Spurious mode suppression
FI20255308A1Undetermined Publication Date: 2026-10-03KYOCERA TECH OY
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Patent Information
- Application Number
- FI2025005308
- Authority / Receiving Office
- FI · FI
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2025-04-02
- Publication Date
- 2026-10-03
Abstract
A semiconductor apparatus (200) and a resonator (100), comprising a resonating element (101) that is divided into resonating beams (111) which are physically separated from each other by intervening trenches (121), and spurious resonance mode suppression notches (140) in at least one or some of the resonating beams (111), wherein the notches (140) extend throughout a materials stack of corresponding resonating beams (111).
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