Method and apparatus for non-contact plasma polishing and smoothing of uniformly thinned substrates

IL104662A0Inactive Publication Date: 1993-06-10HUGHES AIRCRAFT CO

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Patent Information

Application Number: IL104662
Authority / Receiving Office: IL · IL
Patent Type: Applications
Current Assignee / Owner
Priority Date: 1992-02-27
Filing Date: 1993-02-09
Publication Date: 1993-06-10
Estimated Expiration: Not applicable · inactive patent

Application Information

Patent Timeline

27 Feb 1992

Priority

09 Feb 1993

Application

IL104662

10 Jun 1993

Publication

IL104662A0

IPC: C23F4/00; H01J37/32; H01L21/302; H01L21/304; H01L21/3065

CPC: H01J37/32082; H01J2237/3341; H01J2237/3344

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