Apparatus for stabilising a vacuum pump within a frame, vacuum pump apparatus and method

Abstract

An apparatus 200 suitable for steadying a vacuum pump within a frame. A first part 210 for attaching to a frame, has an elongate hole 212 suitable for receiving a bolt 220, and multiple castellations

Description

FIELD OF THE INVENTION The present invention relates to vacuum pumps, in particular to apparatuses and methods for stabilising vacuum pumps in frames. BACKGROUND Vacuum pump systems need to be safely installed at customer premises. Generally, a vacuum pump system requires a highly accurate level installation to ensure effective operation to allow connectivity to fore lines, atmospheric connectives and utilities without significant tolerance. Achieving a compliant installation can be challenging owing to a number of factors. One particular factor is the condition of the floor or sub-floor upon which a vacuum pump system is to be installed. The floor at a customer premises may be uneven (i.e., slanted or undulating or broken) beyond the normal limits of tolerance for the vacuum pump system. Furthermore, a vacuum pump installation may need to comply with performance-based environmental, health and safety requirements, regulations and standards. By way of example, the SEMI-S2 guidelines for semiconductor fabrication installations include seismic compliance requirements to ensure that structural elements of an installation survive without yield or process gas leaks after a seismic event. This tends to be referred to as ‘seismic restraint’ and tends to require vacuum pump systems to be bolted to the floor. SUMMARY OF THE INVENTION Vacuum pumps tend to be housed within a frame. The frame tends to be attached to the floor at a customer premises, with the vacuum pumps themselves being attached to the frame. This arrangement tends to be used because the number of holes drilled into the floor at a customer premises can be reduced and hence cost and damage to the floors is reduced. The frame itself tends to be levelled using shims or levelling feet prior to be bolted or otherwise attached to the floor. A vacuum pump system may however have a mass in excess of 1800kg which tends to result in excessive point loading on the floor and frame when shims or levelling feet are used. This tends to cause stresses on the floor and frame structure that can yield and fail during a seismic event. The installation procedure also tends to be time consuming and poorly defined leading to additional costs and delays for the installation. Other restrictions may also be placed on vacuum pump system installation including but not limited to single sided access (i.e., fixing solutions and pump attachments must be accommodated without rear access and with limited tool access); unevenness and tilt of the floor across frames housing vacuum pump systems (i.e., floor unevenness of plus / minus 5mm should be generally accommodated); pumps requiring securing to the frame with no clearances in seismic brackets (a small movement at the bottom of the frame may result in large movement and stress at the top of the frame potentially rupturing bellows or other connections); and stable pump rails using seismic brackets and end bolting being required (no side bolting being available). Generally, it is an aim of the present invention to provide an apparatus for stabilising a vacuum pump within a frame that mitigates these issues. In a first aspect, there is provided an apparatus for stabilising a vacuum pump within a frame, the apparatus comprising: a first member for attaching to the frame, the first member comprising a first hole extending through the first member from a first face to a second face, the first hole for receiving a bolt and being elongate in a first direction parallel to the first face such that the bolt can be adjusted in the first direction relative to the first member, wherein the first member comprises one or more first castellations arranged on the first face; a second member for attaching to the vacuum pump, the second member comprising a second hole extending through the second member from a third face to a fourth face, the second hole for aligning with the first hole of the first member; a third member for arranging between the first member and the second member, the third member comprising a third hole extending through the third member from a fifth face to a sixth face, the third hole for aligning with the first hole of the first member and the second hole of the second member, wherein the third member comprises one or more second castellations arranged on the fifth face; and a bolt receivable through the first hole, the second hole and the third hole; wherein the one or more first castellations and the one or more second castellations are configured to cooperate with each other to prevent movement relative to each other in the first direction, such that when the first member is fastened to the second member via the third member using the bolt, the first member is prevented from moving in the first direction relative to the second member, and such that in-use the vacuum pump is prevented from moving relative to the frame. The inventors have found that decoupling the frame from the vacuum pump has the advantage of allowing for levelling of the vacuum pump whilst ensuring seismic compliance by securing the frame to the floor or subfloor at the location of installation. However, this tends to introduce the problem of a misalignment of the frame to the pump when the floor or subfloor has defects. To tolerate the angular displacement the apparatus of the first aspect is provided. The first hole being elongate in the first direction tends to allow for misalignment of the vacuum pump and the frame in the first direction. For instance, the vacuum pump may be levelled but the frame may be unlevelled owing to the condition of the floor or subfloor upon which the frame resides. However, if the first member were directly attached to the second member without further stability measures as described herein, the pump may move in the first direction relative the frame during a seismic event. The one or more first castellations and the one or more second castellations tend to cooperate to mitigate this movement in the first direction. Whilst the one