Conveyor device and slide position detection device

Abstract

Conveying device (100) comprising: a slide (30); a conveying unit (1, 2) which moves the slide (30) along a predetermined direction; a magnetic scale (34) which is provided in the slide (30) to extend along the predetermined direction and detects a position of the slide (30);and a magnetic sensor (12) provided in the conveying unit (1, 2) which detects magnetism of the magnetic scale (34), wherein the magnetic scale (34) has a plurality of tracks (34a, 34b, 34c, 34d, 34e, 34f) arranged parallel along a direction perpendicular to the predetermined direction, and magnetization start positions (P2) and magnetization end positions (P3) of some tracks (34a) of the plurality of tracks (34a, 34b, 34c, 34d, 34e, 34f) are arranged such that they are displaced from magnetization start positions (P1) and magnetization end positions (P4) of the other tracks (34b, 34c, 34d, 34e, 34f) to a side opposite an end section of the track.

Description

Technical field

[0001] The present invention relates to a conveying device and a slide position detection device, and in particular to a conveying device with a slide and a position detection device of a conveyed slide. Technical background

[0002] A position detection device for a transported slide is known from the prior art. This position detection is disclosed, for example, in JP-A-2019-160991.

[0003] JP-A-2019-160991 discloses a position detection device (slider position detection device) that includes a magnetic scale extending along a predetermined direction in a slide moving along a predetermined direction, and detects the slide's position, and a magnetic sensor located in a conveying unit that moves the slide along a predetermined direction, and detects the magnetism of the magnetic scale. In the position detection device disclosed in JP-A-2019-160991, the magnetic scale has a plurality (six) of parallel tracks, and each of the plurality of tracks is magnetized by a magnetizing device with magnetic information along a predetermined direction. List of references Patent literature

[0004] [PTL 1] JP-A-2019-160991 Brief description of the invention: Technical problem

[0005] Although not described in JP-A-2019-160991, the magnetic information near both end sections of the magnetic scale track is unstable (a magnetic disturbance is present and unstable), and thus it is known that the information accuracy of the magnetic information near both end sections of the magnetic scale is not high. Therefore, in conventional position detection devices such as the one disclosed in JP-A-2019-160991, the position of the slide cannot be accurately detected in some cases due to the use of magnetic information with low accuracy near both end sections of the magnetic scale. Therefore, there is a need for a conveying device and a slide position detection device capable of accurately detecting the slide's position.

[0006] The present invention was developed to solve the problems mentioned above, and one object of the present invention is to provide a conveying device and a slide position detection device which can accurately detect the position of the slide. Solution to the problem

[0007] To achieve the above-mentioned objective, according to a first aspect of the present invention, a conveying device is provided comprising: a slide; a conveying unit that moves the slide along a predetermined direction; a magnetic scale provided in the slide to extend along the predetermined direction and detect a position of the slide; and a magnetic sensor provided in the conveying unit that detects magnetism of the magnetic scale, wherein the magnetic scale has a plurality of tracks arranged parallel along a direction perpendicular to the predetermined direction, and the magnetization start positions and magnetization end positions of some tracks of the plurality of tracks are arranged such that they are displaced from the magnetization start positions and magnetization end positions of the other tracks to a side opposite an end section of the track.

[0008] In the conveying device according to the first aspect of the present invention, as described above, the magnetization start positions and magnetization end positions of some of the plurality of tracks are arranged such that they are shifted from the magnetization start positions and magnetization end positions of the other tracks to the side opposite the end section of the track. Consequently, if the magnetic sensor does not detect the magnetism of all of the plurality of tracks of the magnetic scale, it can be determined that the magnetic scale is located near the end section. Accordingly, it is possible to detect magnetic information, the accuracy of which is not high (magnetically disturbed and unstable), near the end section of the magnetic scale and to prevent the use of the magnetic information for position detection of the slide.Furthermore, if the magnetic sensor detects the magnetism of all the multiple tracks on the magnetic scale, the magnetic information of the other tracks, with the exception of a few, is magnetically stable. Accordingly, it is possible to determine, using the magnetic information of the other tracks, whether the magnetic information of the few tracks is magnetically stable or not. This makes it possible to precisely determine the time to start detecting the slider's position. Consequently, the slider's position can be detected with high accuracy.

[0009] In the conveying device according to the first aspect, each of the plurality of tracks preferably has a magnetically stable region in which magnetic information is magnetically stable, and a magnetically unstable region located outside both ends of the magnetically stable region in which the magnetic information is magnetically unstable. The magnetization start positions and magnetization end positions of some of the tracks are arranged such that they are shifted from the magnetically unstable regions of the other tracks to the side opposite the end section of the track. With this configuration, when the magnetism of all of the plurality of tracks, including the some tracks arranged such that they are shifted to the side opposite the end section of the track, is detected, the other tracks constitute the magnetically stable region.Therefore, magnetic information from other tracks can be detected with high accuracy based on the detection of all of the numerous tracks. Consequently, it is possible to accurately determine, using the stable magnetic information from other tracks, whether the magnetic information of some tracks is located at the magnetically stable position or not.

[0010] In this case, each of the plurality of tracks is preferably configured such that the magnetism changes periodically, and the magnetization start and end positions of some of the plurality of tracks are arranged such that they are shifted by one period or more from the magnetization start and end positions of the other tracks toward the side opposite the end section of the track. With this configuration, the magnetic information is magnetically stable at a position shifted by one period or more from the magnetization start or end position toward the side opposite the end section of the track.Accordingly, if the magnetism of all the multitude of tracks, including the few tracks arranged in such a way that they are shifted to the side opposite the end section of the track, is detected, the other tracks can be reliably brought into the magnetically stable region.

