RESIDUE REMOVAL FROM HIGH ASPECT RATIO STRUCTURES

DE602017088783T2Active Publication Date: 2025-04-09BRUKER NANO INC
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Patent Information

Application Number
DE602017088783
Authority / Receiving Office
DE · DE
Patent Type
Patents
Current Assignee / Owner
Priority Date
2016-05-20
Filing Date
2017-05-22
Publication Date
2025-04-09
Estimated Expiration
2037-05-22
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