or more second castellations could be provided on the second member, the misalignment of the vacuum pump with the frame may be an angular misalignment and hence castellations on the second member would tend not to align with the castellations on the first member. Accordingly the third member is provided, which acts as a translative component for the angular misalignment between the first member and the second member. The third member, prior to fastening, is free to rotate such that the second castellations align and cooperate (i.e., lock) with the first castellations. The first castellations and second castellations then work together when fastened to each other to prevent movement of the vacuum pump in the first direction relative to the frame. The first member may be a bracket. The second member may be a bar or other elongate member. The third member may be a washer. The first direction may be vertical, horizontal or some other angle relative to the vertical or horizontal. The bolt may comprise a locking nut. The bolt fastens the various members together. Thread lock or a supplementary spring washer may be used to prevent vibrations, in-use, from loosening the bolts. The first members may be attachable to the frame using bolts or other fastening means. The second member may be attachable to the vacuum pump using one or more bolts, preferably two bolts. The apparatus tends to allow for stabilising of a vacuum pump within a frame by securing the vacuum pump to the frame using the apparatus at one or more sides of the vacuum pump (i.e., at the front, the rear, or both). The apparatus tends to be able to be retrofitted to existing vacuum pumps and frames and systems. The apparatus tends to allow for seismic restraint whilst maintaining level alignment of a vacuum pump without the need for the frame to use shims or levelling feet. The apparatus therefore tends to preserve seismic integrity of a frame containing a vacuum pump enabling Semi S2 compliance. The apparatus tends to be relatively cost effective and easy to install at customer premises. The apparatus tends to mitigate the requirement for complex lifting or hydraulic solutions. The one or more first castellations may be elongate in a second direction parallel the first face, wherein the second direction is different to the first direction. The elongate castellations tend to provide increased surface area for cooperation to mitigate movement in the first direction. The second direction may be orthogonal the first direction. By arranging the first castellations in the second direction orthogonal the first direction, forces acting on either the vacuum pump or the frame in the first direction do not have components in the second direction. Hence the mitigation of movement of the first member relative the second member (via the third member) and therefore of the vacuum pump relative to the frame, tends to be improved. The apparatus may comprise a plurality of first castellations and a plurality of second castellations. The pluralities of first and second castellations tend to allow for increased variability in the height of a vacuum pump relative to a frame to be accommodated. The second member may further comprise one or more third castellations arranged on the third face; and the third member may further comprise one or more fourth castellations arranged on the sixth face, wherein the one or more third castellations and the one or more fourth castellations are configured to cooperate to prevent movement relative each other. The third and fourth castellations may be used to further mitigate linear or angular movement of the second member relative the first member and hence of the vacuum pump relative to the frame. The one or more third castellations and the one or more fourth castellations may comprise at least one of: one or more radial castellations; and one or more annular castellations. The radial and annular castellations tend to prevent rotational movement between the second member and the third member. The apparatus may comprise a plurality of the first members for attaching to the first side of the frame; The apparatus may comprise a plurality of the third members. The apparatus may comprise a plurality of bolts. The second member may comprise a plurality of second holes, such that each first member can be fastened to the second member via a respective third member, by fastening a bolt through the respective first hole, second hole and third hole. The second member may be arrangeable to attach to plural first members to provide improved structural rigidity and stabilisation between a vacuum pump and the frame. The first members, second member and third members may be used to attached one side of a vacuum pump to a frame. Each first member may be for attaching to a first side of the frame. The apparatus may comprise a plurality of second members, wherein the first members are for attaching to first and second opposing sides of the frame. The plurality of second members may be used to provide an attachment at plural sides of a vacuum pump to a frame. For instance, where the front and rear of a frame are accessible, a second member may be used to attach a vacuum pump at the rear of the frame and a separate second member may be used to attach a vacuum pump at the front of the frame, using the plural first members, third members and bolts. The apparatus may comprise at least one first wedge for attaching to a second side of the frame, the second side being opposing the first side of the frame; and at least one second wedge for attaching to the vacuum pump to oppose the first wedge in the first direction. The wedges, in-use, tend to mitigate movement of the vacuum pump relative to the frame in the first direction, at the second side. The wedges may also mitigate some movement perpendicular to the first direction. The wedges, in-use, tend to mitigate seismic rotation forces. The wedges tend to allow for stabilisation at the second side of the frame when the second side of the frame is not accessible from the exterior of the frame, or where tool access internally to the frame is restricted (i.e., bolts cannot be used). The wedges, in-use, tend to restrict movement of vacuum pump in a frame to a forwards and backwards motion. The forwards and backwards motion can be