Apparatus for transport of articles such as semiconductors to and from a vacuum enclosure
IL88574A0Inactive Publication Date: 1989-07-31OPAL
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Patent Information
- Application Number
- IL88574
- Authority / Receiving Office
- IL · IL
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 1988-12-04
- Publication Date
- 1989-07-31
- Estimated Expiration
- Not applicable · inactive patent
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