MEMS vibration sensing device

Abstract

MEMS device for detecting vibration of sensitive axis (S) comprising a matrix (1) of active cells (10) distributed in an active plane containing the sensitive axis (S), and formed of the same even number i of positive (10P) and negative (10N) active cells. Each cell (10P, 10N) is formed of at least one mobile comb (3) and at least one fixed comb (2). The fingers (21) of the fixed comb (2) and the fingers (31) of the mobile comb (3) extend perpendicular to the sensitive axis (S) and are interdigitated. The moving combs (3) of the positive and negative cells (10P, 10N) move simultaneously in the same direction parallel to the sensitive axis (S) in response to a displacement applied to the MEMS device, inducing a first capacitive value between adjacent fixed and moving electrodes in each positive cell (10P), and a second capacitive value between adjacent fixed and moving electrodes in each negative cell (10N). Figure for abstract: Fig 1

Description

Title of the invention: MEMS vibration detection device Technical field

[0001] The invention relates to the field of MEMS (microelectromechanical systems). The invention relates more particularly to a microelectromechanical device with interdigitated combs made in a substrate, for the detection of vibrations in the plane parallel to the substrate, by differential capacitive measurement. Prior art

[0002] Vibration detection can be achieved by means of systems implementing piezoelectric components, such as a piezoelectric accelerometer. Indeed, this type of piezoelectric system has the overall advantage of being usable over a very wide frequency range with a large dynamic range. This type of system is well suited for detecting accelerations of up to 500 g (1 g = 9.81 m.s2) over a frequency range of 20 kHz, and is therefore suitable for detecting vibrations. Such a piezoelectric system is for example described in document WO9212543. However, this type of sensor is, by its principle, sensitive to mechanical stresses and its characteristics therefore tend to degrade over time, requiring regular recalibrations.

[0003] Vibration detection can also be obtained by means of capacitive systems based on MEMS technology implementing the measurement of the capacitive variation between fingers of a fixed comb and the fingers of a mobile comb coupled to a mobile mass, called a test mass. In practice, the mobile mass is in the form of a plate coupled to springs and is dimensioned to be sensitive to the movement of the body to which the system is attached. The mobile mass generally extends in the sensitive detection axis, and the fingers of the mobile comb extend laterally from the mobile mass and are interdigitated with those of the fixed comb. The fingers of the fixed and mobile combs thus form electrodes.

[0004] These silicon-based MEMS devices have many advantages for industrial applications. Indeed, compared to piezoelectric sensors which are more massive, MEMS sensors can be manufactured collectively on a silicon wafer in large volume at reduced cost and have a reduced footprint compared to piezoelectric devices. However, due to their architecture, such MEMS systems are generally only suitable for frequency ranges up to a few kHz, for example 2 kHz, which is not sufficient to cover the vibration amplitude range required to monitor the state of an in- industrial for example.

[0005] Furthermore, in order to reject variations linked to the environment (thermal, mechanical stress) the differential mode configuration is generally preferred, that is to say that the system integrates two fixed combs whose fingers are interdigitated with those of the mobile comb so that, during a movement of the mobile mass, the electrodes of the mobile comb move closer to the electrodes of one of the fixed combs, while moving away from the electrodes of the other fixed comb. In other words, the capacitance increases between the electrodes of the mobile comb and a first fixed comb, and the capacitance decreases between the mobile comb and a second fixed comb. This difference in capacitance variation is measured and converted into an electrical signal representative of the acceleration to which the system is exposed. Such a MEMS system is for example presented in document EP0605303.

[0006] However, during the manufacture of these MEMS devices in a silicon wafer, the silicon wafer will generally undergo deformations, in particular due to the constraints linked to the deposited materials and the etchings. This non-homogeneous flatness of the wafer generates dimensional variations between the fingers and induces a difference (offset) in the capacitances measured at rest, depending on the positioning of the fixed and mobile electrodes on the silicon wafer. Thus, the greater this dimensional variation, the greater the associated capacitive offset.

