Automatic high speed optical inspection system

IL96011A0Inactive Publication Date: 1991-07-18KLA INSTR CORP

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Patent Information

Application Number: IL96011
Authority / Receiving Office: IL · IL
Patent Type: Applications
Current Assignee / Owner
Priority Date: 1989-10-31
Filing Date: 1990-10-15
Publication Date: 1991-07-18
Estimated Expiration: Not applicable · inactive patent

Application Information

Patent Timeline

31 Oct 1989

Priority

15 Oct 1990

Application

IL96011

18 Jul 1991

Publication

IL96011A0

IPC: G01B11/24; G01B11/30; G01N21/64; G01N21/88; G01N21/93; G01N21/956; G01R31/308; G06T1/00; G06T1/20

CPC: G01N21/64; G01N21/956; G01N21/95607; G01N2021/8887; G01N2021/95615; G01N2021/95638; G01N2201/06126; G01N2201/0826

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