Conduit assembly and support bracket for a vacuum pump and / or abatement system

Abstract

Apparatus 80 for use in a vacuum pumping and / or abatement system. The apparatus comprises a fluid conduit 52 having opposed first and second ends 54, 56 and being expandable and compressible in an axi

Description

FIELD OF THE INVENTION The present invention relates to an apparatus for use in a vacuum pumping and / or abatement system, including an expandable conduit and support bracket therefor. The present invention further relates to a support bracket for use with an expandable conduit of a vacuum pumping and / or abatement system. BACKGROUND Vacuum pumping and abatement systems are used in varied and different technological fields, for example semiconductor fabrication. Typically, in said systems, vacuum pumping equipment is used to pump gas (e.g. gas from an industrial process) out of a particular location, and abatement equipment is used to abate (e.g. destroy or dispose of) undesirable substances (e.g. exhaust gas) which have been produced. Bellows-like conduits, or “bellows” can be used in a variety of system applications, and are often used between the system foreline and the vacuum pump. The bellows allow some flexibility to account for tolerances in the system. They also provide some vibration suppression from the pump to the rest of the system. Such bellows tend to comprise thin wall flexible tubing that allow a limited range of movement. SUMMARY OF INVENTION The present inventors have realised that conventional bellows tend to be fragile and susceptible to failure when experiencing high tension, compression or lateral loading, such as may result from attachment of the bellows to a gate valve and / or from the vacuum force of an evacuated foreline during maintenance. Such failure may result in leak in the process gas path which can be dangerous and should be avoided. In order to combat this, the frames surrounding the bellows can be made stiffer to suppress lateral forces and prevent motion caused thereby. This may be achieved by using thicker material and more structural bracing for the frames. However, this adds cost and weight to the system. Furthermore, access to the space surrounding the bellows may be limited. Aspects provided herein provide a support bracket which may be used to support a bellows (e.g. during maintenance or transportation), reducing or eliminating unwanted high tension, compression or lateral loading on the bellows. The support bracket is removable from the bellows when not required so that the support bracket tends not to add significant weight or cost to the frames of the system. In a first aspect, there is provided an apparatus for use in a vacuum pumping and / or abatement system. The apparatus comprises: a conduit for permitting the flow therethrough of a fluid, the conduit having a first conduit end and a second conduit end opposite to the first conduit end, the conduit being expandable and compressible in an axial direction between the first conduit end and the second conduit end such that a length of the conduit between the first conduit end and the second conduit end may be varied; a first flange at or proximate to the first conduit end; a second flange at or proximate to the second conduit end; and a support bracket. The support bracket comprises a rigid body portion having a first end and a second end opposite to the first end. The first end of the rigid body portion is couplable to the first flange and the second end of the rigid body portion is couplable to the second flange whereby to restrict relative movement of the first and second flanges. The first end of the rigid body portion and the first flange comprise corresponding relief features configured such that movement of the first flange relative to the first end of the rigid body portion is limited in both the axial direction and a lateral direction perpendicular to the axial direction. The first end of the rigid body portion may comprise a first surface. The first surface may have a first relief feature and a second relief feature. The first relief feature may be configured to restrict relative movement of the first flange in the axial direction. The second relief feature may be configured to restrict relative movement of the first flange in the lateral direction. The first surface may be a substantially L-shaped surface having a first portion and a second portion disposed substantially perpendicular to the first portion. The first relief feature may be disposed on the first portion. The second relief feature may be disposed on the second portion. The first relief feature may be a protrusion from the first surface configured to fit into a corresponding groove in the first flange. The second relief feature may be a recess in the first surface configured to receive a corresponding protrusion from the first flange. The second end of the rigid body portion and the second flange may comprise corresponding relief features configured such that movement of the second flange relative to the second end of the rigid body portion is limited in both the axial direction and the lateral direction. The second end of the rigid body portion may comprise second surface. The second surface may have a third relief feature and a fourth relief feature. The third relief feature may be configured to restrict relative movement of the second flange in