AUTOMATIC SYSTEM FOR ALIGNMENT OF PHOTOMASKS IN PROJECTION PRINTING PROCESSES.

IT7927366A0Inactive Publication Date: 1979-11-16RCA CORP

Patent Information

Authority / Receiving Office
IT · IT
Patent Type
Applications
Current Assignee / Owner
RCA CORP
Filing Date
1979-11-16
Publication Date
1979-11-16
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

Existing photomask alignment systems in projection printing processes are inefficient and lack precision, leading to suboptimal results in semiconductor manufacturing.

Method used

A modular and compact alignment system for photomasks that uses a compact alignment device to ensure precise alignment during projection printing processes, enhancing the accuracy and efficiency of semiconductor manufacturing.

Benefits of technology

The system improves alignment precision, resulting in higher quality semiconductor production by reducing defects and improving yield in the manufacturing process.

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Description

MODULARIO E tiniMANOTQ Πβ ' Μ#,|-4«Τ6Α MINISTRY OF INDUSTRY, COMMERCE AND CRAFTS DG P. I. - CENTRAL PATENT OFFICE PATENT FOR INDUSTRIAL INVENTION if 4.........α..ε......................... / / This patent is granted for the invention which is the subject of the application specified below: QUESTION NO. Year 27857 7S UPICA MILAN CODES PRESENT DATE QUESTION PBMAHM 14 1 2 79 00 □oc )0 D TITLE RE LUK LAMELLEN UNO KUPPLUNGSBAU GMBH 9UHL- FED. REP. 01 GERMANY TITLE STARTING DEVICE FOR AN INTERNAL COMBUSTION ENGINE. INV. DES. MAUCHER PAUL GESCHKA HUGO WERNER PRIORITY FED. REP. OF GERMANY PATENT DOM. NP 28531308 OF 8 DECEMBER 1978 Rome, there.......... Crucca ϊΊνοΐί 70159 mah Register A Protocol No. 27657 A / 79 MINISTRY OF INDUSTRY, COMMERCE AND ARTISAN* TO Provincial Office of Industry, Commerce and Crafts of Milan COPY OF THE MINUTES OF FILING FOR A PATENT FOR AN INDIVIDUAL INVENTION The year 1979, day four, hours and minutes LUE LAMELLE! UND KUPPLUNGSBAU GmbH of the month of December of German nationality with headquarters in Bühl (Germany).in Via iwawbeotiwc MODIANO & ASSOCIATI Sas di dr.ing. G. MODIANO & C. through an agent (Italian Patent and Trademark Agency) and with domicile for legal purposes at Milan - Via Meravigli 16 at the office of the agent has presented to me, the undersigned. - Stamped application for the granting of a patent for an industrial invention entitled: STARTING DEVICE FOR INTERNAL COMBUSTION ENGINES. itxnscnxnxxx οβηκιοππΝκχ Designated Inventors* MAUCHER Paul, GESCHKA Hugo—Werner Priority of patent application in: Federal Republic of Germany No. P 2853130.8 of 8 December 197® supplementary to patent no. filed on granted on {application no. accompanied by ; - Description in duplicate of 19 pages of writing. - Drawings, plates rs. 2 in duplo. - Letter of appointment -«£>etwmtBiaBrt«iK*wWOT - Priority document and Italian translation - JimBa3siwiws3wi37XwswaeeìWTW Deacon of Inventors - Proof of payment into postal account no. 00668004 in the name of the Tax and Concession Registry Office of Rome of L.76»5OO issued by the Milan Post Office - Revenue stamp of L. 2,000.15 dated 20.11.1979 n. 555 The application, descriptions and drawings listed above are stamped and stamped with the official seal. signed by the applicant and countersigned by me. Taddeìc al'Uiiìcid (gdilìia Russo} U;.· · Hon. MINISTRY OF INDUSTRY, TRADE AND CRAFTS lliSlkW Central Patent Office -ROMA The Company UiPJ.CA'· LANO ** rtVlilu . TTTt LUK LAMELLEN UND KUFPLUNGSBAU GmbH of German nationality With headquarters ftmutaBfar Q 4,12.7 9 UW7 Bdhl (, Germani ----~~ Ont. by Agent M3DIAN0 & ASSOCIATI Sas· di Dr.Ing.G,MEDIANO & C.(Italian Patent and Trademark Agency) and with domicile for legal purposes in Milan Via Meravigli 16, requests the granting of a patent for the invention entitled: DEVICE FOR STARTING A COMBUSTION ENGINE ..... INTERNAL. Inventor Designated: MàUCHER Paul, GESCHKA Hugo-Werner Priority of patent application in: Federal Republic of Germany nP 2S5313O.Q of 1 December 1978 Attached documentation: a) Description in duplicate of 19 pages of writing b) Drawings of n. 2 tables in duplicate c) Letter of appointment d) Priority document with Italian translation e) Aurii <mejeea»w«sw*wei3bexdxwxeee«nnew / wo»xsàaerw»)x f) Act of designation of the inventor / 7*^ V i,#77 g) Certificate of payment (copy N. OO668OO4) of L. 76,500 / Wjpji· issued by the Post Office of Milan 15 on V·' .. . S -Z Sf h) Revenue stamp of L. 2,000·- TO - U - ,, -

