Method and apparatus for magnetron cathode sputtering

IL66475A0Inactive Publication Date: 1982-12-31THE BOC GRP PLC
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Patent Information

Application Number
IL66475
Authority / Receiving Office
IL · IL
Patent Type
Applications
Current Assignee / Owner
Priority Date
1981-02-12
Filing Date
1982-08-05
Publication Date
1982-12-31
Estimated Expiration
Not applicable · inactive patent
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