[0007] To overcome this problem, a first approach consists of locally alternating the positive and negative electrodes, and in particular of positioning each finger of the movable comb between a finger of a fixed comb (positive electrode) and a finger of another fixed comb (negative electrode). Such a configuration is for example described in patent US6386032. Unfortunately, this approach complicates the manufacturing process since it requires an additional contact recovery to ensure the electrical connection of the different fingers, which tends to increase the manufacturing cost. Statement of the invention

[0008] In this context, the present invention aims to propose an alternative architecture for a MEMS microelectromechanical device with interdigitated combs for the detection of vibrations in the plane of the substrate in which the device is produced.

[0009] The invention aims in particular to propose an architecture tending to reduce the dimensions of the MEMS device while maintaining an effective capacitive variation.

[0010] The invention also aims to propose an architecture which makes it possible to compensate for and therefore limit the impact of the imperfections or deformations induced during manufacturing explained above, and to propose a MEMS device which is advantageously suited to high-frequency detection.

[0011] The invention thus relates to a micro-electromechanical device (MEMS) for detecting vibration along a sensitive axis S, by differential capacitive measurement. The MEMS device comprises a matrix of active cells distributed in an active plane parallel to the sensitive axis S. This matrix is formed of a number i of so-called positive active cells and a number i of so-called negative active cells, i being an even number. Each of the positive and negative active cells is formed of at least one mobile comb and at least one fixed comb. The fingers of the fixed comb and the fingers of the mobile comb respectively form fixed and mobile electrodes, extend in the active plane perpendicular to the sensitive axis S, and are interdigitated.The moving combs of all the positive and negative active cells move simultaneously in the same direction substantially parallel to the sensitive axis S in response to a displacement, in particular of the acceleration or vibration type, applied to the MEMS device, inducing a first capacitive value Cl between adjacent fixed and moving electrodes in each positive active cell, and a second capacitive value C2 between adjacent fixed and moving electrodes in each negative active cell, the difference between these capacitive values Cl and C2 being representative of the displacement applied to the MEMS device.

[0012] In other words, unlike the MEMS accelerometers with differential capacitive detection of the prior art in which the same mobile finger is coupled to two adjacent fingers of two separate fixed combs, the present invention proposes to couple each fixed comb with a separate mobile comb so as to form active capacitive cells, and to distribute these active cells in a matrix on the wafer. In particular, the fixed and mobile combs of the capacitive cells are interdigitated so that, during a movement of the mobile combs along the sensitive axis: - in some of the capacitive cells, the movable electrodes move away from the fixed electrodes in the direction of movement; and - in some other capacitive cells, the moving electrodes move closer to the fixed electrodes in the direction of movement, in the same proportions.

[0013] It is therefore possible to distinguish in this matrix of capacitive cells, so-called positive cells (for which the fingers are used as positive electrodes during the capacitance measurement) and so-called negative cells (for which the fingers are used as negative electrodes for the capacitance measurement), depending on whether the mobile fingers move away from or towards the fixed fingers for a movement of the mobile combs in a given direction. Thus, on the same principle as for the MEMS accelerometers with differential capacitance of the prior art, the difference in capacitances between the different positive and negative cells is representative of the movement undergone by the body to which the MEMS device is attached.

[0014] The topology consisting of distributing positive and negative active cells in matrix or network makes it possible to avoid the contact resumptions made necessary in the solutions of the prior art. In addition, this matrix distribution also makes it possible to minimize the impact of dimensional variations between positive and negative electrodes, due to the manufacturing process.

[0015] Furthermore, it will be noted that the MEMS detection device of the invention does not require a dedicated test mass, the own masses of the moving combs playing the role of sensitive mass. This configuration makes it possible to increase the active surface for detection.

