, which comprises the socket for connecting the coolant, is formed by the socket element of the connector system. The terms "plug" and "socket" refer to the coolant connection, while the terms "plug element" and "socket element" refer to the overall connector system. In alternative embodiments of a connector system according to the first teaching, the plug and socket can also be reversed. In other words, the plug element of the connector system can comprise the socket for connecting the coolant, and the socket element of the connector system can comprise the plug for connecting the coolant.
[0020] In a further preferred embodiment of the first teaching, the connector element comprises a first plate element. For example, the connector – or in alternative embodiments the socket – for connecting the coolant can be attached to the first plate element.
[0021] In a further preferred embodiment of the first teaching, the plug element comprises the first sealing element. Alternatively, the socket element can also comprise the first sealing element.
[0022] In a further preferred embodiment of the first teaching, the plug element comprises the second sealing element. Alternatively, the socket element can also comprise the second sealing element.
[0023] In a further preferred embodiment of the first teaching, the plug element comprises a first vacuum port for evacuating the first evacuable cavity. Alternatively, the socket element can also comprise the first vacuum port.
[0024] In a further preferred embodiment of the first teaching, the plug element comprises a second vacuum port for evacuating the second evacuable cavity. Alternatively, the socket element can also comprise the second vacuum port.
[0025] In a further preferred embodiment of the first teaching, the socket element comprises a second plate element. For example, the socket – or in alternative embodiments the plug – for connecting the coolant can be attached to the second plate element.
[0026] In a further preferred embodiment of the first teaching, the bushing element comprises a third plate element.
[0027] In a further preferred embodiment of the first teaching, the socket element comprises at least one first preload element, which is arranged between the second plate element and the third plate element. This allows a clearance for connecting the plug and socket for the coolant connection to be achieved, thus simplifying the connection of the plug and socket.
[0028] In a further preferred embodiment of the first teaching, the first plate element has a scraper edge and a retaining groove, wherein the bushing element has a gripping element which is movable between an open position and a closed position, and wherein the bushing element has at least a second preloading element which preloads the gripping element into the closed position. This allows a snap-fit connection to be provided.
[0029] According to a second teaching of the present invention, the above-mentioned problem is solved by using a connector system according to the first teaching for cooling at least one optical element for microlithography. For example, the connector system can be used for cooling MEMS micromirror arrays with water. In particular, this can involve back-side cooling of the MEMS micromirror arrays in a tempering oven.
[0030] According to a third teaching of the present invention, the above-mentioned problem is solved by a device or system for the heat treatment of at least one optical element for microlithography, wherein the device or system comprises a connector system according to the first teaching. The device or system can, for example, be a tempering oven for MEMS micromirror arrays. The MEMS micromirror arrays can be cooled in the tempering oven, particularly from the rear.
[0031] Further embodiments and advantages of the invention can be found in the following detailed description of some exemplary embodiments of the present invention, particularly in conjunction with the drawing. The drawing shows in Fig. 1 a schematic sectional view of a tempering oven for MEMS micromirror arrays with a first embodiment of a connector system according to the invention, Fig. 2 a schematic representation of a second embodiment of a connector system according to the invention comprising a plug element and a socket element, and Fig. 3a to 3d schematic sectional views of the connector system from Fig. 2 to illustrate the connection of the plug element and the socket element.
[0032] Fig. Figure 1 shows a first embodiment of a connector system according to the invention in a schematic sectional view. The connector system is integrated into a tempering oven for MEMS micromirror arrays and provides an automatable, UHV-compatible connector for water connections for rear cooling of the MEMS micromirror arrays. The connector system 100 comprises, as a first component, a container 101 which holds the MEMS micromirror arrays 111. Furthermore, the connector system 100 comprises, as a second component, a machine bed 102 of the tempering oven.
[0033] Container 101 is constructed in two parts, comprising an upper part 101a and a lower part 101b, which are connected by connecting screws 116. A ring seal 115 is embedded in the lower part 101b, and when the connecting screws 116 are tightened, the upper part 101a and the lower part 101b are each pressed against this ring seal 115. Furthermore, the lower part 101b contains a cooling channel 114 through which water can be supplied for rear cooling of the MEMS micromirror arrays 111. At each end of the cooling channel 114 are a connector 103 for a detachable water connection, forming an inlet and outlet for the water as a cooling medium. The machine bed 102 also contains water channels 113, at the ends of which are corresponding sockets 104 for the detachable water connection. Likewise, plugs 103 and sockets 104 could also be reversed, i.e.The sockets 104 could be located on the container 101 and the plugs 103 could be located on the machine bed 102.