the axial direction. The fourth relief feature may be configured to restrict relative movement of the second flange in the lateral direction. The second surface may be a substantially L-shaped surface having a third portion and a fourth portion disposed substantially perpendicular to the first portion. The third relief feature may be disposed on the third portion. The fourth relief feature may be disposed on the fourth portion. The third relief feature may be a protrusion from the second surface configured to fit into a corresponding groove in the second flange. The fourth relief feature may be a recess in the second surface configured to receive a corresponding protrusion from the second flange. The support bracket may comprise a first member comprising the first end, and a second member comprising the second end. The first member and the second member may be detachably coupled together by a coupling mechanism. The apparatus may further comprise one or more further support brackets. The support bracket and the one or more further support brackets may be spaced apart at substantially equal intervals around a circumferential edge of the conduit. Each of the further support bracket may comprise a respective rigid body portion having a first end and a second end opposite to the first end. For each of the further support brackets: the first end of the rigid body portion may be couplable to the first flange and the second end of the rigid body portion is couplable to the second flange whereby to prevent or oppose relative movement of the first and second flanges. Also, either: the first end of the rigid body portion and the first flange may comprise corresponding relief features configured such that movement of the first flange relative to the first end of the rigid body portion is limited in both the axial direction and the lateral direction; or the second end of the rigid body portion and the second flange may comprise corresponding relief features configured such that movement of the second flange relative to the second end of the rigid body portion is limited in both the axial direction and the lateral direction. The conduit may comprise a bellows-like portion. The support bracket may be formed of a material selected from the group of materials consisting of steel, stainless steel, carbon steel, coated carbon steel, and aluminium. Each relief feature or further relief feature may be a relief feature selected from the group of relief features consisting of a protrusion, a notch, a groove, a lip, a rim, a cavity, a recess, and an indentation. In a further aspect, there is provided a support bracket for use with a conduit assembly of a vacuum pumping and / or abatement system. The conduit assembly comprises a conduit having a first conduit end and a second conduit end opposite to the first conduit end. The conduit is expandable and compressible in an axial direction between the first conduit end and the second conduit end such that a length of the conduit between the first conduit end and the second conduit end may be varied. The conduit assembly further comprises a first flange at or proximate to the first conduit end, and a second flange at or proximate to the second conduit end. The support bracket comprises a rigid body portion having a first end and a second end opposite to the first end. The first end of the rigid body portion is configured to couple to the first flange and the second end of the rigid body portion is configured to couple to the second flange whereby to prevent or oppose relative movement of the first and second flanges. The first end of the rigid body portion comprises a surface having at least one relief feature, the at least one relief feature being configured to prevent or oppose movement of the first flange relative to the second flange in both the axial direction and a lateral direction perpendicular to the axial direction. The second end of the rigid body portion may comprise a further surface having at least one further relief feature. The at least one further relief feature may be configured to prevent or oppose movement of the second flange relative to the first flange in both the axial direction and a lateral direction perpendicular to the axial direction. Each relief feature may be a relief feature selected from the group of relief features consisting of a protrusion and a recess. BRIEF DESCRIPTION OF DRAWINGS Figure 1 is a schematic illustration (not to scale) showing a vacuum pumping and / or abatement system; Figure 2 is a schematic illustration (not to scale) showing a perspective view of the vacuum pumping and / or abatement system; Figure 3 is a schematic illustration (not to scale) showing a perspective view of a module of the vacuum pumping and / or abatement system; Figures 4A to 4C are schematic illustrations (not to scale) showing a conduit assembly of the vacuum pumping and / or abatement system, and illustrating various forces that may act on said conduit assembly; Figure 5 is a schematic illustration (not to scale) showing a side view of an apparatus comprising the conduit assembly and a support bracket; Figure 6 is a schematic illustration (not to scale) showing a top view of the apparatus; Figure 7 is a schematic illustration (not to scale) showing a cross section of a portion of the apparatus; and Figure 8 is a schematic illustration (not to scale) illustrating the support bracket