Process methodology for two-sided fabrication of devices on thinned silicon
IL87414A0Inactive Publication Date: 1989-01-31SANTA BARBARA RES CENT
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Patent Information
- Application Number
- IL87414
- Authority / Receiving Office
- IL · IL
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 1987-08-27
- Filing Date
- 1988-08-11
- Publication Date
- 1989-01-31
- Estimated Expiration
- Not applicable · inactive patent
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