Reducing particle contamination of a laser entrance window in a pulsed laser deposition tool

Abstract

One example provides a pulsed laser deposition (PLD) tool. The PLD tool comprises a processing chamber comprising a laser entrance window. The PLD tool further comprises a target holder located within the processing chamber. The PLD tool further comprises a substrate holder located within the processing chamber. The PLD tool further comprises a laser configured to direct laser light through the laser entrance window and towards the target holder. The PLD tool further comprises a purge gas inlet located between the laser entrance window and the target holder, the purge gas inlet configured to direct a flow of purge gas into a path of the laser light.

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