ULTRASOUND MICROSCOPE
Patent Information
- Application Number
- DE602019076869
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2018-05-25
- Filing Date
- 2019-05-17
- Publication Date
- 2025-10-15
- Estimated Expiration
- 2039-05-17
AI Technical Summary
Existing ultrasonic microscopes face challenges in inspecting objects with uneven surfaces quickly and accurately, particularly in semiconductor structures, due to difficulties in maintaining focal point alignment and adjusting for surface geometry.
An ultrasonic microscope with a movable scan head, transducers, and actuators that adjust the focal point based on detection signals to maintain a predefined working distance and align transducers, using immersion liquid for improved focus and alignment, and weight compensation for rapid movement.
Enables high-speed, accurate inspection of objects with uneven surfaces by maintaining focal point alignment and minimizing fluid resistance, allowing for quick and precise detection of defects in semiconductor structures.