[0011] In the conveying device according to the first aspect, a plurality of magnetic sensors are preferably arranged along the predetermined direction, and the distance from the magnetization start positions to the magnetization end positions of some of the tracks is greater than the distance between adjacent magnetic sensors. With this configuration, the magnetism of all of the plurality of tracks can be detected by any of the adjacent magnetic sensors. Accordingly, if the slide moves while the plurality of magnetic sensors are changing, the slide can be accurately detected at all positions.

[0012] In the conveying device according to the first aspect, a magnetization start position and a magnetization end position of one track of the plurality of tracks are preferably arranged such that they are shifted from the magnetization start positions and magnetization end positions of a plurality of other tracks to the side opposite the end section of the track. With this configuration, it is possible to minimize the number of tracks where the magnetization start position and magnetization end position are arranged such that they are shifted to the side opposite the end section of the track. Therefore, it is possible to increase the number of other tracks where the magnetic information is stabilized at a position near the end section of the magnetic scale.

[0013] In the conveying device according to the first aspect, the magnetic scale preferably has an identification track with identification information for distinguishing a plurality of slides and a position track for indicating the position of the slide. The identification track contains some of the tracks whose magnetization start and end positions are arranged such that they are shifted to the side opposite the end section of the track. With this configuration, when the magnetic sensor detects the magnetism of all the plurality of tracks of the magnetic scale, the magnetic information of the position track for indicating the position of the slide is magnetically stable.Accordingly, it is possible to accurately determine, using the stable magnetic information of the position track, whether the magnetic information of some tracks is located at a position where the magnetic information is magnetically stable or not.

[0014] In the conveying device according to the first aspect, the magnetic scale preferably has a first track on which predetermined magnetic information is recorded periodically and repeatedly, and a second track on which periodic information from the first track is recorded. The magnetization start and end positions of the second track are arranged such that they are shifted from the magnetization start and end positions of the first track to the side opposite the end section of the track. With this configuration, the magnetic information in the first track, which requires higher information accuracy than the second track to accurately detect the position of the slide, can be magnetically stable at a position near the end section of the magnetic scale.

[0015] In the conveying device according to the first aspect, the conveying device preferably further comprises a control unit which detects the position of the slide based on a detection result of the magnetic sensor, a plurality of the magnetic sensors are arranged along the predetermined direction and the control unit is configured, in a case in which the position of the slide is detected by detecting the magnetism of the magnetic scale with the other magnetic sensor, when a magnetism of a magnetically stable area in which magnetic information of all tracks of the plurality of tracks of the magnetic scale is magnetically stable is detected by a magnetic sensor that is adjacent to the other magnetic sensor, to start a control to detect the position of the slide based on a detection result of a magnetic sensor.With this configuration, it is possible to switch from the other magnetic sensor to a magnetic sensor, while the magnetic information of the track detected by a magnetic sensor remains magnetically stable.

[0016] In this case, the control unit is preferably configured to determine, based on the presence or absence of magnetism detected by the magnetic sensor, whether the magnetic scale track is within a magnetically stable region where the magnetic information is stable. With this configuration, it is possible to determine the presence or absence of magnetism detection even if the magnetic information is not stable, and thus it is possible to accurately determine whether the magnetic scale track is within a magnetically stable region.

[0017] In the configuration for determining whether the magnetic information of the track of the magnetic scale constitutes the magnetically stable area with stable magnetic information, based on the presence or absence of magnetism detection, the control unit is preferably configured to determine that the other tracks of the plurality of tracks are the magnetically stable area if magnetism is detected on all tracks of the plurality of tracks. With this configuration, it is possible to accurately determine that the other tracks, which are longer than some of the tracks of the plurality, are magnetically stable areas.

[0018] In the configuration for determining whether the magnetic information of a track on the magnetic scale constitutes the magnetically stable area, based on the presence or absence of magnetism detection, the control unit is preferably configured to determine, based on the magnetic information of the other tracks, whether a particular track within the multitude constitutes the magnetically stable area. With this configuration, based on the magnetic information of the other tracks that previously became the magnetically stable area, it is determined with high accuracy that the shorter tracks within the multitude constitute the magnetically stable area.

[0019] To fulfill the above-mentioned task, according to a second aspect of the present invention, a slide position detection device is provided, comprising: a magnetic scale which is provided in a slide which moves along a predetermined direction, to extend along the predetermined direction and detect a position of the slide;and a magnetic sensor provided in a conveying unit that moves the slide along the predetermined direction and detects magnetism of the magnetic scale, the magnetic scale having a plurality of tracks arranged parallel along a direction perpendicular to the predetermined direction, and magnetization start positions and magnetization end positions of some tracks of the plurality of tracks arranged such that they are displaced from the magnetization start positions and magnetization end positions of the other tracks to a side opposite an end section of the track.

