Processing chamber and flap valve

Abstract

A flap valve for sealing a substrate slot of a processing chamber, comprising: a valve flap having a sealing surface for sealing a substrate slot; one or more bearing elements for rotatably mounting the valve flap such that the valve flap can be moved by a pivoting motion into an open position and into a closed position relative to a substrate slot; and one or more detents for locking the valve flap in the closed position, wherein the one or more detents have one or more rotary latches, each of which has: a drive element arranged on a side of the valve flap facing away from the sealing surface, a drive shaft connected to the drive element and passing through the valve flap, and a latch connected to the drive shaft and rotatably mounted on the sealing surface side.