[0016] Thus, unlike conventional MEMS accelerometers of the prior art whose architecture is essentially adapted for measurement in a typical bandwidth of 2 kHz, the MEMS device of the invention makes it possible to produce vibration sensors capable of detecting vibrations in a much higher bandwidth, for example greater than or equal to 10 kHz.

[0017] Advantageously, each positive and negative active cell comprises a fixed central beam extending in the direction of the sensitive axis S, and positioned in a frame which is movable relative to the central beam, the fingers of the fixed comb extending laterally on either side of this central beam, and the fingers of the movable comb extending from the movable frame.

[0018] Preferably, the fixed beam has a central axis which extends parallel to the sensitive axis S. In practice, the arrangement of the fixed fingers and the movable fingers on either side of the central beam may be symmetrical with respect to the central axis of the beam, but this symmetry is of course not obligatory.

[0019] Advantageously, the fingers of the movable combs of two adjacent active cells along an axis W which extends in the active plane and which is perpendicular to the sensitive axis S, extend from the same lateral part of the movable frame. This configuration offers in particular the advantage of optimizing the surface occupied by the supports of the movable fingers, while guaranteeing that the own mass of the movable combs remains sensitive with respect to the amplitude of the movements to be measured or detected.

[0020] The positive and negative active cells are preferably distributed in a matrix of jxj active cells, j being an even number, and there are as many positive and negative active cells both on the rows of the matrix and on the columns of the matrix.

[0021] In practice, the positive and negative active cells are preferentially distributed so as to form a centrosymmetric structure (or matrix). Such a configuration makes it possible to cancel the capacitive offset at rest, regardless of the dimensional variations between the electrodes resulting from the deformations of the wafer during the manufacturing process.

[0022] Thus, in a variant, the rows and columns of the matrix may have an alternation of positive active cells and negative active cells.

[0023] In another variant, the rows and columns of the matrix may have an alternation of sub-matrices of Ixl positive active cells and sub-matrices of Ixl negative active cells, l being an even number. In other words, each sub-matrix of positive active cells is formed of Z2 positive active cells and each sub-matrix of negative active cells is formed of Z2 negative active cells.

[0024] The invention also relates to a two-axis sensitive detection system, for example adapted for detection along two axes X and Y of a Galilean frame of reference, comprising at least two MEMS vibration detection devices along a sensitive axis S, each MEMS detection device being as described above. The sensitive axis S of one of the MEMS detection devices being perpendicular to the sensitive axis S of the other MEMS detection device. In other words, the sensitive axis S of one of the MEMS detection devices is intended to be positioned parallel to a first axis X of the frame of reference, and the sensitive axis S of the other MEMS detection device is intended to be positioned parallel to the second axis Y of the frame of reference.

[0025] The detection system may thus comprise a plurality of MEMS vibration detection devices as described above, the sensitive axes of a first set of MEMS detection devices being positioned perpendicular to the sensitive axes of a second set of MEMS detection devices. In other words, the detection system may comprise a plurality of MEMS vibration detection devices with a sensitive axis along the first X axis of the reference frame and a plurality of MEMS detection devices with a sensitive axis along the second Y axis of the reference frame.

[0026] All of the MEMS detection devices can be distributed on the same chip. In practice, and on the same matrix distribution principle explained above, the different MEMS detection devices of the system can be distributed in matrix and / or sub-matrices on the chip. In addition, two adjacent MEMS devices can also share the same portion of frame. Brief description of the drawings