[0020] In the slide position detection device according to the second aspect of the present invention, as described above, the magnetization start positions and magnetization end positions of some of the plurality of tracks are arranged such that they are shifted from the magnetization start positions and magnetization end positions of the other tracks to the side opposite the end section of the track. Consequently, if the magnetic sensor does not detect the magnetism of all of the plurality of tracks of the magnetic scale, it can be determined that the magnetic scale is located near the end section. Accordingly, it is possible to detect magnetic information, the accuracy of which is not high (unstable), near the end section of the magnetic scale and to prevent the use of the magnetic information for slide position detection.Furthermore, if the magnetic sensor detects the magnetism of all the multiple tracks on the magnetic scale, the magnetic information of the other tracks, with the exception of a few, is magnetically stable. Accordingly, it is possible to determine, using the magnetic information of the other tracks, whether the magnetic information of the few tracks is magnetically stable or not. This makes it possible to precisely determine the time to start detecting the slider's position. Consequently, it is possible to provide a slider position detection device capable of accurately detecting the slider's position. Advantageous effects of the invention

[0021] According to the present invention, the position of the slider can be detected with high accuracy as described above. List of characters Fig. Figure 1 is a top view to illustrate a conveying device according to an embodiment of the present invention. Fig. Figure 2 is a cross-sectional view to illustrate a conveying unit and a slide of the conveying device according to an embodiment of the present invention. Fig. Figure 3 is a view illustrating a magnetic scale of the conveying device according to an embodiment of the present invention. Fig. Figure 4 is a view illustrating the near area of ​​an end section of the magnetic scale of the conveying device according to an embodiment of the present invention. Fig. Figure 5 is a view illustrating a relationship between the magnetic scale and a plurality of magnetic sensors of the conveying device according to an embodiment of the present invention. Fig. Figure 6 is a view illustrating an example of a magnetic pattern of the magnetic scale of the conveying device according to an embodiment of the present invention. Fig. Figure 7 is a flowchart to illustrate a position detection start processing by a control unit of the conveyor device according to an embodiment of the present invention. Description of embodiments

[0022] Embodiments of the present invention are described below with reference to the drawings.

[0023] A configuration of a conveying device 100 according to an embodiment of the present invention is described with reference to Fig. 1 to Fig. 7 described. (Configuration of the conveyor device)

[0024] The conveying device 100 according to the present embodiment is configured to transport a conveying target placed on slides 30 along conveying units 1 and 2. Furthermore, the conveying target transported by the conveying device 100 undergoes operations at a plurality of conveying positions. The conveying target is operated by a robot or an operator.

[0025] The conveying device 100 features, as shown in Fig. Figure 1 illustrates the conveying unit 1, the conveying unit 2, a transfer conveying unit 3, a transfer conveying unit 4, and the slide gates 30. The conveying device 100 also includes a control unit 40.

[0026] Conveyor unit 1 has a plurality of conveying modules 10. Conveyor unit 2 has a plurality of conveying modules 10. The plurality of conveying modules 10 are connected in series to form a conveying path for the slide 30. The slide 30 is conveyed in an X-direction by conveying units 1 and 2 and transported in a Y-direction from conveying unit 1(2) to conveying unit 2(1) by transfer conveying units 3 and 4. In other words, the slide 30 is conveyed in the sequence conveying unit 1, transfer conveying unit 3, conveying unit 2, and transfer conveying unit 4 and is put into circulation for use.

[0027] The funding module 10 shows, as in Fig. Figure 2 illustrates a linear motor stator 11, a magnetic sensor 12, guide rails 13 and a cover 14.

[0028] As in Fig. Figure 1 illustrates that the transfer conveying units 3 and 4 have a conveying mechanism 20 that transports the slide 30 in the X direction and a motion mechanism that moves the conveying mechanism 20 in the Y direction. The conveying mechanism 20 has a linear motor stator 11 and a magnetic sensor 12. The motion mechanism has a guide rail and a ball screw mechanism.

[0029] The slider 30 indicates as in Fig. Figure 2 illustrates a slide main body 31, a linear motor motion device 32, a guide block 33, and a magnetic scale 34. A plurality of slides 30 are provided. Furthermore, the plurality of slides 30 are configured to move independently on the conveying units 1 and 2 and the transfer conveying units 3 and 4.

[0030] Conveyor units 1 and 2 are configured to move the slide 30 along a predetermined direction (X-direction). Furthermore, conveyor units 1 and 2 are essentially parallel. Conveyor unit 1 moves the slide 30 in an X2 direction, and conveyor unit 2 moves the slide 30 in an X1 direction. Conveyor units 1 and 2 are mounted on a fixed base. That is, the linear motor stators 11 and the guide rails 13 of conveyor units 1 and 2 are fixed in place.

[0031] Transfer conveying unit 3 is positioned adjacent to conveying units 1 and 2 in the X2 direction. Transfer conveying unit 4 is also positioned adjacent to conveying units 1 and 2 in the X1 direction.

[0032] The linear motor stator 11 has an electromagnet and moves the slide 30 by supplying drive energy (current) to the electromagnet. The linear motor stator 11 is arranged along a conveying direction (X-direction). Furthermore, as in Fig. Figure 2 illustrates the electromagnet of the linear motor stator 11 arranged such that a core extends along the Y direction.

[0033] Magnetic sensors 12 are provided in conveyor units 1 and 2. Furthermore, magnetic sensor 12 is configured to detect the magnetism of the magnetic scale 34. Specifically, magnetic sensor 12 is positioned facing the magnetic scale 34, which is located in the slide 30, in the Y-direction. Magnetic sensor 12 is configured to detect the magnetism of the magnetic scale 34 in order to determine the position of the slide 30. The position of the slide 30, as detected by magnetic sensor 12, is used for feedback control of the slide 30's movement.

[0034] Furthermore, as in Fig. Figure 5 illustrates a multitude of magnetic sensors 12 arranged at intervals along the conveying direction (X-direction). The magnetic sensor 12 is also configured to transmit a signal corresponding to the detected magnetism to the control unit 40.

