METHOD FOR MANUFACTURING A VIBRATING MECHANICAL INERTIAL SENSOR, A SENSOR OBTAINED BY SUCH A METHOD, AND AN INERTIAL CONTROL UNIT INCLUDING SUCH A SENSOR
FR3164527B1Active Publication Date: 2026-06-19HALLIBURTON ENERGY SERVICES INC
Patent Information
- Authority / Receiving Office
- FR · FR
- Patent Type
- Patents
- Current Assignee / Owner
- HALLIBURTON ENERGY SERVICES INC
- Filing Date
- 2024-07-09
- Publication Date
- 2026-06-19
Abstract
Method for manufacturing a vibrating mechanical inertial sensor, sensor obtained by such a method and inertial unit including such a sensor. The invention relates to a method for manufacturing a vibrating inertial sensor (1), comprising a step of associating a sensing element (3) with a base (2), a step of assembling a cover (100) to said base (2) to form a housing in which said sensing element (3) is housed, a step of evacuating said housing or filling the latter with a dry gas, and a step of magnetically shielding said housing which includes a first operation of depositing, by electroplating, a first layer of a first ferromagnetic material on at least a part of said housing. Vibrating inertial sensors. Figure for the abstract: Fig. 3.
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