Vacuum pump

The seal-free vacuum pump design with a bellows-enclosed enclosure and inert purge gas system addresses leakage and safety issues by isolating the pump assembly, ensuring efficient and safe operation in reactive gas environments.

GB2632653BActive Publication Date: 2026-06-12EDWARDS LTD
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Patent Information

Authority / Receiving Office
GB · GB
Patent Type
Patents
Current Assignee / Owner
EDWARDS LTD
Filing Date
2023-08-14
Publication Date
2026-06-12

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Abstract

Disclosed is a vacuum pump comprising a pump assembly 100 with inlet 120 and outlet 130 means and an enclosure 140 for containing the pump assembly, the enclosure means comprising a first end part 141
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