Claims

1. CLAIMS 1. Device for starting an internal combustion engine, which has a unit driven by a compressed fluid, characterised in that the actuation of a pump (9) for the compressed fluid and the actuation of a starter wheel (8) take place by means of a common drive motor (7, 7a). ....... ' · < » **·**·—· :· .... ·«·*« · » # 2. Device for starting an internal combustion engine. ,with t,·* ·..· · · * · · · • · · * particular according to claim 1, characterised in that a flywheel (3) is coupled to the internal combustion engine (2) which, ,de*re.· • · · · · · be accelerated to a certain number of revolutions by means of a» <aio• · · · * ta di frizione (8) e che può venire inserito tramite una frizione azionata da un fluido compresso nonché una pompa (9) e dal fatto che alla pompa e alla ruota di avviamento è accoppiato un motore di comando (7 / 7a) I comune.

3. Device according to claim 1 or 2, characterised in that first the pump (9) can be started up in function of a control device, after the starter motor (7j7a) has been switched on and the starter wheel (8) for controlling the flywheel (3) can only be started up after a set pressure has been reached. 4* Device according to one of claims 1—3, characterised in that the starter wheel (8) or the pump (9) can be set in motion as required.

5. Device according to one of claims 3 or 4, characterised in that the functional connection between the pump (9) respectively the starter wheel (8) and the drive motor (7, 7a) can be interrupted.

6. Device according to claim 5, characterized in that .· ·. • « the interruption, respectively the reinsertion of the control of the.»«sipa • * * · · · · *·** I.·· (9) take place as a function of the pressure, *··ϊ. · • » · · · • · ♦ ♦ · · 7. Device according to claim 6, characterized by the failureóIóM . ζ • · · · · · ....; ... the interruption, respectively the reinsertion of the control of the^peijipa. ·· '···; : . : (9) can be provided by means of a pressure switch, *·.,·“ ,··.* • * * · · 8. Device according to one of claims 4 or 5, characterised by *f * β φ φ Φ ee » the fact that the interruption of the control of the pump (9) takes place in function of the disengaged position of the clutch. * 9. Device according to one of claims 1-8, characterised in that stopping members (20) are provided to keep the starter wheel (8) in a position not in engagement with the flywheel (3), 10. Device according to one of claims 1-9, characterised in that regulating organs (20) are provided to bring the starter wheel (6) into a position of engagement with the flywheel (3), 11. Device according to claim 9 or 10, characterised in that the stopping and / or regulating organs (20) can be controlled as a function of the pressure or as a function of the disengaged position of the clutch.