[0027] Other characteristics and advantages of the invention will emerge clearly from the description given below, for information purposes only and in no way limiting, with reference to the appended figures, in which: - [Fig.l] is a schematic representation of a MEMS sensor according to one embodiment, formed from a 4x4 matrix of active cells; - [Fig.2] is a schematic representation of an active cell of the MEMS sensor of [Fig.l]; - [Fig.3] is a view of zone A identified in [Fig.2]; - [Fig.4] is a view of zone B identified in [Fig.l]; - [Fig.5] is an example of a matrix arrangement of positive and negative active cells, according to one embodiment; - [Fig.6] is an example of a matrix arrangement of positive and negative active cells, according to another embodiment; - [Fig.7] is an example of a matrix arrangement of positive and negative active cells, according to another embodiment; - [Fig.8] is an example of a matrix arrangement of positive and negative active cells, according to another embodiment; - [Fig.9] is a schematic representation of a two-axis detection system according to one embodiment; - [Fig. 10] is an example of a matrix arrangement of MEMS sensors of a two-axis detection system, according to another embodiment. Description of the embodiments

[0028] For a MEMS sensor to be suitable for detecting or measuring vibration, for example for frequencies up to 20kHz (bandwidth), it is conventionally necessary for the resonance frequency of the MEMS sensor to be greater than this bandwidth.

[0029] In MEMS capacitive accelerometers, the relationship between the displacement Ax of the mass m under an acceleration a is given by the following equation: Ax / a = l / (2n fre s)2. Thus, compared to conventional accelerometers with a resonant frequency of 2kHz, an accelerometer with a resonant frequency of 20kHz will have a mechanical sensitivity to acceleration reduced by a factor of 100.

[0030] In order to maintain a good signal-to-noise ratio of the detection voltage V, expressed as voltage variation relative to the applied acceleration (AV / a), it is therefore necessary to maximize both the capacitive variation AC during a displacement Ax of the mass m as well as the voltage variation AV associated with a capacitive variation AC: AV / a = (Ax / a).(AC / Ax).(AV / AC)= l / (2n fres)2. (AC / Ax).(AV / AC).

[0031] Thus, to obtain the highest possible capacitance variation according to the applied displacement (AC / Ax), it is proposed to produce a MEMS sensor with interdigitated capacitive combs produced in a substrate, free from a dedicated specific proof mass, the own masses of the mobile fingers playing the role of proof mass.

[0032] Furthermore, to obtain the highest possible voltage variation according to the capacitance variation (AV / AC), it is proposed to produce a MEMS sensor having the smallest possible capacitive offset at rest, which maximizes the gain of the electronic capacitance / voltage converter. To achieve this, the MEMS sensor is formed of different interdigitated comb cells, arranged in a network or matrix. This configuration maximizes the detection surface and therefore the detection capacity of the sensor, while compensating for the capacitive offset introduced in particular by dimensional variations due to the manufacturing process.

[0033] In [Fig. 1] is schematically represented an example of a MEMS sensor for measuring displacement by differential capacitive measurement according to an embodiment of the invention. This MEMS sensor is formed of a matrix 1 of active capacitive cells 10 distributed in an active plane (generally the main plane of the substrate or wafer in which the MEMS device is manufactured) parallel to a predefined sensitive detection axis S of the sensor. The MEMS sensor of [Fig. 1] comprises in particular 16 active cells. As indicated in [Fig. 2], each active cell 10 is free of specific proof mass and is simply formed of a fixed comb 2 and a mobile comb 3 whose fingers 21, 31 are interdigitated with each other.

[0034] As illustrated in Figures 2 and 3, each active cell 10 is formed of a frame 30 in the active plane and a central beam 20 positioned in the frame 30 and extending in the direction of the sensitive axis S. The frame 30 carries the fingers 31 of the movable comb 3, and the central beam 20 carries the fingers 21 of the fixed comb 2. The fingers 31 of the movable comb 3, which will be called hereinafter “movable fingers”, extend from the two lateral parts of the frame 30, towards the inside of the frame 30 and perpendicular to the sensitive axis S. The fingers 21 of the fixed comb 2, which will be called hereinafter “fixed fingers”, extend laterally on either side of the central beam 20.The central beam 20 is fixed and is in particular secured, via the anchoring zone 22, to the movements along the sensitive axis S (for example oriented parallel to an axis X of a Galilean frame of reference), undergone by the body to which the MEMS sensor is attached, while the frame 30 is free and therefore at rest relative to the Galilean frame of reference. In other words, the frame 30 is intended to be mobile relative to the central beam 20.