stabilised using the first member, second member and third member as referred to herein at the first side of the frame. Overall therefore, a vacuum pump is able to be stabilised in a frame by securing it at the first side and the second side of the frame even where access is only available at the first side of the frame. Each first wedge may comprise one or more fifth castellations; and each second wedge may comprise one or more sixth castellations, wherein the one or more fifth castellations and the one or more sixth castellations are configured to cooperate to prevent movement of the first wedge relative to the second wedge. The one or more fifth castellations and the one or more sixth castellations further mitigate movement of the first wedge relative the second wedge. The fifth and sixth castellations tend to provide additional traction to mitigate relative movement. The apparatus may comprise means for adjusting the at least one first wedge relative to the frame in the first direction. The means for adjusting may comprise a ratchet mount, for instance. According to a second aspect, there is provided a vacuum pump apparatus comprising: a frame; a vacuum pump; and the apparatus of the first aspect for stabilising the vacuum pump within the frame. The frame may be seismically bolted to the floor. Seismic bolting may comprise, for example, drilling a hole into the floor and then arranging a metal sleeve within the hole and inserting a bolt through the frame and into the metal sleeve. The bolt may then be tightened to a predetermined torque. A further example of seismic bolting comprises using an all in one bolt (a bolt comprising the beforementioned metal sleeve). Generally, a certain radius around a seismic bolt is required to be kept free from further drill holes. The frame may have a plurality of connection points to lock-down to a floor, for instance two at the front and two at the rear of the frame. The frame may be constructed from solid bar to better stabilise the frame during a seismic event. The vacuum pump may be levelled prior to attaching to the frame using the apparatus of the first aspect. The vacuum pump apparatus may comprise a plurality of frames arranged parallel each other and bolted together; a plurality of vacuum pumps, each vacuum pump for a respective one of the plurality of frames; and a plurality of apparatuses of the first aspect, each apparatus for stabilising each respective vacuum pump within each respective frame. The plurality of frames may comprise greater than or equal to two frames, for instance ten or more frames. Using the apparatus disclosed herein for vacuum pump apparatuses comprising a plurality of frames, the number of additional holes drilled into a floor can be substantially reduced, saving cost and additional damage to floors. The plurality of frames may be bolted together at their top, middle and bottom. The vacuum pump apparatus may comprise for each respective frame: at least one first wedge is attached to the second side of the respective frame; at least one second wedge is attached to the vacuum pump to oppose the at least one first wedge; the first member is attached to the first side of the respective frame; the second member is attached to the vacuum pump to oppose the first member; and the first member is fastened to the second member via the third member using the bolt, such that the vacuum pump is prevented from moving relative to the frame. According to a third aspect there is provided a method of stabilising a vacuum pump within a frame, the method comprising: bolting a frame for a vacuum pump to a floor; attaching at least one first member to a first side of the frame, each first member comprising a first hole extending through the first member from a first face to a second face, the first hole for receiving a bolt and being elongate in a first direction parallel to the first face such that the bolt can be adjusted in the first direction relative to the first member, wherein the first member comprises one or more first castellations arranged on the first face; attaching a second member to a vacuum pump, the second member comprising a second hole extending through the second member from a third face to a fourth face, the second hole for aligning with the first hole of the first member; levelling the vacuum pump on the floor and within the frame; arranging a third member between the first member and the second member, the third member comprising a third hole extending through the third member from a fifth face to a sixth face, the third hole for aligning with the first hole of the first member and the second hole of the second member, wherein the third member comprises one or more second castellations arranged on the fifth face, wherein the one or more first castellations and the one or more second castellations are configured to cooperate with each other to prevent movement relative each other in the first direction; fastening a bolt through the first hole, the second hole and the third hole, such that the first member is fastened to the second member via the third member, such that the vacuum pump is prevented from moving relative to the frame. The method may comprise attaching at least one first wedge to a second side of the frame, the second side opposing the first side of the frame; and attaching at least one second wedge to the vacuum pump to oppose the first wedge in the first direction. The step of attaching the at least one first wedge and the at least one second wedge may be performed prior to levelling the vacuum pump on the floor and within the frame. It will be appreciated that particular features of different aspects of the invention tend to share the technical effects and benefits of corresponding features of other aspects of the invention. More specifically, the methods described herein share the same technical benefits as the apparatuses described herein. It will also be appreciated that the use of the terms “first” and “second”, and the like, are merely intended to help distinguish between similar features and are not intended to indicate a relative importance of one feature over another, unless otherwise specified. