Selective stepped coating for micro-manufactured structures

DE602016090793T2Active Publication Date: 2025-01-01SI WARE SYSTEMS INC(US)
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Patent Information

Application Number
DE602016090793
Authority / Receiving Office
DE · DE
Patent Type
Patents
Current Assignee / Owner
Priority Date
2016-02-18
Filing Date
2016-02-19
Publication Date
2025-01-01
Estimated Expiration
2036-02-19
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