Apparatus and method for optimally scanning a two-dimensional surface of one or more objects

IL106018A0Inactive Publication Date: 1993-10-20HUGHES AIRCRAFT CO

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Patent Information

Application Number: IL106018
Authority / Receiving Office: IL · IL
Patent Type: Applications
Current Assignee / Owner
Priority Date: 1992-06-16
Filing Date: 1993-06-14
Publication Date: 1993-10-20
Estimated Expiration: Not applicable · inactive patent

Application Information

Patent Timeline

16 Jun 1992

Priority

14 Jun 1993

Application

IL106018

20 Oct 1993

Publication

IL106018A0

IPC: C23F1/08; G03F7/20; H01J37/305; H01J37/32; H01L21/302; H01L21/3065

CPC: G03F7/70358; H01J37/3056; H01J2237/20228

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