Auxiliary vacuum pump combination system

DE602024001640T2Active Publication Date: 2025-12-10SAES GETTERS SPA
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Patent Information

Application Number
DE602024001640
Authority / Receiving Office
DE · DE
Patent Type
Patents
Current Assignee / Owner
Priority Date
2023-02-09
Filing Date
2024-02-02
Publication Date
2025-12-10
Estimated Expiration
2044-02-02
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