[0035] The guide rail 13 is arranged to extend along the conveying direction (X-direction) of the slide 30. A pair of guide rails 13 are provided parallel along the Y-direction. The guide rails 13 are arranged to allow the slide 30 to move between the conveying modules 10 adjacent in the X-direction. The guide block 33 of the slide 30 is operatively connected to the guide rail 13 to allow movement in the X-direction.

[0036] The cover 14 is provided to cover the linear motor stator 11, the magnetic sensor 12, and the guide rail 13 from above. That is, the cover 14 is provided in such a way that the upper sections of the linear motor stator 11, the magnetic sensor 12, and the guide rail 13 are not exposed, even when the slide 30 is not present.

[0037] The slide body 31 is configured so that the conveying target is placed on it. Furthermore, the slide body 31 is designed to surround the covers 14 of the conveying units 1 and 2 when viewed from the conveying direction (X-direction). The linear motor motion device 32, the guide block 33, and the magnetic scale 34 are attached to the slide body 31.

[0038] The linear motor motion device 32 is designed to sandwich-like surround the linear motor stator 11 in the Y-direction. The linear motor motion device 32 has a plurality of permanent magnets arranged along the conveying direction (X-direction).

[0039] The guide block 33 is provided to be movable along the guide rail 13. The guide block 33 has a multitude of balls that move and rotate along the direction of movement.

[0040] The magnetic scale 34 is provided in the slide 30 to extend along a predetermined direction (X-direction). Furthermore, the magnetic scale 34 is provided to detect the position (conveying position) of the slide 30. Additionally, the magnetic scale 34 is magnetized in a predetermined pattern along the conveying direction (X-direction). Furthermore, as shown in Fig. Figure 5 illustrates a position detection device 200, the magnetic scale 34, and the magnetic sensor 12, which detects the magnetism of the magnetic scale 34. The position detection device 200 is an example of a "slider position detection device" as described in the claims.

[0041] The magnetic scale 34 is formed by magnetizing a scale material according to a predetermined pattern. The scale material is made of a magnetic material (for example, a metal magnet, plastic magnet, rubber magnet, or the like). The scale material as a whole is made of the same material and of the same quality, and the presence or absence of a magnetic field, the width of a period, and the strength of the magnetic field are controlled by magnetization. Furthermore, the magnetization of the scale material takes place while it is attached to a backplate, which is a rigid body.

[0042] In the present embodiment, as in Fig. Figure 3 illustrates the magnetic scale 34 with a plurality of tracks 34a, 34b, 34c, 34d, 34e, and 34f arranged parallel to each other along a direction (Z-direction) perpendicular to a predetermined direction (X-direction). Furthermore, the magnetization start positions P2 and magnetization end positions P3 of some tracks 34a of the plurality of tracks 34a to 34f are arranged to be shifted from the magnetization start positions P1 and magnetization end positions P4 of the other tracks 34b to 34f in a direction opposite an end section of the track. That is, the magnetization start position P2 is arranged such that it is shifted from the magnetization start position P1 in the X2-direction. Furthermore, the magnetization end position P3 is arranged such that it is shifted from the magnetization end position P4 in the X1 direction side.

[0043] Specifically, as in Fig. Figure 4 illustrates each of the plurality of tracks 34a to 34f as having a magnetically stable region 341, in which magnetic information is stable, and a magnetically unstable region 342, which is located outside both ends of the magnetically stable region 341 and in which the magnetic information is magnetically unstable. In other words, a magnetic disturbance is present near the magnetized end section (magnetically unstable region 342). Consequently, the phase difference between the plurality of tracks is not constant.

[0044] Furthermore, the multiple tracks 34a to 34f are configured such that the magnetism changes periodically. The magnetic scale 34 also features identification tracks (tracks 34a to 34c) with identification information for distinguishing the multiple sliders 30 and position tracks (34d to 34f) for indicating the positions of the sliders 30. That is, by detecting the magnetic information of tracks 34a to 34c, it is possible to specify which slider 30 is being identified from the multiple sliders 30. Furthermore, by capturing the magnetic information of tracks 34d to 34f, it is possible to specify the location of the identified slider 30 relative to the magnetic sensor 12.

[0045] As in Fig. Figure 6 illustrates that the identification track is configured such that the vernier track 34c and the segment track 34a have a magnetic period indicating a constant phase difference with a different period (division) based on track 34b, which is a master.

[0046] The magnetic scale 34 has tracks 34b and 34c, on which predetermined magnetic information is recorded periodically and repeatedly, and track 34a, on which periodic information from tracks 34b and 34c is recorded. In other words, predetermined magnetic information is recorded periodically and repeatedly on the master track 34b and the vernier track 34c. Additionally, segment track 34a records information indicating the period of tracks 34b and 34c.

[0047] Furthermore, in the present embodiment, as in Fig. 3 and Fig. Figure 4 illustrates the magnetization start positions P2 and magnetization end positions P3 of some tracks 34a of the plurality of tracks 34a to 34f arranged to be shifted from the magnetically unstable regions 342 of the other tracks 34b to 34f to the side opposite the end section of the track. Specifically, the magnetically unstable region 342 is located a distance D1 from the end section. Furthermore, the interior of the magnetically unstable region 342 becomes the magnetically stable region 341. The magnetization start position P2 and magnetization end position P3 of track 34a are arranged a distance D2 (>D1) within the magnetization start positions P1 and magnetization end positions P4 of tracks 34b to 34f.