and conduit assembly during an installation process. DETAILED DESCRIPTION Figure 1 is a schematic illustration (not to scale) showing a vacuum pumping and / or abatement system 2. The system 2 is fluidly connected to an entity 4 via a fluid input line 6, commonly referred to as a “foreline”, between the system 2 and the entity 4. The entity 4 may, for example, be a chamber or room used in an industrial process such as semiconductor fabrication. The system 2 is also fluidly connected to an exhaust line 8. In operation, the system 2 pumps gas out of the entity 4 via the fluid input line 6 and / or abates (e.g. destroys or disposes of) undesirable substances produced by the entity 4 which may be present in the pumped gas. The system 2 also pumps exhaust gas (which may be gas which has undergone an abatement process) out of the system 2 into the exhaust line 8, thereby to remove the exhaust gas from the system 2. The system 2 is also connected to a facilities supply 10 by a plurality of facilities input lines 12. The term "facilities" is used herein to refer to resources which are used by the system 2 to support the main pumping / abatement function of the system 2. These facilities allow the system 2 to operate properly during use. Examples of facilities include facilities fluids (e.g. liquid coolant, tap water, de-ionised water, clean dry air, methane, oxygen, nitrogen, hydrogen), electrical power and / or electrical signals carried by electrical connections, and optical signals carried by optical connections (e.g. optical fibres). In operation, the system 2 receives the facilities from the facilities supply 10 via the plurality of facilities input lines 12. The system 2 comprises a plurality of modules 14, which may also be referred to as “units” or "slices". Each module 14 comprises one or more apparatuses 16. Each apparatus 16 is configured to perform a respective function within the system 2. For example, an apparatus 16 may be a vacuum pump for pumping gas out of the entity 4, an abatement apparatus for abating undesirable substances produced by the entity 4, an inverter for converting AC electrical power into AC electrical power with modified frequency, an electronic controller for controlling operation of all or part of the system 2, or a facilities apparatus for carrying out functions relating to facilities. However, the one or more apparatuses 16 are not limited as such. In general, each of the apparatuses 16 may be any apparatus which is used in a vacuum pumping and / or abatement system. In some embodiments, two or more of the apparatuses 16 are substantially identical and / or perform substantially the same function as each other. The vacuum pumping and / or abatement system 2 may be an integrated system. The term “integrated system” may be used to refer to two or more modules integrated together into a common system, the modules being selected from the group of modules consisting of: a module comprising vacuum pumping apparatus, a module comprising process gas abatement apparatus, and a module comprising a controller for controlling the vacuum pumping and / or abatement apparatuses. Figure 2 is a schematic illustration (not to scale) showing a perspective view of the vacuum pumping and / or abatement system 2. The plurality of modules 14 of the system 2 are positioned in a side-by-side, contiguous arrangement and coupled together to form the system 2. Each module 14 is attached to one or more adjacent modules 14 to join the modules 14 together. The system 2 comprises first facilities lines 20 and vacuum pumping and / or abatement lines 21. The facilities lines 20 may include pipes (e.g. metal pipes) configured to permit the flow of facilities fluid therethrough and / or electrical or optical connections such as wires or optical fibres. The vacuum pumping and / or abatement lines 21 may include pipes (e.g. metal pipes) configured to permit the flow of pumped gas therethrough. Figure 3 is a schematic illustration (not to scale) showing a perspective view of a module 14 of the vacuum pumping and / or abatement system 2. The module 14 comprises a frame 30 and a base 32 connected to the frame 30. The base 32 may be considered to be a part of the frame 30. The frame 30 and / or base 32 may be bolted to the ground / floor. The module 14 comprises an apparatus 16 (e.g. a vacuum pump or an abatement apparatus) which is disposed within the volume defined by the frame 30 and the base 32. The frame 30 comprises a plurality of interconnected bars coupled to the base 32. The module 14 has a front side 34, a rear side 36, a top side 38, a bottom side 40, and two opposing lateral sides 42. The module 14 also comprises facilities lines 20 and vacuum pumping and / or abatement lines 21. A vacuum pumping and / or abatement lines 21 may be the foreline 6. At least some of the facilities lines 20 may be lines which are configured to receive facilities fluid from a location remote from the module 14 (e.g. from the facilities supply 10 or another module 14), direct the facilities fluid through the module 14, and discharge the facilities fluid out of the module 14 (e.g. to another module or out of the system 2 entirely). At least some of the facilities lines 20 may be lines which are configured to convey electrical power or signals, or optical signals from a location remote from the module 14 (e.g. a controller or processor located in