[0035] To optimize the surface area occupied by the supports (frames and beams) of the fingers, each active cell preferably has a lateral part of the movable frame common with the adjacent active cells. In particular, as illustrated in [Fig.4] showing a common part between two adjacent active cells 10N, 10P along the axis W perpendicular to the sensitive axis S, the movable fingers of the two adjacent active cells 10P, 10N advantageously extend from the same lateral part of the movable frame. The arrangement of the fixed fingers and the movable fingers on either side of the central beam may be symmetrical with respect to the central axis of the beam, without however being an essential condition. Similarly, two active cells 10N, 10P adjacent along the S axis share the same portion of frame 30.

[0036] In practice, to enable differential capacitive measurements to be carried out, the active cells 10 of the matrix are configured so that, during a movement of the mobile combs along the sensitive axis S: - in some of the active capacitive cells, the moving fingers move away from the fixed fingers in the direction of movement; and - in some other active capacitive cells, the moving fingers approach the fixed fingers in the same direction of movement, and in the same proportions.

[0037] Thus, the matrix 1 of active cells 10 comprises so-called positive active cells 10P and so-called negative active cells 10N. By positive active cell 10P is meant an active cell for which the fingers are used as positive electrodes for the differential capacitive measurement, and by negative active cell 10N is meant an active cell for which the fingers are used as negative electrodes for the differential capacitive measurement. In practice, during a movement of the body to which the MEMS sensor is attached, all the moving combs 3 of the active capacitive cells 10P and 10N move simultaneously in the same direction substantially parallel to the sensitive axis S. In response to this movement, a first inter-finger capacitive value C1 can be measured via the positive capacitive cells and a second inter-finger capacitive value C2 can be measured via the negative capacitive cells.In practice, when the moving mass is subjected to an acceleration which generates a displacement along the sensitive axis S, the first capacitive value Cl is different from the second capacitive value C2, and the difference between these capacitive values Cl and C2 is representative of the displacement of the moving mass.

[0038] Furthermore, in order to reduce the impact of the capacitive offset at rest induced in particular by the dimensional variations resulting from the deformations of the wafer during the process, the positive 10P and negative 10N active cells are distributed in a centro-symmetric matrix, with as many positive and negative active cells on the rows of the matrix as on the columns of the matrix, and this in even number. Thus, the active cells are distributed in the form of a square matrix of order M, with M an even number, and this MxM matrix will contain as many positive 10P active cells as negative 10N active cells, with i=M2, i being the total number of active cells (positive and negative).

[0039] Three examples of configurations are presented in Figures 5 to 7, respectively 2x2, 4x4 and 8x8, and in which the matrices comprise an alternation of positive 10P and negative 10N active cells.

[0040] In another variant, it is possible to envisage a configuration in which groups of positive active cells are arranged alternately with groups of negative active cells. In other words, the matrix would contain sub-matrices of Ixl positive active cells and sub-matrices of Ixl negative active cells, where l is an even number. Each of the sub-matrices is formed of active cells of the same type, namely positive cell or negative cell. Thus, each sub-matrix of positive active cells is formed of Z2 positive active cells and each sub-matrix of negative active cells is formed of Z2 negative active cells. An example illustrating this configuration is shown in [Fig.8]. The 4x4 matrix is formed of 2x2 sub-matrices.

[0041] Anchoring means connecting the structure 1 to a frame may be provided to prevent the structure 1 from moving outside the active plane, as well as to ensure the movement of the movable combs along the sensitive axis S and the immobility of the fixed combs in the active plane.