[0034] Container 101 and machine bed 102 can be connected and held together by clamping pins 112. The clamping pins 112, plugs 103, and sockets 104 are positioned such that when container 101 is connected to machine bed 102, plugs 103 and sockets 104 are simultaneously connected. Likewise, when container 101 is disconnected from machine bed 102, plugs 103 and sockets 104 are simultaneously disconnected. Connecting and disconnecting can be automated using a robot. Fig. Figure 1 shows a state in which the container 101 and the machine bed 102 are connected and held together by the clamping pins 112. Accordingly, the plugs 103 and the sockets 104 at the water inlet and outlet are also connected to each other.
[0035] To prevent water potentially escaping from the water connections from entering the UHV environment 110 of the furnace in relevant quantities—i.e., in quantities that could endanger the UHV—the connector system 100 comprises a first evacuable cavity 106 in the form of a water connection chamber 106 and a first sealing element 108 in the form of a first ring seal 108 at both the water inlet and the water outlet. The water connection chamber 106 can be evacuated via the first supply line 117. Furthermore, the connector system 100 comprises a second evacuable cavity 107 in the form of an intermediate chamber 107 and a second sealing element 109 in the form of a second ring seal 109. The intermediate chamber 107 and the second ring seal 109 are part of a corresponding connector system for both the water inlet and the water outlet. The intermediate chamber 107 can be evacuated via the second supply line 118.The water connection chambers 106 each surround a connection area 105 of the water connection, in which the plugs 103 can be detachably connected to the sockets 104. The first ring seals 108, each recessed in a groove of the machine bed 102, seal the water connection chambers 106 against the intermediate chamber 107. The intermediate chamber 107 surrounds the two water connection chambers 106. The second ring seal 109, recessed in another groove of the machine bed 102, seals the intermediate chamber 107 against the UHV environment 110.This prevents water potentially escaping from the water connections from entering the UHV environment 110 in larger quantities via the respective water connection chamber 106 and the intermediate chamber 107, since, on the one hand, the water can be pumped out of the water connection chambers 106 and the intermediate chamber 107, and, on the other hand, corresponding leakage rates are reduced by the first ring seals 108 and the second ring seal 109. The water connection chambers 106 can, for example, be expanded to 10. -1 up to 10 -2 mbar evacuation. Intermediate chamber 107, for example, can be evacuated to 10 -3 up to 10 -4 mbar evacuation.
[0036] Through the in Fig. The setup shown in Figure 1 thus provides double protection for the UHV environment while simultaneously ensuring direct rear cooling of the MEMS micromirror arrays. Before unloading the container, it is advantageous to pump out the entire cooling system, i.e., the water channels 113 of the machine bed 102, the cooling channels 114 of the container 101, and the plugs 103 and sockets 104, purge it with an inert gas, and then pump it back down to a vacuum. Instead of the inert gas, another suitable dry gas, such as XCDA (extra clean dry air), can also be used at this point. The purging and subsequent pumping ensures that any amount of coolant that might leak from the two water connections formed by the plugs 103 and the sockets 104 is reduced.Furthermore, it is advantageous to close the vacuum lines 117, 118 inserted into the machine bed for evacuating the water connection chambers 106 and the intermediate chamber 107 before uncoupling the container, in order not to contaminate the UHV.
[0037] Fig. Figure 2 shows a second embodiment of a connector system according to the invention in a schematic sectional view. The connector system 200 is a self-contained connector system and comprises, as a first component, a plug element 201 and, as a second component, a socket element 202. The plug element 201 can be permanently installed in a machine. For example, the plug element 201 can be permanently installed in a machine bed of a tempering furnace for MEMS micromirror arrays. The socket element 202 can be permanently installed in a tool. For example, the socket element 202 can be permanently installed in a tempering container for MEMS micromirror arrays.
[0038] The connector element 201 includes a plug 203 for connecting a coolant. The socket element 202 includes a corresponding socket 204 for connecting the coolant. However, the plug 203 and socket 204 could also be reversed, i.e., the connector element 201 could include the socket 204 and the socket element 202 could include the plug 203. The individual components of the connector element 201 and the socket element 202 are arranged such that when the connector element 201 and the socket element 202 are connected or disconnected, the plug 203 and socket 204 are simultaneously connected or disconnected. This connection and disconnection can be automated using a robot.
