REFLECTOR AND METHOD FOR MANUFACTURING A REFLECTOR

DE602019068389T2Active Publication Date: 2025-04-09ASML NETHERLANDS BV
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Patent Information

Application Number
DE602019068389
Authority / Receiving Office
DE · DE
Patent Type
Patents
Current Assignee / Owner
Priority Date
2018-06-15
Filing Date
2019-05-23
Publication Date
2025-04-09
Estimated Expiration
2039-05-23
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