Method and apparatus for reactive sputtering of metal on a substrate

IL52212A0Inactive Publication Date: 1977-08-31THE UNIV OF SYDNEY

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Patent Information

Application Number: IL52212
Authority / Receiving Office: IL · IL
Patent Type: Applications
Current Assignee / Owner
Priority Date: 1976-06-10
Filing Date: 1977-06-01
Publication Date: 1977-08-31
Estimated Expiration: Not applicable · inactive patent

Application Information

Patent Timeline

10 Jun 1976

Priority

01 Jun 1977

Application

IL52212

31 Aug 1977

Publication

IL52212A0

IPC: C23C14/06; C23C14/00; C23C14/24; C23C14/34; C23C14/50

CPC: C23C14/0063; C23C14/228; C23C14/34; C23C14/505

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