Workstation and device for producing contact metallizations

DE202026103080U1Undetermined Publication Date: 2026-07-23PAC TECH PACKAGING TECH
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Patent Information

Application Number
DE202026103080
Authority / Receiving Office
DE · DE
Patent Type
Utility models
Current Assignee / Owner
Filing Date
2026-05-27
Publication Date
2026-07-23
Estimated Expiration
2036-05-31
Patent Text Reader

Abstract

Workstation (10) comprising a basin (12) forming a process chamber (11) for receiving a treatment fluid for treating an object, in particular a wafer, which can be received into the process chamber, characterized in that the basin is formed at least in a region of an inner side (13) of the basin which limits the process chamber, preferably completely, from, preferably high-purity, quartz glass.
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Citation Information

Patent Citations

  • Equipment used for producing UBM on terminal surface of wafer

    CN203760439U

  • Deposition station and device for producing contact metallizations

    DE102023123691A1

  • Rinsing station and device for generating contact metallizations

    DE202024101781U1

  • CN000203760439U