[0042] For example, the structure 1 may comprise a central anchor 4 ([Fig.l]) connected to the frame and configured to prevent any movement of the structure out of the active plane. Anchor points 33 arranged at strategic corners of the structure and coupled to the movable frame via flexible microstructures, such as springs or serpentine microstructures, may also be provided to ensure the sensitivity of the movable combs to movement along the sensitive axis S.

[0043] Furthermore, each central beam 20 can be held stationary in the active plane by means of one or more other anchoring points, for example at the center of the beam 20 ([Fig.2]). The central beam 20 which acts as a support for the fixed fingers 21 can generally be in the form of an elongated body extending parallel to the sensitive axis S and connected to the frame at its center via an anchoring zone 22. The surface area of this anchoring zone 22 preferably does not exceed 50% of the total surface area of the central beam. Thus, in this configuration, the fixed fingers of an active cell can have slightly different lengths (along the W axis) and widths (along the S axis).

[0044] Advantageously, the elements of the structure are dimensioned to avoid undesired operating modes, and to allow the own masses of the moving combs to act as a test mass.

[0045] In the MEMS sensor of the invention, the sensitive moving part is formed by the frame and moving fingers assembly, whereas in prior art MEMS accelerometers configured for differential capacitive measurement, the sensitive moving part is formed by the proof mass and moving fingers assembly. In the invention, the surface area of the moving fingers may represent half of the total surface area of the sensitive moving part, whereas it typically represents only a quarter in prior art MEMS accelerometers.

[0046] As an example, the following dimensions can be considered:

[0047] For each active cell, the width of the central beam carrying the fixed fingers can be substantially equal to the width of the portions of the frame carrying the mobile electrodes. This dimensional homogeneity improves the homogeneity of the silicon etching, thus reducing the capacitive offset. In practice, this width is advantageously less than or equal to 20 pm, for example equal to 20 pm, in order to minimize the surface area while pushing back the parasitic modes beyond 20 kHz.

[0048] The width of the fingers as well as the spacing between the fingers are advantageously fixed at the smallest possible dimension permitted by MEMS technology, typically of the order of 3 pm for a thickness of 60 pm.

[0049] The ratio of the width of the central beam or frame to the width of a fixed or movable finger may be less than 10 in order to maximize the detection area. For prior art MEMS systems, the ratio of the width of the seismic mass to the width of the movable fingers is generally greater than 20.

[0050] For each active cell, the ratio between the surface area occupied by the mobile frame supporting the mobile fingers and the total active surface area of the cell may be less than 25%, for example equal to 10% if only half the width of the parts of the frame which are shared with the other adjacent cells is taken into account.

[0051] For each active cell, the ratio between the surface area occupied by the fixed and mobile fingers and the total active surface area of the cell may be greater than 20%, for example equal to 23%.

[0052] For each active cell, the ratio between the surface area occupied by the central beam supporting the fixed fingers and the total active surface area of the cell may be less than 10%, for example equal to 5% without taking into account the central anchoring, or equal to 7% taking into account the central anchoring.

[0053] Preferably, the lowest possible number of anchoring points will be favored, which nevertheless ensures the immobility of the structure outside the active plane, while allowing the sensitivity of the mobile combs to movements along the sensitive axis S, so as to avoid as much as possible the appearance of undesired operating modes. The parts forming the frame are preferably as thin as possible in terms of width, but robust enough to repel undesired modes.

[0054] The structure of the MEMS sensor described above thus makes it possible to produce a two-axis sensitive detection system.

[0055] For example, as illustrated in [Fig. 9], two MEMS vibration detection sensors 50 along a sensitive axis S can be arranged side by side, the sensitive axes S of each of the sensors 50 are oriented so as to form a two-axis sensitive detection system 5, for example adapted for detection along two orthogonal axes X and Y of a Galilean reference frame. In the example illustrated in [Fig. 9], the sensitive axis S of one of the MEMS detection sensors 50 is oriented parallel to the axis X of the reference frame, and the sensitive axis S of the other MEMS detection sensor 50 is oriented parallel to the Y axis of the reference frame. Of course, the detection system 5 may comprise several MEMS detection sensors 50 whose sensitive axes S are oriented parallel to one of the X axes of the reference frame, and several MEMS detection sensors 50 whose sensitive axes S are oriented parallel to the other Y axis of the reference frame.

