Glow discharge deposition apparatus with shield for preventing the deposition of nonhomogeneous films onto the substrate
IL69712A0Inactive Publication Date: 1983-12-30ENERGY CONVERSION DEVICES INC
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Patent Information
- Application Number
- IL69712
- Authority / Receiving Office
- IL · IL
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 1982-09-16
- Filing Date
- 1983-09-13
- Publication Date
- 1983-12-30
- Estimated Expiration
- Not applicable · inactive patent
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