Method and apparatus for thin film deposition on a substrate

IL43966A0Inactive Publication Date: 1974-06-30SALMON A

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Patent Information

Application Number: IL439
Authority / Receiving Office: IL · IL
Patent Type: Applications
Current Assignee / Owner
Priority Date: 1973-01-12
Filing Date: 1974-01-07
Publication Date: 1974-06-30
Estimated Expiration: Not applicable · inactive patent

Application Information

Patent Timeline

12 Jan 1973

Priority

07 Jan 1974

Application

IL439

30 Jun 1974

Publication

IL43966A0

IPC: C23C14/20; C23C14/34; C23C14/42; C23C14/54; C23C14/56; H01J37/34

CPC: C23C14/3464; C23C14/541; C23C14/562; H01J37/3277; H01J37/34

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