[0048] Furthermore, for the magnetic scale 34, a position (coordinates by tracks 34d to 34f (position tracks)) is determined to identify and position the slider 30, for example, assuming that detection is delayed by a maximum of 1 / 4 period in advance. Consequently, it is possible to prevent variations regarding the time of determination for each scale.

[0049] Furthermore, the magnetization start positions P2 and the magnetization end positions P3 of some tracks 34a of the plurality of tracks 34a to 34f are arranged such that they are shifted by one period or more from the magnetization start positions P1 and the magnetization end positions P4 of the other tracks 34b to 34f to the side opposite the end section of the track. That is, the distance D2 between the magnetization start positions P1 and P2 (magnetization end positions P3 and P4) is greater than one period of the longest period of tracks 34b to 34f.

[0050] Here, regardless of the state of the material of the magnetic scale 34, during continuous magnetization, a section of one period corresponding to one wavelength (one period) is placed at the end section in an environment that differs from the other period (inner period). In other words, the inner period possesses predetermined magnetic properties after being influenced by the magnetic influence of the adjacent period. However, in one period of the end section, since there is no magnetic period on the outside, the equilibrium is different than in the inner period. Therefore, even if the same magnetization is applied with respect to the magnetization setting, the magnetic field distribution is slightly different. Therefore, by arranging the six tracks 34a to 34f and the position that serves as a trigger for position detection, at least one wavelength (one period) can be placed within the end section.When the magnetization start position P1 (magnetization end position P4) is set, the magnetic properties of the other tracks 34b to 34f are stabilized.

[0051] Furthermore, as in Fig. Figure 5 illustrates that the distance from the magnetization start positions P2 to the magnetization end positions P3 of some tracks 34a of the plurality of tracks 34a to 34f is greater than the distance between the adjacent magnetic sensors 12. Consequently, the magnetism of all tracks 34a to 34f can be detected while a magnetic sensor 12 of the adjacent magnetic sensors 12 is in a controlled state, and the control unit 40 can initiate a control action. Therefore, when the slider 30 moves while switching between the plurality of magnetic sensors 12, it is possible to accurately detect all positions of the slider 30. Furthermore, the slider 30 will not enter an uncontrolled state.This means that when the slider 30 moves across the multitude of magnetic sensors 12, when the next magnetic sensor 12 reaches the magnetically stable area 341 of track 34a, while feedback control is based on the detection result of the previous magnetic sensor 12, it is possible to take over control from the multitude of magnetic sensors 12 in the feedback control state and within the magnetically stable area 341.

[0052] Furthermore, the magnetization start position P2 and the magnetization end position P3 of one track 34a of the plurality of tracks 34a to 34f are arranged to be shifted from the magnetization start positions P1 and the magnetization end positions P4 of the other plurality of tracks 34b to 34f to the side opposite the end section of the track. That is, only one track 34a is shortened.

[0053] The control unit 40 is configured to control each unit of the conveying device 100. The control unit 40 controls the energy supplied to the linear motor stator 11 to control the movement of the slide 30. The control unit 40 also controls the movement of the conveying mechanism 20 by controlling the drive of the motion mechanism 21 of the transfer conveying units 3 and 4. The control unit 40 includes a central processing unit (CPU), memory, and the like.

[0054] Here, the control unit 40 is configured to detect the position of the slider 30 based on the detection result of the magnetic sensor 12. Furthermore, if the position of the slider 30 is detected by detecting the magnetism of the magnetic scale with a magnetic sensor 12, and the magnetism of the magnetically stable area 341, in which the magnetic information of all tracks of the plurality of tracks 34a to 34f of the magnetic scale 34 is stable, is detected by another magnetic sensor 12 adjacent to the first magnetic sensor 12, the control unit 40 is configured to initiate a control process to detect the position of the slider 30 based on the detection result of the other magnetic sensor 12.

[0055] Specifically, the control unit 40 is configured to determine, based on the presence or absence of the magnetism detected by the magnetic sensor 12, whether the track is the magnetically stable area 341 in which the magnetic information of tracks 34a to 34f of the magnetic scale 34 is stable or not.

[0056] Furthermore, the control unit 40 is configured to determine that the other tracks 34b to 34f of the plurality of tracks 34a to 34f are the magnetically stable area 341 when the magnetism of all tracks of the plurality of tracks 34a to 34f is detected.

[0057] Furthermore, if the other tracks 34b to 34f of the plurality of tracks 34a to 34f are the magnetically stable area 341, the control unit 40 is configured, based on the magnetic information of the other tracks 34b to 34f, to determine whether some tracks 34a of the plurality of tracks 34a to 34f are the magnetically stable area 341 or not. (Position detection start processing)

[0058] A position detection start processing, when the magnetic sensor 12 is changed by the control unit 40 of the conveyor device 100, is carried out with reference to Fig. 7 described. Furthermore, in a case where the slider 30 is moved and the magnetic scale 34 is arranged over two adjacent magnetic sensors 12, this processing takes place when the magnetic sensor 12, which detects magnetism to capture the identification and position of the slider 30, is changed (switched).

[0059] In step S1 from Fig. Step 7 determines whether the magnetism of the five tracks 34b to 34f is detected by the magnetic sensor 12 of a transfer target. The determination in step S1 is repeated until the magnetism of the five tracks 34b to 34f is detected.

[0060] When the magnetism of the five tracks 34b to 34f is detected, in step S2 the control unit 40 determines whether the magnetism of all tracks 34a to 34f is detected or not. That is, in addition to the detected tracks 34b to 34f, it is determined whether the magnetism of segment track 34a of the identification track is detected or not. The determination in step S2 is repeated until the magnetism of all tracks 34a to 34f is detected.

