Composite substrate, optical element, semiconductor technology system and method for producing a composite substrate

Abstract

The invention relates to a composite substrate (25) for an optical element, in particular for an EUV mirror (Mi), comprising: a first component (26) made of a first material and a second component (27) made of a second material different from the first, wherein a first surface (26a) of the first component (26) and a second surface (27a) of the second component (27) are joined to each other at at least one joining area (29), and wherein at least one of the components (26, 27) has at least one first recess (31) which has at least one at least partially non-linear, in particular at least partially curved, section. The first recess, which is preferably designed as a hollow structure for flow with a temperature control fluid, is formed completely in the first component (26) or completely in the second component (27).The composite substrate (25) has at least one cavity (30) formed between the first component (26) and the second component (27) outside the at least one joining area (29). The invention also relates to an optical element, in particular an EUV mirror (Mi), with such a composite substrate (25), and to a semiconductor technology system with such an optical element. The invention also relates to a method for producing a composite substrate (25).

Images