MEASURING SYSTEM WITH CHROMATIC DISTANCE SENSOR AND COLLISION PROTECTION

Abstract

A metrology system is provided that includes an optical pen with a chromatic distance sensor, a measuring machine, and a motion configuration for the optical pen. The optical pen focuses different wavelengths at varying distances near a workpiece to be measured. The measuring machine establishes a relative position between the optical pen and the workpiece (e.g., to use the optical pen for measuring the workpiece). The motion configuration for the optical pen includes an upper section attached to the optical pen that is configured to move in a positive axial direction (e.g., relative to a holding section attached to the measuring machine), allowing the optical pen to be moved from a rest position (thus minimizing potential damage, for example) when contact is made (e.g., by a contact).(corresponding to a collision) of the optical pen with the workpiece or another object, a corresponding force is exerted in the positive axial direction.

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