[0061] When the magnetism of all tracks 34a to 34f is detected, in step S3 it is determined, based on the position tracks (tracks 34d to 34f), whether the position of the magnetic scale 34 (of the slider 30) moves within a predetermined range or not.

[0062] This means that, based on the magnetic information from the position tracks (tracks 34d to 34f), it is determined whether the short track 34a has also become a magnetically stable area or not. The determination in step S3 is repeated until the position of the magnetic scale 34 (of the slider 30) moves within the predetermined range.

[0063] When the position of the magnetic scale 34 (of the slider 30) is moved within a predetermined range, the magnetism of the identification tracks (tracks 34a to 34c) is detected to determine an identifier for the slider 30 in step S4. Then, in step S5, position detection of the slider 30 based on the magnetic sensor 12 is initiated after the switchover. In this case, the position detection of the slider 30 based on the magnetic sensor 12 before the switchover ends. That is, the magnetic sensor 12 used for position detection of the slider 30 is switched. After that, the position detection start processing ends. (Effect of the present embodiment)

[0064] In the present embodiment, the following effects can be achieved.

[0065] In the present embodiment, as described above, the magnetization start positions P2 and the magnetization end positions P3 of some tracks 34a of the plurality of tracks 34a to 34f are arranged to be shifted from the magnetization start positions P1 and the magnetization end positions P4 of the other tracks 34b to 34f to the side opposite the end section of the track. Consequently, if the magnetic sensor 12 does not detect the magnetism of all of the plurality of tracks 34a to 34f of the magnetic scale 34, it can be determined that the magnetic scale 34 is located near the end section. Accordingly, it is possible to detect magnetic information, the accuracy of which is not high (unstable), near the end section of the magnetic scale 34 and to prevent the use of the magnetic information for position detection of the slider 30.Furthermore, if the magnetic sensor 12 detects the magnetism of all of the multiple tracks 34a to 34f of the magnetic scale 34, the magnetic information of the other tracks 34b to 34f, with the exception of some tracks 34a, is magnetically stable. Accordingly, it is possible to determine, using the stable magnetic information of the other tracks 34b to 34f, whether the magnetic information of some tracks 34a is magnetically stable or not. This makes it possible to precisely determine the time to start detecting the position of the slider 30. Consequently, the position of the slider 30 can be detected with high accuracy.

[0066] Furthermore, in the present embodiment as described above, each of the plurality of tracks 34a to 34f has the magnetically stable region 341, in which the magnetic information is stable, and the magnetically unstable region 342, which is located outside both ends of the magnetically stable region 341 and in which the magnetic information is magnetically unstable, and the magnetization start positions P2 and the magnetization end positions P3 of some tracks 34a of the plurality of tracks 34a to 34f are arranged to be displaced from the magnetically unstable regions 342 of the other tracks 34b to 34f to the side opposite the end section of the track.Consequently, if the magnetism of all of the plurality of tracks 34a to 34f, including some tracks 34a arranged to be displaced to the side opposite the end section of the track, is detected, then the other tracks 34b to 34f constitute the magnetically stable region 341. Therefore, magnetic information from the other tracks 34b to 34f can be detected with high accuracy based on the detection of all of the plurality of tracks 34a to 34f. Consequently, it is possible to accurately determine, using the stable magnetic information of other tracks 34b to 34f, whether the magnetic information of some tracks 34a is located at the magnetically stable position or not.

[0067] Furthermore, in the present embodiment as described above, each of the plurality of tracks 34a to 34f is configured such that a magnetism changes periodically, and the magnetization start positions P2 and the magnetization end positions P3 of some tracks 34a of the plurality of tracks 34a to 34f are arranged such that they are shifted by one period or more from the magnetization start positions P1 and the magnetization end positions P4 of the other tracks 34b to 34f to the side opposite the end section of the track. Consequently, the magnetic information is magnetically stable at a position that is shifted by one period or more from the magnetization start or end to the side opposite the end section of the track.Accordingly, if the magnetism of all of the multitude of tracks 34a to 34f, including some tracks 34a which are arranged to be displaced to the side opposite the end section of the track, is detected, the other tracks 34b to 34f can be reliably brought into the magnetically stable region 341.

[0068] Furthermore, in the present embodiment as described above, a plurality of magnetic sensors 12 are arranged along the predetermined direction, and the distance from the magnetization start positions P2 to the magnetization end positions P3 of some tracks 34a of the plurality of tracks 34a to 34f is greater than the distance between adjacent magnetic sensors 12. Consequently, the magnetism of all of the plurality of tracks 34a to 34f can be detected by any magnetic sensor 12 of the adjacent magnetic sensors 12. Accordingly, if the slider 30 moves while the plurality of magnetic sensors 12 are being changed, the slider 30 can be accurately detected at all positions.

[0069] Furthermore, in the present embodiment, as described above, the magnetization start position P2 and the magnetization end position P3 of a track 34a of the plurality of tracks 34a to 34f are arranged to be shifted from the magnetization start positions P1 and magnetization end positions P4 of a plurality of other tracks 34b to 34f of the plurality of tracks 34a to 34f to the side opposite the end section of the track. Consequently, it is possible to minimize the number of tracks in which the magnetization start position and the magnetization end position are arranged to be shifted to the side opposite the end section of the track. Therefore, it is possible to increase the number of the plurality of other tracks 34b to 34f in which the magnetic information is stabilized at a position near the end section of the magnetic scale 34.

