Flexural resonator
FI20255280A1Undetermined Publication Date: 2026-09-29KYOCERA TECH OY
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Patent Information
- Application Number
- FI2025005280
- Authority / Receiving Office
- FI · FI
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2025-03-28
- Publication Date
- 2026-09-29
Abstract
Herein is provided a resonator comprising a resonating element (100) configured to operate in a resonance mode, wherein the resonating element comprises a silicon layer (101) and a piezoelectric layer (102), and wherein the piezoelectric layer (102) covers a surface area of the resonating element (100) partially.
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