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1a shows an example of a vacuum pump within a frame on an unlevel floor. Figure 1b shows a prior art example of stabilising the vacuum pump and frame of Figure 1a. Figure 1c shows an example of stabilising the vacuum pump and frame of Figure 1a in accordance with aspects of the present disclosure. Figure 2a shows an example of an apparatus for stabilising a vacuum pump within a frame, in accordance with aspects of the present disclosure. Figure 2b shows the fifth and sixth faces of the third member of Figure 2a. Figure 2c shows third castellations on the third face of the second member of Figure 2a. Figure 3 shows an example of wedges for use in an apparatus for stabilising a vacuum pump within a frame, in accordance with aspects of the present disclosure Figure 4a shows an example of a frame for a vacuum pump in accordance with aspects of the present disclosure. Figure 4b shows an example of a vacuum pump for locating within the frame of Figure 4a, in accordance with aspects of the present disclosure. Figure 5 shows an example of a plurality of frames attached together, in accordance with aspects of the present disclosure. Figure 6 shows an example of a method of stabilising a vacuum pump within a frame, in accordance with aspects of the present disclosure. DETAILED DESCRIPTION Vacuum pump systems require safe installation and may require seismic compliance to Semi S2 standard such that structural elements of the vacuum pump system survive without yield or process gas leaks after a seismic event. Other installation restrictions may include one or more of: ■ Systems needing to cater for single sided access only. For instance, fixing solutions and pump attachments may not be accessible from the rear of an installation. ■ Pumps may require attachment to a frame, not bolted to a customer floor separately. Excessive bolt holes in the floor tends to increase cost and unnecessary damage to the floor itself. ■ Floor unevenness at an installation location may be + / - 5 mm across a frame. The floor may tilt in any angle. Local unevenness in a floor at an installation location can be high. ■ Frames tend to be required to be Semi S2 seismic compliant, without the use of levelling feet or shims. The load of the vacuum pump installation may be required to be spread across the surface area of the frame sections to avoid point loading the customer floor or causing permanent frame yield. ■ Vacuum pumps may be required to be secured without large tolerance clearances where possible. Pumps tend to be very heavy and have a tendance to drag other system components with them in a seismic event. Any movement tends to be amplified so a small movement at the bottom of the pump stack in a frame of an installation tends to result in a large displacement at the top of the pump stack. Figure 1a is a schematic illustration (not to scale) example 100 of a vacuum pump 110 within a frame 120 positioned on an unlevel floor 130. The unlevel floor 130 is sloped. The frame 120, located on the floor, is orientated at an angle to the vertical axis O. The frame 120 requires seismic bolting to the floor 130 to ensure seismic compliance. It is desirable to minimise the number of bolts drilled into the floor 130 to save cost and mitigate excessive structural damage to the floor 130. Accordingly, the vacuum pump 110 is attached to the frame 120 for stabilisation. The vacuum pump 110 is also orientated at an angle to the vertical axis 0, in parallel with the orientation of the frame 120. The unlevel orientation of the vacuum pump 110 makes connection of the vacuum pump 110 to other components of a vacuum pump system challenging, introducing significant tolerances into connections. Figure 1b shows a prior art example of stabilising the vacuum pump 110 and frame 120 of Figure 1a. One or more shims or feet 140’ have been arranged beneath the frame 120 between the frame 120 and floor 130. The one or more shims or feet 140’ are used to level the frame 120 such the orientation of the frame 120 is substantially parallel the vertical axis O. The vacuum pump 110 within the frame 120 is also orientated substantially parallel the vertical axis O owing to the mounting of the vacuum pump 110 within the frame 120. The frame 120 may be bolted to the floor 130. Whilst the example of Figure 1b tends to allow for bolting to the floor 130 and level orientation of the vacuum pump 110, it is an undesirable configuration for a number of reasons. For instance, the vacuum pump 110 and frame 120 may however have a mass in excess of 1800kg which tends to result in excessive point loading on the floor 130 and frame 120 via the shims or levelling feet 140’. This tends to cause stresses on the floor 130 and frame 120 that can cause either or both to yield and fail during a seismic event. The installation procedure also tends to be time consuming and poorly defined leading to additional costs and delays for the installation. Figure 1c shows an example of stabilising the vacuum pump 110 and frame 120 of Figure 1a in accordance with aspects of the present disclosure. The frame 120 sits on the floor 130 and is orientated at an angle relative to vertical axis O owing to the slope of the floor 130. The frame 120 is bolted to the floor using seismic bolts (not shown) to ensure seismic compliance. No artificial point loading is introduced owing to the frame 120 bolting directly to the floor 130 without the use of shims or levelling feet. The vacuum pump 110 resides within the frame 120 but is decoupled in orientation from the frame 120 using the apparatus 140. The vacuum pump 110 is levelled using its built-in levelling feet and then attached to the frame 120 using the apparatus 140. The apparatus 140 may connect the pump 110 to the frame 120 at four connection points (i.e., two points at the rear of the pump 110 (not visible) and two points at the from of the pump 110). The vacuum pump 110 accordingly has an orientation parallel the vertical axis O. The example of Figure 1c tends to allow for the highly accurate and level installation of vacuum pump 110 whilst maintaining the seismic compliance of the pump 110 and frame 120 installation on an unlevel floor 130. As previously discussed herein, the vacuum pump 110 tends to be required to sit vertically straight within the frame 120 to allow connectivity to forelines, atmospheric connectives and utilities without significant