High sensitivity mid and deep UV resist

IL89632A0Inactive Publication Date: 1989-09-10AMNON KNOLL +1

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Patent Information

Application Number: IL896
Authority / Receiving Office: IL · IL
Patent Type: Applications
Current Assignee / Owner
Priority Date: 1988-08-05
Filing Date: 1989-03-16
Publication Date: 1989-09-10
Estimated Expiration: Not applicable · inactive patent

Application Information

Patent Timeline

05 Aug 1988

Priority

16 Mar 1989

Application

IL896

10 Sep 1989

Publication

IL89632A0

IPC: G03F7/022; G03F7/023; H01L21/027

CPC: G03F7/0236; G03F7/038

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