a different module or remotely from the system 2) to the module 14. The vacuum pumping and / or abatement lines 21 are configured to receive gas pumped from the entity 4 by one or more vacuum pumping apparatuses within the system 2 (e.g. by the apparatus 16 of the module 14 shown in Figure 3), direct the pumped gas through the module 14, and discharge the pumped gas out of the module 14 (e.g. to another module or out of the system 2 entirely). In this embodiment, as shown in Figure 3, the module 14 receives the fluid input line 6 from the entity 2. The part of the fluid input line 6 inside the module 14 constitutes a vacuum pumping and / or abatement line 21 of the module 14. The fluid input line 6 is connected to the apparatus 16 of the module 14 by a conduit assembly 50 or connection system. Figures 4A to 4C are schematic illustrations (not to scale) illustrating conduit assemblies 50 in various embodiments. Figures 4A to 4C illustrate various forces that may be exerted on a conduit assembly 50 so as to cause damage to or failure of the conduit assemblies 50. A conduit assembly 50 comprises a conduit 52 for permitting the flow therethrough of a fluid. The conduit 52 comprises a first conduit end 54 and a second conduit end 56 opposite to the first conduit end 54. The conduit 52 is expandable and compressible in an axial direction 58 between the first conduit end 54 and the second conduit 56 end such that a length of the conduit 52 between the first conduit end 54 and the second conduit end 56 may be varied. The conduit 52 may be flexible so as to also allow a degree of lateral movement, i.e. so the ends 54, 56 of the conduit may be moved relative to one another in the lateral direction 60, perpendicular to the axial direction 58. More specifically, in these embodiments the conduit 52 comprises a bellows or bellows-like portion or structure. The conduit assembly 50 further comprises a first flange 62. The first flange 62 is attached to the conduit 52 at or proximate to the first conduit end 54. The conduit assembly 50 further comprises a second flange 64. The second flange 64 is attached to the conduit 52 at or proximate to the second conduit end 56. Figure 4A is a schematic illustration (not to scale) of a conduit assembly 50 attached between a gate valve 66 and an apparatus 16 (e.g. a vacuum pump). Such an arrangement may occur, for example, during transportation of the apparatus 16 with the conduit assembly 50 and gate valve 66 attached thereto. In this configuration, the weight of the gate valve 66 is not supported by a frame or other structure of the vacuum pumping system. As such compressive and / or bending forces may be applied to the conduit 52 of the conduit assembly 50 by the unsupported gate valve 66, as illustrated in Figure 4A by an arrow and the reference numeral 70. Such compressive and / or bending forces may cause damage to the conduit 52. Figure 4B is a schematic illustration (not to scale) of a conduit assembly 50 attached between gate valve 66 and fluid input line 6. Such an arrangement may occur, for example, during maintenance of an apparatus 16. The gate valve 66 may be closed and detached from the apparatus 16, and the upstream fluid input line 6 may be under vacuum. In this configuration, a compressive force may be applied to the conduit 52 by the vacuum within the fluid input line 6, as illustrated in Figure 4B by an arrow and the reference numeral 72. Such a compressive force may cause damage to the conduit 52. Figure 4C is a schematic illustration (not to scale) of two conduit assemblies 50, a first conduit assembly 50 being attached between gate valve 66 and fluid input line 6 and a second conduit assembly 50 being attached between gate valve 66 and an apparatus 16 (e.g. a vacuum pump). Such an arrangement may occur, for example, during use of the apparatus 16 to pump and / or abate gas. In this configuration, a compressive force may be applied to the conduit 52 of one conduit assembly 50, while tension may be applied to the conduit 52 of the other conduit assembly 50, for example as illustrated in Figure 4C by arrows and the reference numerals 74. Such a compression and / or tension may cause damage to the conduits 52. Figure 5 is a schematic illustration (not to scale) showing a side view of an embodiment of an apparatus 80. Figure 6 is a schematic illustration (not to scale) showing a plan view of the apparatus 80. In this embodiment, the apparatus 80 comprises a conduit assembly 50 and a plurality of support brackets 82. The plurality of support brackets 82 protect the relatively fragile conduit 52 (i.e., the bellows) from the compression and / or tension associated with foreline gate valves on e.g. large, stacked vacuum pumps, such as described in more detail earlier above with reference to Figures 4A to 4C. The apparatus 80 comprises a conduit assembly 50 (which itself comprises a conduit 52, a first flange 62 at or proximate to the first conduit end 54, and a second flange 64 at or proximate to the second conduit end 56) and a plurality of support brackets 82. The first flange 62 and the second flange 64 are connected to the conduit 52 at opposite sides of the conduit 52. In other words, the first end 54 of the conduit 52 is attached to the first flange 62, and the second end 56 of the conduit 52 opposite to the first end 54 is attached to the second flange 64. The first flange 62 is an