tolerance. The apparatus 140 enabling such an installation will now be described in greater detail. Figure 2a shows an example of an apparatus 200 for stabilising a vacuum pump within a frame, in accordance with aspects of the present disclosure. A first member 210 is shown for attaching to a frame. The first member 210 comprises a first hole 212 extending through the first member 210 from a first face 210a to a second face 210b. The first hole 212 is suitable for receiving a bolt 220. The first hole 212 is elongate in a first direction ‘A’ parallel to the first face 210a such that the bolt 220 can be adjusted in the first direction ‘A’ relative to the first member 210. The first direction ‘A’ may be the vertical direction ‘O’ of Figure 1, for instance. The first member 210 is a bracket having a substantially L-shaped cross-section when viewed along the first direction ‘A’. The first member 210 may be attachable to the frame using bolts, screws or other fastening means (for instance via additional holes 216). The first member 210 may be formed from metal. The first member 210 may have a height of 50mm-100mm . The first member 210 comprises a plurality of first castellations 214 arranged on the first face 210a. The first castellations 214 are elongate in a second direction ‘B’ parallel the first face 210a. The second direction ‘B’ is orthogonal to the first direction ‘A’. The first castellations 214 are a series of elongate ridges defining therebetween respective valleys. The first castellations 214 when viewed along the second direction ‘B’ have a cross-section similar to a saw-tooth structure. The first castellations 214 may have a depth of 3 to 8 mm. A second member 230 is shown for attaching to a vacuum pump. The second member 230 comprises a second hole 232 extending through the second member 230 from a third face 230a to a fourth face 230b. The second hole 232 is suitable for aligning with the first hole 212 of the first member 210 and for receiving the bolt 220. The second hole 232 has a circular crosssection. The second member 230 is an elongate member (i.e., a flat bar). The second member 230 may be attachable to a vacuum pump using bolts, screws or other fastening means (for instance via the additional holes 236). The second member 230 is shown in partial view to illustrate the arrangement for connecting to first member 210 and to one fixing point of a vacuum pump. The first second member 230 may extend further, towards a second fixing point of a vacuum pump and be provided with further holes 232, 236 for attaching to the second fixing point of the vacuum pump and to a further first member 210. The second member 230 may be a metal bar. The second member 230 may have a length of 400mm to 700mm. A third member 240 is shown arranged between the first member 210 and the second member 230. The third member 240 comprises a third hole 242 extending through the third member 240 from a fifth face 240a to a sixth face 240b. The third hole 242 has a circular cross section. The third hole 242 is suitable for aligning with the first hole 212 of the first member 210 and the second hole 232 of the second member 230. The third member 240 is a washer having a circular cross-section. The third member 240 is formed from metal. The third member 240 has a diameter of 20mm-30mm. As shown in the figure, the bolt 220 is received through the second hole 232 of the second member 230, then through the third hole 242 of the third member 240, then through the first hole 212 of the first member 210. The bolt 220 may be fastened into a nut (not visible) located behind the first member 210. The second member 230 may be attached to a fixing point of a vacuum pump via additional hole 236. As will be evident from the apparatus 200, the first hole 210 being elongate in the first direction ‘A’ allows for the bolt 220 and second member 230 and third member 240 to be adjusted in the first direction ‘A’ relative to the first member 210, prior to the first member 210, second member 230 and third member 240 being fastened together. This tends to allow for the first member 210 (which is attached to a frame) to be disposed at a different location in first direction ‘A’ relative to the second member 230 (which is attached to a vacuum pump). Accordingly, a vacuum pump that is level can be attached across its fixing points to both sides of a frame that itself is not level (owing to a floor surface slope and hence the bolt holes between the frame and pump may not align) using the apparatus 200. However, during a seismic event a risk of slippage and movement of the bolt in first hole 212 exists. The slippage may be in the first direction ‘A’. Accordingly, the third member 240 acts as a translation component between the first member 210 and the second member 230 to mitigate this movement / slippage. In this regard, the third member 240 will now be described in greater detail. Figure 2b shows the fifth and sixth faces 240a, 240b of the third member 240 of Figure 2a. A plurality of second castellations 244 are arranged on the fifth face 240a. The second castellations 244 are configured to cooperate with the first castellations 214 of the first member 210 to prevent movement relative each other in the first direction ‘A’. Accordingly, when the first member 210 is fastened to the second member 230 via the third member 240 using the bolt 220, the first member 210 is prevented from moving in the first direction ‘A’ relative to the second member 230. Accordingly, in a seismic event a vacuum pump attached to second member 230 is prevented from moving relative to a frame attached to the first member 210. It should be noted that providing the second castellations 244 on, for instance, the second member 230 and removing the third member 240 entirely tends not to be an option where a vacuum pump (attached to second member 230) and frame (attached to first member 210) are orientated differently. This is because the difference in orientation would result in the first castellations 214 and second castellations 244 not aligning in the second direction ‘B’. The third member 240 can be rotated prior to fastening to ensure the castellations 214, 244 align and cooperate. Upon fastening, as previously mentioned, the castellations 214, 244 mitigate movement in the first direction ‘A’. The first and second castellations 214, 244 may be sufficient not only to prevent movement in the first direction ‘A’ but may also prevent movement in any direction. For instance, friction between the castellations 214, 244 may prevent movement in the second direction ‘B’ and may further prevent rotational movement. However, in the present example, the third member 240 comprises a plurality of fourth castellations 246 on the sixth face 240b. The fourth castellations 246 comprise radial castellations i.e., cooperating radial ridges an grooves or channels. The fourth castellations 246 cooperate with corresponding third castellations 238 on the third face 230a of the second member 230, as shown in Figure 2c. The radial castellations 246, 238 tend to mitigate angular or rotational movement. Figure 3 shows an example of wedges 310, 320 for use in an apparatus for stabilising a vacuum pump within a frame, in accordance with aspects of the present disclosure. The wedges 310, 320 may be used in the apparatus 200 of Figure 2, for instance. A first wedge 310 is shown for attaching to a side of a frame. A second wedge 320 is shown for attaching to a vacuum pump. The second wedge 320 opposes the first wedge 310 in the first direction ‘A’. The opposing faces of the first wedge 310 and the second wedge 320 comprise respective fifth castellations 312 and sixth castellations 322. The castellations 312, 322 are configured to cooperate to prevent movement of the first wedge 310 relative to the second wedge 320 in the first direction ‘A’. The castellations 312, 322 have a saw-tooth type cross-section. In some vacuum pump installations, the installation location does not allow for rear access to the vacuum pump. For instance, the vacuum pump may be installed in a frame against a wall or adjacent other equipment. It can be challenging or impossible to provide a bolted connection of the vacuum pump to the frame at the rear of the pump in such scenarios. However, the rear of the vacuum pump still tends to require stabilisation from vertical and rotation movement. The first wedge 310 may be attached to such a frame at the rear of the frame to face downwards. The second wedge 320 may be attached to the rear of a pump to face upwards and oppose the first wedge 310. The first wedge 310 or second wedge 320 may be adjusted in the first direction ‘A’ prior to pump insertion into the frame. The pump may then be inserted into the frame such that the wedges 310, 320 engage at their castellations 312, 322 to create a firm connection without bolting. The only degree of movement of the pump then becomes movement into and out of the frame. This degree of movement can be prevented using the apparatus 200 of Figure 2 at the accessible front of the pump / frame. Figure 4a shows an example of a frame 410 for a vacuum pump, in accordance with aspects of the present disclosure. The frame 410 has a first side 410a that is accessible when a vacuum pump is located within the frame 410. The first side 410a may be considered to be the front of the frame 410. The frame 410 also has a second side 410b that is not accessible when a vacuum pump is located within the frame 410. The second side 410b may be considered to be the rear of the frame 410. The frame 410 is seismically bolted 430 to a floor. By seismically bolting 430 directly to the floor, no supplementary levelling solution is required for the frame 410 and hence the risk of seismic point loading on the frame / floor tends to be reduced. The frame 410 accordingly sits on the floor and follows the orientation of the floor. The second side 410b of the frame 410 is shown as having two first wedges 310 of Figure 3 attached thereto. The first side 410a of the frame 410 is shown as having two first member 210 of Figure 2a attached thereto. Figure 4b shows an example of a vacuum pump 420 for stabilising within the frame 410 of Figure 4a. The vacuum pump 420 has a front side 420a and a rear side 420b. On the rear side 420b of the vacuum pump 420, two second wedges 320 of Figure 3 are provided. The second wedges 320 are arranged to be received by the first wedges 310 of Figure 4a when the vacuum pump 420 is located into the frame 410. On the front side 420a of the vacuum pump 420, a second member 230 of Figure 2a is shown as being attachable through additional holes 236 into corresponding mounting holes 422 of the vacuum pump 420 using bolts 424. Two second holes 232 are shown as being provided in the second member 230 for receiving bolts 220 that can be further located into first holes 212 of the first members 210 of Figure 4a. In-use, the frame 410 will sit at what ever angle the floor presents. This tends to ensure seismic compliance. The pump 420 is installed and levelled, which may result in the pump 420 being at a different orientation to the frame 410. However, when the pump 420 is rolled into the frame 410, the wedges 310, 320 will interface at some position on their respective castellations 312, 322. This creates a friction lock between the rear 420b of the pump 420 and the second side 410b of the frame 410. As previously discussed herein, the only remaining available movement for the pump 420 relative the frame 410 is forwards and backwards i.e., into and out of the frame 410. The second member 230 is then attached to the first members 210 using via third members 240 as shown in Figure 2A. The first holes 212 of the first members 210 allow for adjustment owing to the different orientation of the frame 410 and pump 420. The third members 240 having the second and fourth castellations 244, 246 as shown in Figure 2B, ensure the third member locks with first castellations 214 of the first member 210 and fifth castellations 238 of the second member 230. When bolted together the pump 420 becomes locked to the frame 410 via the first member 210, second member 230 and third member 240. The first side 410a of the front is stabilised to the front side 420a of the pump 420. The bolting mechanism may further utilise thread locking solution or spring washers under the heat of the bolts to stop the bolts from loosening during use of the vacuum pump 420. Figure 5 shows an example 500 wherein a plurality of frames 410 are attached together in accordance with aspects of the present disclosure. The plurality of frames 410 