SEMICONDUCTOR COMPONENT AND LAYOUT FOR GATE ELECTRODES

DE602021033663T2Active Publication Date: 2025-07-09KK TOSHIBA +1
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Patent Information

Application Number
DE602021033663
Authority / Receiving Office
DE · DE
Patent Type
Patents
Current Assignee / Owner
Priority Date
2020-12-15
Filing Date
2021-08-19
Publication Date
2025-07-09
Estimated Expiration
2041-08-19

AI Technical Summary

Technical Problem

The scaling-down of silicon carbide MOSFETs is hindered by increased leakage current and short-circuit risks at the connection points between gate electrodes and gate wiring lines due to thinning interlayer insulating layers, leading to instability and reduced reliability.

Method used

The MOSFET design incorporates specific distance relationships between gate electrodes and gate wiring lines, ensuring that S1 < S3, S1 < S2, and S3 > S4, along with a built-in Schottky barrier diode, to maintain adequate interlayer insulating layer thickness and reduce heat concentration, thereby preventing short circuits and enhancing reliability.

Benefits of technology

This design allows for scalable MOSFETs with improved reliability and stable operation by minimizing short circuits and uniform heat distribution, ensuring stable characteristics and increased on-current.

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