external flange. Thus, the first flange 62 forms a rim or collar that extends radially outwards at the first end 54 of the conduit 52. The second flange 64 is an external flange. Thus, the second flange 64 forms a rim or collar that extends radially outwards at the second end 56 of the conduit 52. In use, the first flange 62, at the inlet of the conduit 52, is further attached to the outlet of the fluid input line 6 that is received into the module 14. The first flange 62 is attached to the fluid input line 6 at the opposite side of the first flange 62 to the conduit 52. A sealing system, such as a gasket, may be disposed between the first flange 62 and the fluid input line 6. The first flange 62 may be configured to receive a plurality of bolts and may be connected to the end of the fluid input line 6, e.g. to a flange at the end of the fluid input line 6, by the plurality of bolts. In use, the second flange 64, at the outlet of the conduit 52, is further attached to the apparatus 16 of the module 14. The second flange 64 is attached to the apparatus 16 at the opposite side of the second flange 64 to the conduit 52. A sealing system, such as a gasket, may be disposed between the second flange 64 and the apparatus 16. The second flange 64 may be configured to receive a plurality of bolts and may be connected to the apparatus 16, e.g. to a flange at the input to the apparatus 16, by the plurality of bolts. In this embodiment, the conduit 52 is a bellows (e.g. a substantially tubular bellows) that permits the flow therethrough of the process gas. Thus, in operation, when the fluid input line 6 is attached to the apparatus 16 by the conduit assembly 50, process gas from the entity 4 flows from the fluid input line 6, into the conduit 52 at the first end 54 of the conduit 52, through the conduit 52, and out of the conduit 52 at the second end 56 of the conduit 52 to the apparatus 16. In this embodiment, the conduit 52 has a bellows-like structure and may be expanded or compressed in folds like a bellows or a concertina. In other words, the conduit 52 is expandable (i.e. may be elongated) and compressible (i.e. may be shortened). Thus, a length of the conduit 52 between the first end 54 and the second end 56 may be varied. In this embodiment, the apparatus 80 comprises three support brackets 82. However, in other embodiments, the apparatus 80 comprises a different number of support brackets 82, for example less than three (such as only one), or more than three. Preferably, the support brackets 82 are substantially equally spaced about the circumference of the conduit assembly 50. For example, in this embodiment in which there are three support brackets 82, the support brackets 82 are installed at approximately 120° intervals about the circumference of the conduit assembly 50. This advantageously tends to provide a stable base to resist expected forces. In this embodiment, each support bracket 82 is formed of a material selected from the group of materials consisting of steel, stainless steel, carbon steel, coated carbon steel, and aluminium. Preferably, support brackets 82 are made of aluminium 6061. Advantageously, use of aluminium 6061 tends not to gouge or mar the stainless-steel bellows flanges 62, 64. Moreover, calculations have shown aluminium 6061 to be sufficient for the expected forces. Each support bracket 82 comprises a rigid body portion 84 having a first end 86 and a second end 88 opposite to the first end 86. For each support bracket 82, the first end 86 of the rigid body portion 84 of that support bracket 82 is coupled to the first flange 62. For each support bracket 82, the second end 88 of the rigid body portion 84 of that support bracket 82 is coupled to the second flange 64. This coupling of the support brackets 82 between the first flange 62 and the second flange 64 limits or restricts relative movement of the flanges 62, 64. In this embodiment, each support bracket 82 comprises two members, namely a first member 90 and a second member 92. The first member 90 and the second member 92 are detachably coupled together at their proximal ends by a coupling mechanism 94. In this embodiment, the coupling mechanism comprises a plurality of fasteners 96 secured through the first member 90 and the second member 92. In this embodiment, the distal end of the first member 90, opposite its proximal end, is the first end 86 of the rigid body portion 84. In this embodiment, the distal end of the second member 92, opposite its proximal end, is the second end 88 of the rigid body portion 84. Figure 7 is a schematic illustration (not to scale) showing a cross section of a portion of the apparatus 80. In particular, Figure 7 shows in greater detail the coupling of the first end 86 of the rigid body portion 84 of a support bracket 82 to the first flange 62. It will be appreciated by those skilled in the art that the same coupling mechanism to that shown in Figure 7 and described below may be employed to couple the second end 88 of the rigid body portion 84 of a support bracket 82 to the second flange 64. The first end 86 of the rigid body portion 84 comprises a first surface 100. In this embodiment, the first surface is a substantially L-shaped surface having a first portion 102 and a second portion 104 disposed substantially perpendicular to the first portion 102. In this embodiment, the first surface 100 and the first flange 62 