are arranged parallel each other and bolted together. The frames 410 are seismically bolting to unlevel floor 510. Each frame 410 has located therein a corresponding vacuum pump 420. Each frame 410 and corresponding vacuum pump 420 are stabilised using respective apparatuses 200. The plurality of frames 410 may comprise up to ten frames. Figure 6 shows an example of a method 600 of stabilising a vacuum pump within a frame, in accordance with aspects of the present disclosure. A first step 610 comprises bolting a frame for a vacuum pump to a floor. A further step 620 comprises attaching at least one first member to a first side of the frame, each first member comprising a first hole extending through the first member from a first face to a second face, the first hole for receiving a bolt and being elongate in a first direction parallel to the first face such that the bolt can be adjusted in the first direction relative to the first member, wherein the first member comprises one or more first castellations arranged on the first face. A further step 630 comprises attaching a second member to a vacuum pump, the second member comprising a second hole extending through the second member from a third face to a fourth face, the second hole for aligning with the first hole of the first member. A further step 640 comprises levelling the vacuum pump on the floor and within the frame. A further step 650 comprises arranging a third member between the first member and the second member, the third member comprising a third hole extending through the third member from a fifth face to a sixth face, the third hole for aligning with the first hole of the first member and the second hole of the second member, wherein the third member comprises one or more second castellations arranged on the fifth face, wherein the one or more first castellations and the one or more second castellations are configured to cooperate with each other to prevent movement relative each other in the first direction. A further step 660 comprises fastening a bolt through the first hole, the second hole and the third hole, such that the first member is fastened to the second member via the third member, such that the vacuum pump is prevented from moving relative to the frame. Apparatus for implementing the above arrangement, and performing the method steps to be described above, may be provided by configuring or adapting any suitable apparatus. It should be noted that certain of the process steps depicted in the flowchart of Figure 6 and described above may be omitted or such process steps may be performed in differing order to that presented above and shown in Figure 6. Furthermore, although all the process steps have, for convenience and ease of understanding, been depicted as discrete temporally-sequential steps, nevertheless some of the process steps may in fact be performed simultaneously or at least overlapping to some extent temporally. Whilst the disclosure herein describes an apparatus suitable for use with vacuum pumps within frames, the same apparatus may be used for stabilising other components and equipment within frames. Whilst the disclosure herein may refer to components, surfaces or features that cooperate with each other, it will be understood that the term ‘cooperate’ is used interchangeably with the term ‘mate’ or similar. Whilst the disclosure herein may refer to frames having within them a single vacuum pump, it will be understood that frames may house plural vacuum pumps for instance in a stacked arrangement. Whilst the disclosure and examples herein may show first and second castellations having a saw-tooth like structure, other cross-sectional patterns may be used such as a toothed structure. Related is that the first and second castellations, whilst described and shown herein as being continuous, may alternatively define a non-continuous structure in the second direction. Whilst the disclosure and examples herein may refer to specific lengths or other dimensions, these are not intended to be limiting. In addition to the advantages already described herein, the apparatus and method tend to allow for system components to be level and still be seismically locked down without the need for shimming or levelling feed on a frame. The apparatus and method tend to be relatively cheap to produce and easier to implement than prior art solutions. In addition to the advantages already described herein, the apparatus and method tend to avoid using the standard side brackets and side rails for mounting vacuum pumps, which themselves can have large displacement during a seismic event. Accordingly, during a seismic event, large displacements of the vacuum pump that can stress or even rupture bellows or other pump connections tends to be avoided. In addition to the advantages already described herein, the apparatus and method tend to provide a flexible solution using pre-existing pump fixing points. In addition to the advantages already described herein, the apparatus and method tend to overcome some of the prior art system issues of uneven floors by allowing the frame to remain unlevelled, while allowing the pump to be level and still attached to the frame through the apparatus that overcomes the displacement between the two, while also not allowing any clearances that would otherwise cause large displacements and possible rupture of bellows connected to the vacuum pump and carrying process gas. Reference Numeral List 100 vacuum pump within a frame 110 vacuum pump 120 frame 130 unlevel floor 140 apparatus 140’ shim or levelling feet 200 apparatus 210 first member 210a first face 210b second face 212 first hole 214 first castellations 216 additional hole 220 bolt 230 second member 230a third face 230b fourth face 232 second hole 236 additional hole 238 third castellation 240 third member 240a fifth face 240b sixth face 242 third hole 244 second castellation 246 fourth castellation 310 first wedge 312 fifth castellation 320 second wedge 322 sixth castellation 410 frame 410a first side of frame 410b second side of frame 430 seismic bolting 500 example of plurality of frames 510 floor 600 method 610 step of method 620 step of method 630 step of method 640 step of method 650 step of method 660 step of method O vertical axis A first direction B second direction

