Method and apparatus for magnetron cathode sputtering
IL66475A0Inactive Publication Date: 1982-12-31THE BOC GRP PLC
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Patent Information
- Application Number
- IL66475
- Authority / Receiving Office
- IL · IL
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 1981-02-12
- Filing Date
- 1982-08-05
- Publication Date
- 1982-12-31
- Estimated Expiration
- Not applicable · inactive patent
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