[0056] Furthermore, on the same matrix distribution principle explained above, the different MEMS detection sensors 50 of the system can be distributed in matrix and / or in sub-matrices on a chip, and two adjacent MEMS sensors 50 can have a portion of frame 30 in common. An example of distribution in 4x4 matrix of the MEMS detection sensors 50 is illustrated in [Fig. 10]. In this example, the system 5 is formed of an alternation of MEMS sensors 50 of sensitive axis S along the X axis and MEMS sensors 50 of sensitive axis S along the Y axis.

Claims

Claims

1. MEMS microelectromechanical device for detecting vibration along a sensitive axis (S), by differential capacitive measurement, - the MEMS device comprising a matrix (1) of active cells (10) distributed in an active plane parallel to the sensitive axis (S), - said matrix (1) being formed of a number i of so-called positive active cells (10P) and a number i of so-called negative active cells (ION), i being an even number, - each of the positive and negative active cells (10P, ION) being formed of at least one mobile comb (3) and at least one fixed comb (2), the fingers (21) of the fixed comb (2) and the fingers (31) of the mobile comb (3) respectively forming fixed and mobile electrodes, extending in the active plane perpendicular to the sensitive axis (S) and being interdigitated, - the mobile combs (3) of all the positive and negative active cells (10P,ION) moving simultaneously in the same direction substantially parallel to the sensitive axis (S) in response to a displacement applied to the MEMS device, inducing a first capacitive value between adjacent fixed and mobile electrodes in each positive active cell (10P), and a second capacitive value between adjacent fixed and mobile electrodes in each negative active cell (ION), the difference between the first and second capacitive values being representative of the displacement applied to the MEMS device;, each positive and negative active cell (10P, ION) comprising a fixed central beam (20) extending in the direction of the sensitive axis (S), and positioned in a frame (30) movable relative to the central beam (20), the fingers (21) of the fixed comb (2) extending laterally on either side of this central beam (2), and the fingers (31) of the movable comb extending from the movable frame (30); and the fingers (31) of the movable combs (3) of two adjacent active cells (10) along an axis (W) which extends in the active plane and which is perpendicular to the sensitive axis (S), extending from the same lateral part of the movable frame (30).

2. The MEMS device of claim 1, wherein the positive and negative active cells (10P, 10N) are distributed in a matrix of jxj active cells, j being an even number, and there are as many cells positive and negative active (10P, ION) on the rows of the matrix and on the columns of said matrix.

3. MEMS device according to claim 2, wherein the rows and columns of the matrix have alternating positive active cells (10P) and negative active cells (ION).

4. MEMS device according to claim 2, wherein the rows and columns of the matrix have alternating sub-matrices of Ixl positive active cells (10P) and sub-matrices of Ixl negative active cells (ION), l being an even number.

5. Detection system along two axes of a reference frame comprising at least two MEMS vibration detection devices (50) along a sensitive axis (S) according to one of claims 1 to 4, the sensitive axis (S) of one of the MEMS detection devices (50) being perpendicular to the sensitive axis (S) of the other MEMS detection device (50).

6. A detection system according to claim 5, comprising a plurality of vibration detection MEMS devices (50) according to one of claims 1 to 6, the sensitive axes (S) of a first set of detection MEMS devices (50) being positioned perpendicular to the sensitive axes (S) of a second set of detection MEMS devices (50).

7. The sensing system of claim 6, wherein the plurality of sensing MEMS devices (50) are arrayed and / or sub-arrayed on a chip.

Images