Method and apparatus for accurate coulometric measuring of the thickness and composition of a thin metal layer on a substrate
IL90372A0Inactive Publication Date: 1989-12-15ERNESTO HAMBURGER
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Patent Information
- Application Number
- IL90372
- Authority / Receiving Office
- IL · IL
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 1989-05-22
- Publication Date
- 1989-12-15
- Estimated Expiration
- Not applicable · inactive patent
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