Detecting registration marks with a low energy electron beam

IL133321A0Inactive Publication Date: 2001-04-30ETEC SYSTEMS INC

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Patent Information

Application Number: IL133321
Authority / Receiving Office: IL · IL
Patent Type: Applications
Current Assignee / Owner
Priority Date: 1999-04-05
Filing Date: 1999-04-05
Publication Date: 2001-04-30
Estimated Expiration: Not applicable · inactive patent

Application Information

Patent Timeline

05 Apr 1999

Priority

05 Apr 1999

Application

IL133321

30 Apr 2001

Publication

IL133321A0

IPC: G03F7/20; H01J37/304; H01L21/027; H01L21/66

CPC: H01J37/3045; H01J2237/30438; Y10S438/975; Y10S438/949; H01J37/304

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