Metrology method for a digital holographic microscope and associated computer program
IL328409APending Publication Date: 2026-07-01ASML NETHERLANDS BV +3
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Patent Information
- Authority / Receiving Office
- IL · IL
- Patent Type
- Applications
- Current Assignee / Owner
- ASML NETHERLANDS BV
- Filing Date
- 2026-05-13
- Publication Date
- 2026-07-01
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