Negative photoresist systems

IL74073A0Inactive Publication Date: 1985-04-30ROHM & HAAS CO

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Patent Information

Application Number: IL74073
Authority / Receiving Office: IL · IL
Patent Type: Applications
Current Assignee / Owner
Priority Date: 1984-01-16
Filing Date: 1985-01-16
Publication Date: 1985-04-30
Estimated Expiration: Not applicable · inactive patent

Application Information

Patent Timeline

16 Jan 1984

Priority

16 Jan 1985

Application

IL74073

30 Apr 1985

Publication

IL74073A0

IPC: C08L79/08; C08L79/04; G03C5/00; G03F7/004; G03F7/008; G03F7/038; H01L21/027

CPC: C08L79/04; G03F7/0085; G03F7/0387; Y10S430/128; G03C5/00

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