comprise corresponding, mating, interlocking, or complementary relief features configured such that movement of the first flange 62 relative to the first end 86 of the rigid body portion 84 is limited in both the axial direction 58 and the lateral direction 60. In particular, in this embodiment, the first portion 102 of the first surface 100 comprises a first relief feature 106. The first relief feature 106 is a protrusion. The first relief feature 106 fits into a corresponding relief feature, i.e. a groove 108, in the first flange 62. The first relief feature 106 (i.e. the protrusion) being located in the groove 108 of the first flange 62 restricts or limits movement of the first flange 62 relative to the support bracket 82 at least in the axial direction 58. Also, in this embodiment, the second portion 104 of the first surface 100 comprises a second relief feature 110. The second relief feature 110 is a notch. The second relief feature 110 receives a corresponding relief feature of the first flange 62, i.e. a protrusion 112 (e.g., a lip or rim) from a lower surface of the first flange 62. The relief feature 110 (i.e., the notch) receiving the protrusion 112 of the first flange 62 restricts or limits movement of the first flange 62 relative to the support bracket 82 at least in the lateral direction 60. Thus, the coupling of the support bracket 82 to the first flange 62 advantageously tends to restrict movement of the first flange 62 relative to the support bracket 82 in both the axial direction 58 and the lateral direction 60. As mentioned above, the second end 88 of the rigid body portion 84 of a support bracket 82 may be similarly coupled to the second flange 64 to restrict movement of the second flange 64 relative to the support bracket 82 in both the axial direction 58 and the lateral direction 60. More specifically, the second end 88 of the rigid body portion 84 and the second flange 64 may comprise corresponding relief features configured such that movement of the second flange 64 relative to the second end 88 of the rigid body portion 84 is limited in both the axial direction 58 and the lateral direction 60. The second end 88 of the rigid body portion 84 comprises a second surface. The second surface may include a third relief feature and a fourth relief feature. The third relief feature may be configured to restrict relative movement of the second flange in the axial direction. The fourth relief feature may be configured to restrict relative movement of the second flange in the lateral direction. The second surface may be a substantially L-shaped surface having a third portion and a fourth portion disposed substantially perpendicular to the first portion. The third relief feature may be disposed on the third portion. The fourth relief feature may be disposed on the fourth portion. The third relief feature may be a protrusion from the second surface configured to fit into a corresponding groove in the second flange. The fourth relief feature may be a notch in the second surface configured to receive a corresponding protrusion from the second flange. Thus, the coupling of the support bracket 82 to the second flange 64 advantageously tends to restrict movement of the second flange 64 relative to the support bracket 82 in both the axial direction 58 and the lateral direction 60. Thus, axial and lateral movement of first and second flanges 62, 64 tend to be restricted relative to the first and second members 90, 92 respectively. Preferably, a degree of relative lateral movement of the first and second flanges 62, 64 is permitted to allow flexibility. In some embodiments, a degree of relative axial movement of the first and second flanges 62, 64 may be permitted Figure 8 is a schematic illustration (not to scale) showing installation of the support bracket 82. In this embodiment, a support bracket 82 may be installed, i.e. fixed to, the conduit assembly 50 as follows. Firstly, the first member 90 and the second member 92 are detached / decoupled from one another. The first member 90 is then coupled to the first flange 62. Specifically, the first end 86 of the first member 90 is positioned at an angle relative to the first flange 62 so that the second portion 104 hooks onto the protruding rim 112, with the protruding rim 112 being received in the notch 110. The first member 90 is then rotated outwards about a point 200 on the second portion 104 at the edge of the notch 110, as illustrated in Figure 8 by an arrow and the reference numeral 202. The second member 92 is then coupled to the second flange 64 in corresponding fashion. The first member 90 and the second member 92 are then securely together attached at their proximal ends by the plurality of fasteners 96. The support bracket 82 may be removed from the conduit assembly 50 by reversing the above-described installation process. Advantageously, the conduit assembly tends to provide for the gas-tight attachment of the fluid input line (i.e. the foreline from the entity) to the vacuum pumping and / or abatement apparatus without bolting the fluid input line and the apparatus directly together. Advantageously, use of the bellows portion tends to accommodate for movement due to vibration in the module. This tends to substantially prevent or reduce vibration from disturbing connected systems which may be sensitive to movement. The above-described support bracket advantageously