12. Device, in particular according to claim 4, characterised in that the control, depending on the need of the pump (9) or the starter wheel (8), takes place with actuation as a function of the pressure IJ». Device according to claim 4, or according to the subsequent ones, characterised in that the control, depending on the need of the pump (9) or the starter wheel (8), takes place as a function of the position of the disengagement organs (4,3, respectively 11,12) delip / iri^... .. · · * ....... *·., · tion. · * 14» Device, in particular of motor vehicles, according to one of the '-i «... • <.· « · * cations 1-4 or according to the subsequent ones, where for the coupling and decoupling of the flywheel a clutch is provided, as well as a clutch, in particular a gearbox clutch, characterised in that the control of the pump (9) or the starter wheel (8) according to the need takes place as a function of the disengagement position of the two pressures. 15· Device according to one of claims 1—14, characterised in that the pump (9) is integrated with the starter motor (7»7a).

16. Device according to one of claims 1—15» characterised in that the members (33) for stopping and / or the members (20) for unlocking the starter wheel (8) are integrated in the starter motor (71 7a). 17» Device according to one of claims 1-16, characterised in that members (20) are provided for disengaging the starter wheel, in particular for moving it away from the flywheel 18* Device according to claim 17, characterised in that the members (20) can be controlled as a function of the energy accumulated in the flywheel (3). (3). - 17 Ν ··' ο 19· Device according to claim 17, characterised in that the members (20) can be controlled as a function of the number of revolutions of the flywheel (3). ·· · · · 20. Device according to claim 17, characterised by the f*sQf / p that the members (20) are controllable as a function of the position preceding the clutch.

21. Device, in particular according to one of claims 1~£DQ « · · ···. characterised in that the direction of rotation of the drive motor (7a) can be reversed. . .· • · * 22. Device according to claim 21, characterised in that • · · · · a direction of rotation (3θ) for the control of the pump (9) and a direction of rotation (31) for the engagement of the starter wheel (8) with the flywheel (3) are fixed. 23· Device according to claim 21, or 22, characterised in that between the drive motor (7 a) and the starter wheel (8) a steeply sloping thread (33) in the form of a screw actuator is provided so that for a rotation of the drive motor in the direction of rotation (30) which drives the pump (9)1 the steeply sloping thread (33) keeps the starter wheel (8) out of the preBa with the flywheel 24· Device according to one of claims 21-23 characterised in that a one-way joint (35) is provided between the drive motor (7a) and the pump (9) so that for one revolution of the drive motor (7a) in the direction of rotation (31) corresponding to the engagement of the starter wheel (8) with the flywheel (3) the pump is not started. _______ - 18 25. Device according to one of claims 21-24, characterised in that the pump (9) is controlled by a disc cam (34) and between this and its other motor there is provided the Unidirectional point (35), which gives rise to the rotary coupling connection with the other (32) only in one direction of rotation (30) defined for the pump control. .....

26. Device according to one of claims 21-25, characterised in that the direction of rotation of the control motor (?a) can be provided as a function of the pressure.

27. Device according to one of claims 21—28, characterised by « · · · · the fact that the direction of rotation of the control motor (7a) can be provided as a function of the disengagement position of the clutches.

28. Device according to one of claims 21—27 characterised in that the drive motor (7a) is a direct current motor with parallel excitation for starting the combustion engine.

29. Device according to one of claims 21-28, characterised in that the reversal of the direction of rotation takes place by changing the field.

30. Device according to one of claims 21-29, characterised in that a switch (36), e.g. a two-pole switch, is inserted in series with the drive motor (7a).

31. Device according to one of claims 1-30, characterised in that the drive motor (7a) is operated as a function of the speed. 32? Device according to claim 31, characterized in that - 19 “ the speed regulation takes place as a function of the factors influencing the starting behavior, such as air, water and oil temperature. 33· Device according to claim 31 or 32, characterised <uv. •·* ·»·· e · ·· * fatto che la regolazione del numero di giri ha luogo in continuo. *··ϊ. ί**’ • » · · * • · « · · « 34. Device according to one of claims 31 or 32, characterized by the fact that the speed regulation takes place continuously, for example by means of a switchable resistor. .* • and more LUK LAUELLEN UND KUPPLU1TGSBAU GmbH • · I 11 Authorized Representative:· **\ »8» CngT^G. Modiano ad • * » · • » « · .··.··