[0070] Furthermore, in the present embodiment as described above, the magnetic scale 34 has an identification track with identification information for distinguishing the plurality of sliders 30 and a position track for indicating the position of the slider. Several tracks 34a, whose magnetization start and end positions are arranged to be shifted to the side opposite the end section of the track, are included in the identification track. Accordingly, when the magnetic sensor 12 detects the magnetism of all of the plurality of tracks 34a to 34f of the magnetic scale 34, the magnetic information of the position track for indicating the position of the slider 30 is magnetically stable.Accordingly, it is possible to determine precisely, using the stable magnetic information of the position track, whether the magnetic information of some tracks 34a is located at a position where the magnetic information is magnetically stable or not.

[0071] In the present embodiment, as described above, the magnetic scale 34 has tracks 34b and 34c, on which predetermined magnetic information is recorded periodically and repeatedly, and track 34a, on which periodic information from tracks 34b and 34c is recorded. The magnetization start position P2 and the magnetization end position P3 of track 34a are arranged to be shifted from the magnetization start positions P1 and magnetization end positions P4 of tracks 34b and 34c to the side opposite the end section of the track. Consequently, in tracks 34b and 34c, which require higher information accuracy than track 34a in order to accurately detect the position of the slider 30, the magnetic information can be stable at a position near the end section of the magnetic scale 34.

[0072] Furthermore, in the present embodiment as described above, the conveying device also includes a control unit 40 which detects the position of the slide 30 based on the detection result of the magnetic sensor 12. The plurality of magnetic sensors are arranged along the predetermined direction, and the control unit 40 is configured, in a case where the position of the slide 30 is detected by a magnetic sensor 12 detecting magnetism of the magnetic scale, when the magnetism of the magnetically stable area 341, in which magnetic information of all tracks of the plurality of tracks 34a to 34f of the magnetic scale 34 is stable, is detected by the other magnetic sensor 12 adjacent to the first magnetic sensor 12, to initiate a control to detect the position of the slide 30 based on a detection result of the other magnetic sensor 12.Consequently, it is possible to switch from one magnetic sensor 12 to the other magnetic sensor 12 while the magnetic information of the tracks 34a to 34f detected by the other magnetic sensor 12 is magnetically stable.

[0073] Furthermore, in the present embodiment as described above, the control unit 40 is configured to determine, based on the presence or absence of magnetism detected by the magnetic sensor 12, whether the track of the magnetic scale is the magnetically stable region 341 in which the magnetic information of tracks 34a to 34f of the magnetic scale 34 is magnetically stable, or not. Consequently, it is possible to determine the presence or absence of magnetism detection even if the magnetic information is not stable, and thus it is possible to accurately determine whether tracks 34a to 34f of the magnetic scale 34 constitute the magnetically stable region 341 or not.

[0074] Furthermore, in the present embodiment, as described above, the control unit 40 is configured to determine that the other tracks 34b to 34f of the plurality of tracks 34a to 34f are the magnetically stable region 341 when the magnetism of all tracks of the plurality of tracks 34a to 34f is detected. Consequently, it is possible to determine precisely that the other tracks 34b to 34f, which are longer than some tracks 34a of the plurality of tracks 34a to 34f, are magnetically stable regions 341.

[0075] Furthermore, in the present embodiment as described above, the control unit 40 is configured to determine, based on the magnetic information of the other tracks 34b to 34f, whether some tracks 34a of the plurality of tracks 34a to 34f constitute the magnetically stable region 341 or not, given that the other tracks 34b to 34f constitute the magnetically stable region 341. Consequently, based on the magnetic information of the other tracks 34b to 34f that previously became the magnetically stable region 341, it is determined with high accuracy that some tracks 34a that are shorter than the other tracks 34b to 34f have become the magnetically stable region 341. (Modification example)

[0076] It should be noted that the embodiment disclosed above is in every respect exemplary and is not to be considered limiting. The scope of the present invention is illustrated by the claims and not by the descriptions of the embodiment described above, and further includes all modifications (modification examples) within the meaning and scope equivalent to the claims.

[0077] The embodiment described above illustrates, for example, the configuration in which the magnetic scale has six tracks; however, the present invention is not limited to this. In the present invention, the magnetic scale can have a different plurality of tracks than six.

[0078] Furthermore, the above-mentioned embodiment describes an example of a configuration in which the magnetization start position and the magnetization end position of one track of the plurality of tracks of the magnetic scale are arranged to be displaced from the other tracks to the side opposite the end section of the track; however, the present invention is not limited thereto. In the present invention, the magnetization start positions and the magnetization end positions of two or more tracks of the plurality of tracks of the magnetic scale can be arranged to be displaced from the other tracks to the side opposite the end section of the track.

[0079] Furthermore, the embodiment described above includes an example of a configuration in which three of the plurality of tracks on the magnetic scale are the identification tracks for distinguishing the slider, and the remaining three tracks are the position tracks for indicating the slider's position. However, the present invention is not limited to this. The present invention may provide a plurality of identification tracks other than three, and a plurality of position tracks other than three.

[0080] Furthermore, the embodiment described above includes an example of a configuration in which the conveying unit moves the slide by means of a linear motor; however, the present invention is not limited to this. In the present invention, the conveying unit can be configured to move the slide by means of a ball screw mechanism, a rotary belt mechanism, or the like.

[0081] Furthermore, the embodiment describes an example of a configuration in which the magnetic scale illustrates the structure arranged upright in a vertical direction; however, the present invention is not limited to this. In the present invention, the magnetic scale can be laid down in a horizontal direction.

