Charging particle-optical device, charged particle-optical module, method of projecting a plurality of charged particle beams towards a sample
IL328591APending Publication Date: 2026-07-01ASML NETHERLANDS BV +1
View PDF 0 Cites 0 Cited by
Patent Information
- Authority / Receiving Office
- IL · IL
- Patent Type
- Applications
- Current Assignee / Owner
- ASML NETHERLANDS BV
- Filing Date
- 2026-05-20
- Publication Date
- 2026-07-01
Need to check novelty before this filing date? Find Prior Art
No text content released.