Method and station for measuring airborne molecular contamination

By alternating fluidic communication and isolation between gas analyzers with different pressure tolerance ranges, the method addresses pressure drop issues and cost challenges in measuring airborne molecular contamination, ensuring accurate and cost-effective monitoring in cleanrooms.

FR3139906B1Active Publication Date: 2026-05-22PFEIFFER VACUUM SAS
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Patent Information

Authority / Receiving Office
FR · FR
Patent Type
Patents
Current Assignee / Owner
PFEIFFER VACUUM SAS
Filing Date
2022-09-20
Publication Date
2026-05-22

AI Technical Summary

Technical Problem

Existing methods for measuring airborne molecular contamination in cleanrooms face challenges such as pressure drops in long sampling lines, leading to unreliable measurements by gas analyzers sensitive to pressure variations, and increased costs due to the need for high-purity materials and extended conditioning times.

Method used

A method and station that utilize a first and second gas analyzer with different pressure tolerance ranges, alternating fluidic communication and isolation with sampling lines to maintain optimal pressure conditions for each analyzer, allowing sequential measurements to avoid pressure drops and improve measurement accuracy.

Benefits of technology

This approach ensures reliable and accurate measurements across long sampling lines by maintaining each gas analyzer within its optimal pressure range, reducing costs by minimizing the need for high-purity materials and shortening conditioning times.

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Abstract

Method and Station for Measuring Airborne Molecular Contamination. The invention relates to a method for measuring airborne molecular contamination using a measuring station (1) comprising at least one first and one second gas analyzer (3, 5, 7, 9), at least one sampling line (Li), and at least one valve (15, 17), comprising the following steps: - measurement of molecular contamination concentrations in the sampling line by the first gas analyzer (3, 7) for a first predefined duration, - fluidic isolation between the first gas analyzer (3, 7) and the sampling line (Li), via at least one valve (15, 17), and - for a second predefined duration, measurement of molecular contamination concentrations in the sampling line (Li) by the second gas analyzer (5, 9). The invention also relates to a corresponding measuring station (1). Figure for the abstract: Fig. 1
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