Membrane for physical vapor transport growth chambers
GB2703713APending Publication Date: 2026-08-12MORGAN ADVANCED MATERIALS & TECHNOLOGY INC
Patent Information
- Authority / Receiving Office
- GB · GB
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2025-06-30
- Publication Date
- 2026-08-12
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Abstract
A physical vapour transport (PVT) chamber may comprise: a source of silicon carbide for the vapour source 50; a silicon carbide seed crystal 60 and a membrane 70 disposed between and in communication
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Citation Information
Patent Citations
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