Uv-assisted wafer cleaning method and apparatus

GB202417898D0Pending Publication Date: 2025-01-22LAM RES AG

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Patent Information

Application Number: GB2024017898
Authority / Receiving Office: GB · GB
Patent Type: Applications
Current Assignee / Owner
Filing Date: 2024-12-06
Publication Date: 2025-01-22

Application Information

Patent Timeline

06 Dec 2024

Application

GB2024017898

22 Jan 2025

Publication

GB202417898D0

CPC: H10P70/20; H10P50/68; H10P72/0424; H10P72/0436

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Cited By

UV-assisted wafer cleaning method and apparatus
WO2026120016A1