Composite substrate and method for producing a composite substrate

Abstract

A composite substrate comprises a functional substrate containing at least one InP crystal and a crystal of a material that can be formed by epitaxial growth on an InP crystal, and a support substrate made of a semiconductor material bonded to the functional substrate to support it. The functional substrate includes a first layer and a second layer, the latter positioned closer to the support substrate than the first layer and composed of an amorphous substance containing a noble gas element. Alternatively, the support substrate may include a first support layer, a second support layer positioned closer to the functional substrate than the first support layer and composed of an amorphous substance of the semiconductor material containing the noble gas element, and a bonding layer in contact with the functional substrate, also composed of an amorphous substance of the semiconductor material.

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