[0082] Furthermore, the embodiment described above illustrates an example in which the conveying unit is configured to extend linearly; however, the present invention is not limited to this. In the present invention, the conveying unit can be curved.

[0083] Furthermore, in the embodiment described above, the control processing of the control unit is illustrated using a flowchart, in which the control processing of the control unit is carried out sequentially along the processing sequence. However, the present invention is not limited to this. In the present invention, the control processing of the control unit can be carried out by event-driven processing, which performs processing in event units. In this case, the control processing can be carried out entirely by event-driven processing or by a combination of event-driven and flowchart-driven processing. Reference symbol list 1.2 conveying unit 12 Magnetic sensor 30 sliders 34 magnetic scale 34a Lane (Identification Lane, Second Lane) 34b, 34c lane (identification lane, first lane) 34d, 34e, 34f track (position track) 40 Control unit 100 Conveyor device 200 Position detection device (slider position detection device) 341 magnetically stable area 342 magnetically unstable area QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] JP 2019160991 A [0002, 0003, 0004, 0005]

Claims

[1] Conveying device comprising: a slider; a conveying unit that moves the slide along a predetermined direction; a magnetic scale provided in the slider to extend along the predetermined direction and detect the position of the slider; and a magnetic sensor that is provided in the conveyor unit and detects magnetism of the magnetic scale, wherein the magnetic scale has a plurality of tracks arranged parallel along a direction perpendicular to the predetermined direction, and The magnetization start positions and magnetization end positions of some tracks of the multitude of tracks are arranged such that they are shifted from the magnetization start positions and magnetization end positions of the other tracks to a side opposite an end section of the track. [2] Conveying device according to claim 1, wherein each of the plurality of tracks has a magnetically stable region in which magnetic information is magnetically stable, and a magnetically unstable region located outside both ends of the magnetically stable region in which the magnetic information is magnetically unstable, and the magnetization start positions and the magnetization end positions of some of the multiple tracks are arranged such that they are shifted from the magnetically unstable areas of the other tracks to the side opposite the end section of the track. [3] Conveying device according to claim 2, wherein each of the plurality of tracks is configured such that the magnetism changes periodically, and the magnetization start positions and magnetization end positions of some of the plurality of tracks are arranged such that they are shifted by one period or more from the magnetization start positions and magnetization end positions of the other tracks to the side opposite the end section of the track. [4] Conveying device according to any one of claims 1 to 3, wherein a large number of the magnetic sensors are arranged along the predetermined direction, and a distance from the magnetization start positions to the magnetization end positions of some tracks of the multitude of tracks is greater than a distance between adjacent magnetic sensors. [5] Conveying device according to any one of claims 1 to 4, wherein a magnetization start position and a magnetization end position of a track of the plurality of tracks are arranged such that they are shifted from magnetization start positions and magnetization end positions of a plurality of other tracks of the plurality of tracks to the side opposite the end section of the track. [6] Conveying device according to any one of claims 1 to 5, wherein the magnetic scale has an identification track with identification information for distinguishing a plurality of sliders and a position track to indicate the position of the slider, and the some tracks whose magnetization start positions and magnetization end positions are arranged such that they are shifted to the side opposite the end section of the track, are included in the identification track. [7] Conveying device according to any one of claims 1 to 6, wherein the magnetic scale has a first track on which predetermined magnetic information is recorded periodically and repeatedly, and a second track on which periodic information from the first track is recorded, and a magnetization start position and a magnetization end position of the second track are arranged such that they are shifted from a magnetization start position and a magnetization end position of the first track to the side opposite the end section of the track. [8] Conveying device according to any one of claims 1 to 7, further comprising: a control unit which detects the position of the slider based on a detection result from the magnetic sensor, wherein a large number of the magnetic sensors are arranged along the predetermined direction, and The control unit is configured, in a case where the position of the slider is detected by detecting the magnetism of the magnetic scale with the other magnetic sensor, when a magnetism of a magnetically stable area, in which magnetic information of all tracks of the multitude of tracks of the magnetic scale is magnetically stable, is detected by a magnetic sensor that is adjacent to the other magnetic sensor, to start a control to detect the position of the slider based on a detection result of a magnetic sensor. [9] Conveyor device according to claim 8, wherein the control unit is configured to determine, based on the presence or absence of magnetism detected by the magnetic sensor, whether the track of the magnetic scale is the magnetically stable area in which the magnetic information of the track of the magnetic scale is magnetically stable or not. [10] Conveyor device according to claim 9, wherein the control unit is configured to determine that the other tracks of the plurality of tracks are the magnetically stable area when the magnetism of all tracks of the plurality of tracks is detected. [11] Conveyor device according to claim 9 or 10, wherein the control unit is configured to determine, based on the magnetic information of the other tracks, whether some of the tracks of the plurality of tracks are the magnetically stable area or not, if the other tracks of the plurality of tracks are the magnetically stable area. [12] Slide position detection device comprising: a magnetic scale provided in a slider moving along a predetermined direction, to extend along the predetermined direction and detect the position of the slider; and a magnetic sensor provided in a conveyor unit that moves the slider along the predetermined direction and detects magnetism of the magnetic scale, wherein the magnetic scale has a plurality of tracks arranged parallel along a direction perpendicular to the predetermined direction, and The magnetization start positions and magnetization end positions of some tracks of the multitude of tracks are arranged such that they are shifted from the magnetization start positions and magnetization end positions of the other tracks to a side opposite an end section of the track.

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