Metrology method and associated metrology device

IL330713A0Pending Publication Date: 2026-08-01ASML NETHERLANDS BV
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Patent Information

Application Number
IL330713
Authority / Receiving Office
IL · IL
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-02-27
Filing Date
2025-01-29
Publication Date
2026-08-01

AI Technical Summary

Technical Problem

Existing metrology methods struggle to accurately measure the full electric field, including phase information, in a computationally efficient manner, particularly in lithographic processes, due to the need for coherent illumination and strict alignment requirements.

Method used

A metrology apparatus and method using dipole or quadrupole illumination configurations with mutually coherent monopoles, allowing non-iterative reconstruction of the scattered radiation field by blocking or attenuating zeroth-order reflections, enabling phase retrieval without iterative algorithms.

Benefits of technology

Enables accurate and efficient measurement of structure parameters using partial coherent illumination, expanding the usable wavelength-over-pitch range and reducing computational demands while maintaining measurement accuracy.

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Abstract

Disclosed is a metrology apparatus and method. The method comprises: obtaining metrology data relating to a measurement obtained by illuminating a periodic structure with illumination and capturing the resultant scattered radiation from said periodic structure at a detection plane, said scattered radiation passing through at least one detection angularly resolved plane between said periodic structure and detection plane, wherein said illumination comprises an even plurality of monopoles arranged within an illumination angularly resolved plane in one or more coherence groups, wherein each coherence group comprises a respective at least one mutually coherent dipole of said even plurality of monopoles which are all mutually coherent and wherein zeroth order reflection corresponding to all but one monopole for each said one or more coherence groups is blocked or attenuated within said detection angularly resolved plane; non-iteratively reconstructing a field of said scattered radiation.
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