Secondary electron detector for use in a gaseous atmosphere and method of detecting secondary electrons thereby

IL86430A0Inactive Publication Date: 1988-11-15ELECTRO SCAN CORP

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Patent Information

Application Number: IL86430
Authority / Receiving Office: IL · IL
Patent Type: Applications
Current Assignee / Owner
Priority Date: 1987-05-21
Filing Date: 1988-05-18
Publication Date: 1988-11-15
Estimated Expiration: Not applicable · inactive patent

Application Information

Patent Timeline

21 May 1987

Priority

18 May 1988

Application

IL86430

15 Nov 1988

Publication

IL86430A0

IPC: H01J37/28; H01J37/06; H01J37/244; H01J37/252

CPC: H01J37/244; H01J2237/2448; H01J2237/2449; H01J2237/24507; H01J37/28

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