[0039] The connector element 201 comprises a first plate element 211 in the form of a counter plate 211, on which the connector 203 is attached. Furthermore, a first vacuum connection 212 and a second vacuum connection 213 are integrated into the counter plate 211. In addition, a first sealing element 208 in the form of a first ring seal 208 and a second sealing element 209 in the form of a second ring seal 209 are each located in a corresponding groove in the counter plate 211.
[0040] The bushing element 202 comprises a second plate element 214 in the form of a pressure plate 214, on which the bushing 204 is mounted. Furthermore, the bushing element 202 comprises a third plate element 215 in the form of a clamping plate 215, as well as first preload elements 216 in the form of first preload springs 216, which are arranged between the pressure plate 214 and the clamping plate 215. The first preload springs 216 mechanically decouple the coolant connection bushing 204 from the clamping plate 215, thus enabling a locating clearance for connecting the plug 203 to the bushing 204.
[0041] In Fig. Figure 2 shows the connector system 200 in a connected state, i.e., the plug element 201 and the socket element 202 are connected to each other, and the plug 203 and the socket 204 are thereby also connected to each other. In this state, a fluid connection is established between the coolant line 223, at the end of which the plug 203 is located, and the coolant line 224, at the end of which the socket 204 is located. At the same time, the connector system 200 prevents coolant that may escape from the coolant connection from entering an external UHV environment 210 in significant quantities. More precisely, a first evacuable cavity 206 in the form of a coolant connection chamber 206 is formed around a connection area 205 of the coolant connection, which can be evacuated via the first vacuum port 212.Furthermore, a second evacuable cavity 207 in the form of an intermediate chamber 207 is formed around the coolant connection chamber 206, which can be evacuated via the second vacuum connection 213. The first ring seal 208 seals the coolant connection chamber 206 against the intermediate chamber 207, and the second ring seal 209 seals the intermediate chamber 207 against the UHV environment 210. This prevents coolant potentially escaping from the coolant connection from entering the UHV environment 210 in larger quantities via the coolant connection chamber 206 and the intermediate chamber 207, since the coolant can be pumped out of both the coolant connection chamber 206 and the intermediate chamber 207, and corresponding leakage rates are reduced by the first ring seal 208 and the second ring seal 209. For this purpose, the coolant connection chamber 206 can, for example, be opened to 10. -1 up to 10 -2mbar evacuation. Intermediate chamber 207, for example, can be evacuated to 10 -3 up to 10 -4 mbar evacuation.
[0042] Furthermore, the counter plate 211 includes wiper edges 217 and retaining grooves 218. The bushing element 202 also includes grippers 219, which can be moved between an open and a closed position. Second preloading elements 220 in the form of second preload springs 220 preload the grippers 219 into the closed position. This allows a snap-in connection to be provided, as shown below. Fig. 3a to 3d is illustrated.
[0043] The Fig. Figures 3a to 3d show further schematic representations of the 200 connector system. Fig. 2. More precisely, in the Fig. Figures 3a to 3d show an assembly sequence for the connector system 200. After automated alignment of the socket element 202 by a robot, the socket element 202 is lowered from above towards the plug element 201 on the mating plate 211 ( Fig. 3a) Through contact with the scraping edges 217, the grippers 219 suspended on the joints 221 open in the second step ( Fig. 3b). By contact of the pressure plate 214 with the ring seals 208, 209 in the counter plate 211, the entire system is compressed against the restoring force of the first preload springs 216, as shown in Fig. 3c is indicated by the vertical arrows on the first preload springs 216. As a result, the grippers 219 can be positioned below the retaining grooves 218 ( Fig. 3c). The coolant connection is established with almost no force, i.e., the plug 203 is inserted into the socket 204 with almost no force, since the socket 204 is mechanically decoupled by the first preload springs 216. As soon as the grippers 219 are below the retaining grooves 218, they snap shut due to the preload force of the second preload springs 220. Finally, by relaxation of the robot, i.e., "releasing" the robot, the grippers 219 lock into the retaining grooves 218, as the first preload springs 216 partially relax ( Fig. 3d). The force required for the compression of the ring seals 208, 209 is ensured by the spring force of the first preload springs 216, as shown in Fig. 3d indicated by the vertical arrows on the first preload springs 216, whereby the ring seals 208, 209 seal.
