MEMS-type pendulum accelerometer sensor with two measurement ranges

Abstract

A method for controlling an accelerometer sensor having electrodes forming capacitors with capacitances that vary according to the distance between the electrodes. A control unit is arranged to perform a capacitance measurement operation and a control operation that selectively comprises: a fine control phase in which a first voltage is applied between one of the fixed electrodes and the moving electrode, the other fixed electrode being at the same potential as the moving electrode; and an extended control phase in which a second voltage is applied between one of the fixed electrodes and the moving electrode, the other fixed electrode being at the same potential as the moving electrode, and the second voltage being greater in absolute value than the first voltage. The control unit is arranged to implement self-calibration. A method using such a sensor. FIGURE FROM THE ABRIDGED: 1

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