Claims

1. Apparatus for stabilising a vacuum pump within a frame, the apparatus comprising:a first member for attaching to the frame, the first member comprising a first hole extending through the first member from a first face to a second face, the first hole for receiving a bolt and being elongate in a first direction parallel to the first face such that the bolt can be adjusted in the first direction relative to the first member, wherein the first member comprises one or more first castellations arranged on the first face;a second member for attaching to the vacuum pump, the second member comprising a second hole extending through the second member from a third face to a fourth face, the second hole for aligning with the first hole of the first member;a third member for arranging between the first member and the second member, the third member comprising a third hole extending through the third member from a fifth face to a sixth face, the third hole for aligning with the first hole of the first member and the second hole of the second member, wherein the third member comprises one or more second castellations arranged on the fifth face; anda bolt receivable through the first hole, the second hole and the third hole;wherein the one or more first castellations and the one or more second castellations are configured to cooperate with each other to prevent movement relative each other in the first direction, such that when the first member is fastened to the second member via the third member using the bolt, the first member is prevented from moving in the first direction relative to the second member, and such that in-use the vacuum pump is prevented from moving relative to the frame.

2. The apparatus of claim 1, wherein the one or more first castellations are elongate in a second direction parallel the first face, wherein the second direction is different to the first direction.

3. The apparatus of claim 2, wherein the second direction is orthogonal the first direction.

4. The apparatus of any preceding claim, comprising a plurality of first castellations and a plurality of second castellations.

5. The apparatus of any preceding claim, wherein:the second member further comprises one or more third castellations arranged on the third face; andthe third member further comprises one or more fourth castellations arranged on the sixth face, wherein the one or more third castellations and the one or more fourth castellations are configured to cooperate to prevent movement relative each other.

6. The apparatus of claim 5, wherein:the one or more third castellations and the one or more fourth castellations comprise at least one of:one or more radial castellations; andone or more annular castellations.

7. The apparatus of any preceding claim, comprising:a plurality of the first members for attaching to the first side of the frame;a plurality of the third members;a plurality of bolts; andwherein the second member comprises a plurality of second holes, such that each first member can be fastened to the second member via a respective third member, by fastening a bolt through the respective first hole, second hole and third hole.

8. The apparatus of any preceding claim, wherein each first member is for attaching to a first side of the frame.

9. The apparatus of claim 7, comprising a plurality of second members, wherein the first members are for attaching to first and second opposing sides of the frame.

10. The apparatus of claim 8, further comprising:at least one first wedge for attaching to a second side of the frame, the second side being opposing the first side of the frame; andat least one second wedge for attaching to the vacuum pump to oppose the first wedge in the first direction.

11. The apparatus of claim 10, wherein:each first wedge comprises one or more fifth castellations; andeach second wedge comprises one or more sixth castellations, wherein the one or more fifth castellations and the one or more sixth castellations are configured to cooperate to prevent movement of the first wedge relative to the second wedge.

12. The apparatus of any one of claims 10-11, further comprising means for adjusting the at least one first wedge relative to the frame in the first direction.

13. A vacuum pump apparatus comprising:a frame;a vacuum pump; andthe apparatus of any preceding claim for stabilising the vacuum pump within the frame.

14. The vacuum pump apparatus of claim 13, comprising:a plurality of frames arranged parallel each other and bolted together;a plurality of vacuum pumps, each vacuum pump for a respective one of the plurality of frames; anda plurality of apparatuses of any one of claims 1-11, each apparatus for stabilising each respective vacuum pump within each respective frame.

15. A method of stabilising a vacuum pump within a frame, the method comprising:bolting a frame for a vacuum pump to a floor;attaching at least one first member to a first side of the frame, each first member comprising a first hole extending through the first member from a first face to a second face, the first hole for receiving a bolt and being elongate in a first direction parallel to the first face such that the bolt can be adjusted in the first direction relative to the first member, wherein the first member comprises one or more first castellations arranged on the first face;attaching a second member to a vacuum pump, the second member comprising a second hole extending through the second member from a third face to a fourth face, the second hole for aligning with the first hole of the first member;levelling the vacuum pump on the floor and within the frame;arranging a third member between the first member and the second member, the third member comprising a third hole extending through the thirdmember from a fifth face to a sixth face, the third hole for aligning with the first hole of the first member and the second hole of the second member, wherein the third member comprises one or more second castellations arranged on the fifth face, wherein the one or more first castellations and the one or more5 second castellations are configured to cooperate with each other to prevent movement relative each other in the first direction;fastening a bolt through the first hole, the second hole and the third hole, such that the first member is fastened to the second member via the third member, such that the vacuum pump is prevented from moving relative to the10 frame.

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