Resist underlayer film material, patterning process, and method for forming resist underlayer film

IL303552BActive Publication Date: 2026-07-01SHIN ETSU CHEMICAL CO LTD
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Patent Information

Application Number
IL303552
Authority / Receiving Office
IL · IL
Patent Type
Patents
Current Assignee / Owner
Priority Date
2022-06-10
Filing Date
2023-06-07
Publication Date
2026-07-01
Estimated Expiration
2043-06-07

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