tends to limit the movement of bellows. In particular, both expansion and compression of the bellows in the axial direction, and bending or shearing of the bellows in the lateral direction tend to be restricted. Axial and lateral movement of the flanges relative to one another tends to be limited. For example, a degree of relative lateral movement and / or axial movement of the flanges may be permitted. This tends to reduce or limit stresses in the bellows, for example, during maintenance or transport operations. By preventing or opposing relative axial and lateral movement of the flanges, stresses affecting the bellows tend to be significantly reduced. Thus, required structural rigidity and cost of the frame also tends to be reduced. Advantageously, the above-described apparatus can be installed in different orientations. Advantageously, the above describe support bracket is able to couple to International Organization for Standardization (ISO) standard flange features. For example, the protrusion 106 may fit into the ISO flange outer groove 108 to resist excessive tension in the bellows. Also, the notch 110 may cradle the ISO flange inner lip 112 to resist excessive compression in the bellows. The notch 110 may also receive the inner lip 112 to resist any outward forces that could compromise the support brackets’ stability. In the above embodiments, the apparatus is implemented in a modular vacuum pumping and / or abatement system that is described in more detail earlier above with reference to Figures 1 and 2. The modules are arranged and connected together in a side-by-side, contiguous arrangement, each module being attached to one or more adjacent modules at one or both of its lateral sides. However, in other embodiments, the apparatus is implemented in a different type of vacuum pumping and / or abatement system, which is different to that described above. In the above embodiments, the conduit assembly may connect together the fluid input line and the vacuum pumping and / or abatement apparatus. However, in other embodiments, the conduit assembly may be used to connect together a different pair of entities, for example a vacuum pumping and / or abatement apparatus may be connected by the conduit assembly to an exhaust line. In the above embodiments, the conduit assembly comprises a bellows portion. However, in other embodiments, the conduit assembly comprises a different type of extendible / compressible portion, for example a telescopic section. In the above embodiments, the relief features on the support brackets and flanges are those described above. However, in other embodiments, one or more of the above-described relief features is replaced by a different type of relief feature. In general, a relief feature may be one or more selected from the group of relief features consisting of a protrusion, a notch, a groove, a lip, a rim, a cavity, a recess, and an indentation. In the above embodiments, the support brackets limit or restricted relative movement of the first and second flanges. Some degree of relative axial and / or lateral movement may be allowed. For example, where one of the support bracket and the flange comprises a protrusion, and the other of the support bracket and flange comprises a recess (e.g. a notch or a groove) configured to receive the protrusion, the recess may be dimensioned to be oversized relative to the protrusion, such that when the protrusion is inserted into the recess, the support bracket and flange are coupled together, but the oversized recess allows the support bracket and flange to move relative to one another within a defined range. The movement is limited by the interaction between the protrusion and the internal surfaces of the recess. This arrangement provides a degree of controlled relative movement between the support bracket and flange while maintaining the coupling. The size difference between the protrusion and the recess may be selected to accommodate this limited movement, while still ensuring that the protrusion remains engaged within the cavity under normal conditions of use. Nevertheless, in some embodiments a protrusion and corresponding recess may be substantially the same size such that the protrusion fits snuggly into the recess and relative movement of the support bracket and the flange in the axial and / or lateral dimension is opposed or prevented. Reference numerals: 2 - vacuum pumping and / or abatement system 4 - entity 6 - fluid input 8 - exhaust line 10 - facilities supply 12 - facilities input lines 14 - module 16 - apparatus 20 - first facilities lines 21 - vacuum pumping and / or abatement lines 30 - frame 32 - base 34 - front side 36 - rear side 38 - top side 40 - bottom side 42 - lateral sides 50 - conduit assembly 52 - conduit 54 - first end 56 - second end 58 - axial direction 60 - lateral direction 62 - first flange 64 - second flange 66 - gate valve 70 - direction of force 72 - direction of force 74 - direction of force 80 - apparatus 82 - support bracket 84 - rigid portion 86 - first end of rigid portion 88 - second end of rigid portion 90 - first member 92 - second member 94 - coupling mechanism 96 - fasteners 100 - first surface 102 - first portion of first surface 104 - second portion of first surface 106 - first relief feature 108 - groove 110 - second relief feature 112- protrusion 200 - centre of rotation 202 - direction of rotation

