Position data correction device and method for linear motors

Abstract

A position information correction device is provided which is capable of effectively correcting position information of a linear motor detected by a position detector.The position information correction device comprises: a memory (23) configured to store pre-measured position-dependent error components and velocity-dependent error components; a position-dependent error correction unit (22a) configured to read from the memory (23) a position-dependent error component corresponding to the position information P from a position detector (12) and to correct the position information P using the position-dependent error component; and a velocity-dependent error correction unit (22b) configured to read from the memory (23) a velocity-dependent error component corresponding to the position information P from the position detector (12) and to correct the position information P using the velocity-dependent error component and the velocity information of the linear motor.