[0044] Even with the in Fig. 2 and Fig.In the connector system 200 shown in Figures 3a to 3d, double protection of the UHV environment can be achieved by using two evacuable cavities, namely the coolant connection chamber 206 and the intermediate chamber 207, in conjunction with two sealing elements, namely the ring seals 208 and 209. The disconnection of the connector system 200 can be carried out in reverse order, whereby the robot must additionally press against the second preload springs 220 to push the grippers 219 laterally away. Before disconnection, it is also advantageous here to pump out the entire cooling system, i.e., the coolant line 223 connected to the plug element 201, the coolant line 224 connected to the socket element 202, as well as the plug 203 and the sockets 204, purge it with an inert gas, and then pump it back to a vacuum.
[0045] Terms used in the claims, such as "comprise," "have," "include," "contain," and the like, do not exclude further elements or steps. The phrase "at least partially" covers both "partially" and "completely." The phrase "and / or" should be understood to mean that both the alternative and the combination are disclosed; thus, "A and / or B" means "(A) or (B) or (A and B)." A plurality of units, persons, or the like, in the context of this specification, means several units, persons, or the like. The use of the indefinite article does not preclude a plurality. A single device can perform the functions of several units or devices mentioned in the claims. Reference numerals specified in the claims are not to be considered as limitations on the means and steps employed. QUOTES INCLUDED IN THE DESCRIPTION
[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature
[0000] WO 2012 / 130768 A2
[0002] DE 10 2015 204 874 A1
[0002]
Claims
[1] Connector system (100, 200) for connecting a coolant, wherein the connector system (100, 200) comprises a first component (101, 201) and a second component (102, 202), wherein the first component (101, 201) comprises a plug (103, 203) for connecting the coolant and the second component (102, 202) comprises a socket (104, 204) for connecting the coolant, wherein the connector system (100, 200) comprises a connection area (105, 205) in which the plug (103, 203) and the socket (104, 204) can be detachably connected to each other, wherein the connector system (100, 200) in a state in which the plug (103, 203) and the socket (104, 204) are connected to each other, further comprises: - a first evacuable cavity (106, 206) which is arranged around the connection area (105, 205), - a second evacuable cavity (107, 207) arranged around the first evacuable cavity (106, 206), - a first sealing element (108, 208) which seals the first evacuable cavity (106, 206) and the second evacuable cavity (107, 207) against each other. - a second sealing element (109, 209) which seals the second evacuable cavity (107, 207) against a high vacuum environment (110, 210). [2] Connector system according to claim 1, wherein the first component is formed by a container (101) which is configured to accommodate and cool at least one optical element (111) for microlithography, wherein the second component is formed by a vacuum-side part (102) of a vacuum chamber, and wherein the vacuum-side part (102) of the vacuum chamber and the container (101) are configured to be detachably connected to each other. [3] Connector system according to claim 2, wherein the vacuum-side part (102) of the vacuum chamber and the container (101) are designed such that when the vacuum-side part (102) and the container (101) are connected to each other, the plug (103) and the socket (104) are also connected to each other. [4] Connector system according to claim 2 or 3, wherein the container (101) simultaneously forms a first component of a further connector system according to claim 1, and wherein the vacuum-side part (102) of the vacuum chamber simultaneously forms a second component of the further connector system. [5] Connector system according to claim 1, wherein the first component is formed by a plug element (201) and the second component is formed by a socket element (202), wherein the plug element (201) and the socket element (202) are configured to be detachably connected to each other, and wherein the plug element (201) and the socket element (202) are configured such that when the plug element (201) and the socket element (202) are connected to each other, the plug (203) and the socket (204) for connecting the coolant are also connected to each other at the same time. [6] Connector system according to claim 5, wherein the connector element (201) comprises a first plate element (211). [7] Connector system according to claim 5 or 6, wherein the connector element (201) comprises at least one of the following: - the first sealing element (208), - the second sealing element (209), - a first vacuum connection (212) for evacuating the first evacuable cavity (206), - a second vacuum port (213) for evacuating the second evacuable cavity (207). [8] Connector system according to any one of claims 5 to 7, wherein the socket element (202) comprises at least one of the following: - a second plate element (214), - a third plate element (215), - at least one first prestressing element (216) which is arranged between the second plate element (214) and the third plate element (215). [9] Connector system according to claim 6, wherein the first plate element (211) has a wiper edge (217) and a retaining groove (218), wherein the socket element (202) has a gripping element (219) which is movable between an open position and a closed position, and wherein the socket element (202) has at least one second preloading element (220) which preloads the gripping element (219) into the closed position. [10] Use of a connector system (100, 200) according to one of claims 1 to 9 for cooling at least one optical element (111) for microlithography. [11] Device or system for heat treatment of at least one optical element (111) for microlithography, wherein the device or system comprises a connector system (100, 200) according to any one of claims 1 to 9.