Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations
IL106016A0Inactive Publication Date: 1993-10-20IPEC PRECISION INC
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Patent Information
- Application Number
- IL106016
- Authority / Receiving Office
- IL · IL
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 1992-06-29
- Filing Date
- 1993-06-14
- Publication Date
- 1993-10-20
- Estimated Expiration
- Not applicable · inactive patent
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