Housing for a turbo-molecular vacuum

GB2704349APending Publication Date: 2026-09-02LEYBOLD AG
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Patent Information

Application Number
GB2025001753
Authority / Receiving Office
GB · GB
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-02-06
Publication Date
2026-09-02

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Abstract

A housing 10 for a turbo-molecular vacuum pump comprises of an inlet flange 12 arranged at the high vacuum side. The inlet flange surface 28 contacts the chamber to be evacuated and this surface 28 co
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Citation Information

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