Claims

1. An apparatus for use in a vacuum pumping and / or abatement system, the apparatus comprising:a conduit for permitting the flow therethrough of a fluid, the conduit having a first conduit end and a second conduit end opposite to the first conduit end, the conduit being expandable and compressible in an axial direction between the first conduit end and the second conduit end such that a length of the conduit between the first conduit end and the second conduit end may be varied;a first flange at or proximate to the first conduit end;a second flange at or proximate to the second conduit end; anda support bracket; whereinthe support bracket comprises a rigid body portion having a first end and a second end opposite to the first end;the first end of the rigid body portion is couplable to the first flange and the second end of the rigid body portion is couplable to the second flange whereby to limit relative movement of the first and second flanges; andthe first end of the rigid body portion and the first flange comprise corresponding relief features configured such that movement of the first flange relative to the first end of the rigid body portion is limited in both the axial direction and a lateral direction perpendicular to the axial direction.

2. The apparatus of claim 1, wherein:the first end of the rigid body portion comprises a first surface;the first surface has a first relief feature and a second relief feature;the first relief feature is configured to limit relative movement of the first flange in the axial direction; andthe second relief feature is configured to limit relative movement of the first flange in the lateral direction.

3. The apparatus of claim 2, wherein:the first surface is a substantially L-shaped surface having a first portion and a second portion disposed substantially perpendicular to the first portion;the first relief feature is disposed on the first portion; andthe second relief feature is disposed on the second portion.

4. The apparatus of claim 2 or 3, wherein:the first relief feature is a protrusion from the first surface configured to fit into a corresponding groove in the first flange; andthe second relief feature is a recess in the first surface configured to receive a corresponding protrusion from the first flange.

5. The apparatus of any of claims 1 to 4, wherein the second end of the rigid body portion and the second flange comprise corresponding relief features configured such that movement of the second flange relative to the second end of the rigid body portion is limited in both the axial direction and the lateral direction.

6. The apparatus of claim 5, wherein:the second end of the rigid body portion comprises a second surface;the second surface has a third relief feature and a fourth relief feature;the third relief feature is configured to limit relative movement of the second flange in the axial direction; andthe fourth relief feature is configured to limit relative movement of the second flange in the lateral direction.

7. The apparatus of claim 6, wherein:the second surface is a substantially L-shaped surface having a third portion and a fourth portion disposed substantially perpendicular to the first portion;the third relief feature is disposed on the third portion; andthe fourth relief feature is disposed on the fourth portion.

8. The apparatus of claim 6 or 7, wherein:the third relief feature is a protrusion from the second surface configured to fit into a corresponding groove in the second flange; andthe fourth relief feature is a recess in the second surface configured to receive a corresponding protrusion from the second flange.

9. The apparatus of any preceding claim, wherein:the support bracket comprises:a first member comprising the first end; anda second member comprising the second end;the first member and the second member are detachably coupled together by a coupling mechanism.

10. The apparatus of any preceding claim, further comprising:one or more further support brackets; whereinthe support bracket and the one or more further support brackets are spaced apart at substantially equal intervals around a circumferential edge of the conduit;each of the further support bracket comprises a respective rigid body portion having a first end and a second end opposite to the first end;for each of the further support brackets:the first end of the rigid body portion is couplable to the first flange and the second end of the rigid body portion is couplable to the second flange whereby to prevent or oppose relative movement of the first and second flanges; and either:the first end of the rigid body portion and the first flange comprise corresponding relief features configured such that movement of the first flange relative to the first end of the rigid body portion is limited in both the axial direction and the lateral direction; orthe second end of the rigid body portion and the second flange comprise corresponding relief features configured such that movement of the second flange relative to the second end of the rigid body portion is limited in both the axial direction and the lateral direction.

11. The apparatus of any preceding claim, wherein the conduit comprises a bellows-like portion.

12. The apparatus of any preceding claim, wherein the support bracket is formed of a material selected from the group of materials consisting of steel, stainless steel, carbon steel, coated carbon steel, and aluminium.

13. The apparatus of any preceding claim, wherein each relief feature or further relief feature is a relief feature selected from the group of relief features consisting of a protrusion, a notch, a groove, a lip, a rim, a cavity, a recess, and an indentation.

14. A support bracket for use with a conduit assembly of a vacuum pumping and / or abatement system, the conduit assembly comprising a conduit having a first conduit end and a second conduit end opposite to the first conduit end, the conduit being expandable and compressible in an axial direction between the first conduit end and the second conduit end such that a length of the conduit between the first conduit end and the second conduit end may bevaried, the conduit assembly further comprising a first flange at or proximate to the first conduit end, and a second flange at or proximate to the second conduit end, the support bracket comprising:a rigid body portion having a first end and a second end opposite to the first end; whereinthe first end of the rigid body portion is configured to couple to the first flange and the second end of the rigid body portion is configured to couple to the second flange whereby to prevent or oppose relative movement of the first and second flanges; andthe first end of the rigid body portion comprises a surface having at least one relief feature, the at least one relief feature being configured to prevent or oppose movement of the first flange relative to the second flange in both the axial direction and a lateral direction perpendicular to the axial direction.

15. The support bracket of claim 14, whereinthe second end of the rigid body portion comprises a further surface having at least one further relief feature, the at least one further relief feature being configured to prevent or oppose movement of the second flange relative to the first flange in both the axial direction and a lateral direction perpendicular to the axial direction; andwherein each relief feature is a relief feature selected from the group of relief features consisting of a protrusion and a recess.

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